DE69219762T2 - Kompensator des statischen drucks für druckwandler - Google Patents
Kompensator des statischen drucks für druckwandlerInfo
- Publication number
- DE69219762T2 DE69219762T2 DE69219762T DE69219762T DE69219762T2 DE 69219762 T2 DE69219762 T2 DE 69219762T2 DE 69219762 T DE69219762 T DE 69219762T DE 69219762 T DE69219762 T DE 69219762T DE 69219762 T2 DE69219762 T2 DE 69219762T2
- Authority
- DE
- Germany
- Prior art keywords
- capacitance
- differential pressure
- static pressure
- changes
- pressure signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US07/667,320 US5163326A (en) | 1991-03-08 | 1991-03-08 | Line pressure compensator for a pressure transducer |
| PCT/US1992/001683 WO1992015850A1 (en) | 1991-03-08 | 1992-03-02 | Line pressure compensator for a pressure transducer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69219762D1 DE69219762D1 (de) | 1997-06-19 |
| DE69219762T2 true DE69219762T2 (de) | 1997-08-28 |
Family
ID=24677749
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69219762T Expired - Fee Related DE69219762T2 (de) | 1991-03-08 | 1992-03-02 | Kompensator des statischen drucks für druckwandler |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5163326A (enExample) |
| EP (1) | EP0574539B1 (enExample) |
| JP (1) | JP3190337B2 (enExample) |
| CA (1) | CA2101440A1 (enExample) |
| DE (1) | DE69219762T2 (enExample) |
| WO (1) | WO1992015850A1 (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5237285A (en) * | 1991-10-18 | 1993-08-17 | Rosemount Inc. | Method and apparatus for capacitance temperature compensation and manufacturability in a dual plate capacitive pressure transmitter |
| JP3106805B2 (ja) | 1993-10-14 | 2000-11-06 | 富士電機株式会社 | 圧力差測定方法及び変位変換装置 |
| US5438880A (en) * | 1994-05-17 | 1995-08-08 | United Technologies Corporation | Electrostatic linear airspeed transducer |
| US5616846A (en) * | 1994-10-27 | 1997-04-01 | Kwasnik; Joseph W. | Method and apparatus for current regulation and temperature compensation |
| US6879056B2 (en) * | 2000-12-29 | 2005-04-12 | Intel Corporation | Converting sensed signals |
| DE10229703A1 (de) * | 2002-07-02 | 2004-01-15 | Endress + Hauser Gmbh + Co. Kg | Kapazitiver Drucksensor |
| JP4525222B2 (ja) * | 2004-07-21 | 2010-08-18 | 富士電機システムズ株式会社 | 静電容量式圧力測定装置 |
| CN100427911C (zh) * | 2006-11-03 | 2008-10-22 | 沈阳仪表科学研究院 | 电容差压传感器静压影响补偿方法 |
| NL2003266A1 (nl) | 2008-08-11 | 2010-02-15 | Asml Holding Nv | Multi nozzle proximity sensor employing common sensing and nozzle shaping. |
| US8234927B2 (en) * | 2010-06-08 | 2012-08-07 | Rosemount Inc. | Differential pressure sensor with line pressure measurement |
| US9038476B2 (en) * | 2012-09-27 | 2015-05-26 | Rosemount Inc. | Pressure transmitter with fill tube |
| US10309997B2 (en) * | 2013-03-15 | 2019-06-04 | Infineon Technologies Ag | Apparatus and a method for generating a sensor signal indicating information on a capacitance of a variable capacitor comprising a variable capacitance |
| US11046575B2 (en) * | 2017-10-31 | 2021-06-29 | Encite Llc | Broad range micro pressure sensor |
| EP3861312A1 (en) * | 2018-10-05 | 2021-08-11 | Avgi Engineering, Inc. | Differential pressure transmitter with intrinsic verification |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4091683A (en) * | 1976-09-27 | 1978-05-30 | Panex, Inc. | Single channel electrical comparative measuring system |
| US4370890A (en) * | 1980-10-06 | 1983-02-01 | Rosemount Inc. | Capacitive pressure transducer with isolated sensing diaphragm |
