DE69517139T2 - Kalibrierungsschaltkreis für kapazitive Sensoren - Google Patents

Kalibrierungsschaltkreis für kapazitive Sensoren

Info

Publication number
DE69517139T2
DE69517139T2 DE69517139T DE69517139T DE69517139T2 DE 69517139 T2 DE69517139 T2 DE 69517139T2 DE 69517139 T DE69517139 T DE 69517139T DE 69517139 T DE69517139 T DE 69517139T DE 69517139 T2 DE69517139 T2 DE 69517139T2
Authority
DE
Germany
Prior art keywords
capacitive sensor
calibration circuit
sensor calibration
circuit
capacitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69517139T
Other languages
English (en)
Other versions
DE69517139D1 (de
Inventor
Christopher J Kemp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Visteon Global Technologies Inc
Original Assignee
Ford Werke GmbH
Ford France SA
Ford Motor Co Ltd
Ford Motor Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ford Werke GmbH, Ford France SA, Ford Motor Co Ltd, Ford Motor Co filed Critical Ford Werke GmbH
Publication of DE69517139D1 publication Critical patent/DE69517139D1/de
Application granted granted Critical
Publication of DE69517139T2 publication Critical patent/DE69517139T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/228—Circuits therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analogue/Digital Conversion (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
DE69517139T 1994-12-08 1995-10-17 Kalibrierungsschaltkreis für kapazitive Sensoren Expired - Lifetime DE69517139T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/351,917 US5528520A (en) 1994-12-08 1994-12-08 Calibration circuit for capacitive sensors

Publications (2)

Publication Number Publication Date
DE69517139D1 DE69517139D1 (de) 2000-06-29
DE69517139T2 true DE69517139T2 (de) 2000-09-28

Family

ID=23382978

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69517139T Expired - Lifetime DE69517139T2 (de) 1994-12-08 1995-10-17 Kalibrierungsschaltkreis für kapazitive Sensoren

Country Status (4)

Country Link
US (1) US5528520A (de)
EP (1) EP0716308B1 (de)
JP (1) JPH08233598A (de)
DE (1) DE69517139T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2944442B2 (ja) * 1994-12-15 1999-09-06 日本電気株式会社 ディジタルアナログ変換器
US5737961A (en) * 1996-03-26 1998-04-14 Trw Inc. Method and apparatus for detecting operational failure of a digital accelerometer
US5986497A (en) * 1997-05-16 1999-11-16 Mitsubishi Denki Kabushiki Kaisha Interface circuit for capacitive sensor
JPH1123609A (ja) * 1997-07-04 1999-01-29 Sumitomo Metal Ind Ltd 静電容量型センサ回路
KR100744103B1 (ko) * 1997-12-30 2007-12-20 주식회사 하이닉스반도체 플래쉬메모리장치의로우디코더
WO2002003039A1 (en) * 2000-06-30 2002-01-10 Clark-Reliance Corporation Automatic boiler level controller
US6879056B2 (en) * 2000-12-29 2005-04-12 Intel Corporation Converting sensed signals
KR100382766B1 (ko) * 2001-07-02 2003-05-09 삼성전자주식회사 커패시턴스 변화량 측정 장치 및 방법
JP2005188980A (ja) * 2003-12-24 2005-07-14 Toyoda Mach Works Ltd 圧力センサ
DE102005042085A1 (de) * 2005-09-05 2007-03-15 Siemens Ag Vibrationsmesssystem
US7434985B2 (en) * 2005-12-16 2008-10-14 Etron Technology, Inc. Calibrated built-in temperature sensor and calibration method thereof
DE102006049960A1 (de) * 2006-05-29 2007-12-06 Conti Temic Microelectronic Gmbh Vorrichtung und Verfahren zum Einstellen eines Offsets eines Sensorelements
WO2009015404A2 (de) * 2007-08-01 2009-02-05 Hubert Zangl Verfahren und vorrichtung zur ermittlung von kapazitätswerten kapazitiver sensoren
TWI407700B (zh) * 2009-11-04 2013-09-01 Ind Tech Res Inst 電容式感測元件的校正裝置與方法
DE102009046807B4 (de) * 2009-11-18 2023-01-05 Robert Bosch Gmbh Verfahren zur Empfindlichkeitsbestimmung eines Beschleunigungs- oder Magnetfeldsensors
CN102087123B (zh) * 2009-12-04 2013-05-29 财团法人工业技术研究院 电容式感测组件的校正装置与方法
JP6140919B2 (ja) * 2011-09-30 2017-06-07 曙ブレーキ工業株式会社 加速度センサ回路

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4208625A (en) * 1976-02-23 1980-06-17 Micro Sensors, Inc. Capacitive measuring system with automatic calibration
SE436936B (sv) * 1981-01