| US4457179A (en) * | 1981-03-16 | 1984-07-03 | The Bendix Corporation | Differential pressure measuring system |
| DE3414896A1 (de) * | 1984-04-19 | 1985-10-24 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Vorrichtung zur verringerung der temperaturabhaengigkeit eines kapazitiven einkammerdifferenzdrucksensors |
| US4791352A (en) * | 1986-07-17 | 1988-12-13 | Rosemount Inc. | Transmitter with vernier measurement |
| JP2544435B2 (ja) * | 1988-04-06 | 1996-10-16 | 株式会社日立製作所 | 多機能センサ |
| US4878012A (en) * | 1988-06-10 | 1989-10-31 | Rosemount Inc. | Charge balanced feedback transmitter |
| JPH047460A (ja) * | 1990-04-24 | 1992-01-10 | Matsushita Electric Works Ltd | 床パネル |
-
1991
- 1991-03-08 US US07/667,320 patent/US5163326A/en not_active Expired - Lifetime
-
1992
- 1992-03-02 WO PCT/US1992/001683 patent/WO1992015850A1/en not_active Ceased
- 1992-03-02 EP EP92908775A patent/EP0574539B1/en not_active Expired - Lifetime
- 1992-03-02 JP JP50824892A patent/JP3190337B2/ja not_active Expired - Fee Related
- 1992-03-02 DE DE69219762T patent/DE69219762T2/de not_active Expired - Fee Related
- 1992-03-02 CA CA002101440A patent/CA2101440A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| US5163326A (en) | 1992-11-17 |
| WO1992015850A1 (en) | 1992-09-17 |
| JPH06507487A (ja) | 1994-08-25 |
| EP0574539A4 (enExample) | 1994-02-23 |
| EP0574539A1 (en) | 1993-12-22 |
| JP3190337B2 (ja) | 2001-07-23 |
| EP0574539B1 (en) | 1997-05-14 |
| CA2101440A1 (en) | 1992-09-09 |
| DE69219762D1 (de) | 1997-06-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69219762T2 (de) | Kompensator des statischen drucks für druckwandler | |
| DE69319430T2 (de) | Gerät zum Messen von Druck | |
| DE69423004T2 (de) | Abgeschirmter kapazitiver geber | |
| DE19648048C2 (de) | Detektorvorrichtung zur Druckmessung basierend auf gemessenen Kapazitätswerten | |
| DE69023930T2 (de) | Messwertgeber mit ausgedehnter messfähigkeit und anteilig nutzbare mittel zum überlastungsschutz. | |
| EP0421394B1 (de) | Differenzdruckmessgerät | |
| DE60023688T2 (de) | Prozessdruckmessung mit verbesserter fehlerkompensation | |
| DE69417337T2 (de) | Druckdifferenzmessverfahren und Verschiebungs-Umwandlungsvorrichtung | |
| EP0826953B1 (de) | Auswerteeinheit eines kapazitiven Drucksensors | |
| DE19940422C2 (de) | Sensor mit kapazitivem Element zur Erfassung einer dynamischen Größe | |
| EP0264388B1 (de) | Schaltungsanordnung zur messung einer mechanischen verformung, insbesondere unter einwirkung eines drucks | |
| DE69517139T2 (de) | Kalibrierungsschaltkreis für kapazitive Sensoren | |
| EP1373852B1 (de) | Kapazitiver differenz-drucksensor | |
| DE2922566A1 (de) | Druckwandler, insbesondere wirkdruckgeber | |
| EP0764839A1 (de) | Druck- oder Differenzdruckmessgerät | |
| DE69006740T2 (de) | Kapazitives drucksensorsystem. | |
| DE19531926C2 (de) | Verfahren zur Korrektur eines Differenzdrucksignals | |
| DE3512529A1 (de) | Differenzdruckmessumformer mit massnahmen zur kompensation der einfluesse von stoerenden veraenderlichen groessen | |
| DE3414896C2 (enExample) | ||
| EP1332374B1 (de) | Verfahren und vorrichtung zum elektrischen nullpunktabgleich für ein mikromechanisches bauelement | |
| EP0508517B2 (de) | Kompensiertes Differenzdruckmessgerät | |
| DE3504329C2 (enExample) | ||
| DE10150691A1 (de) | Druckmeßaufnehmer mit Trennmembran und Temperaturkompensation | |
| EP0017901B1 (de) | Schaltung zum elektrischen Messen mechanischer Grössen | |
| DE19741037C1 (de) | Verfahren zur Korrektur eines Differenzdrucksignals |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |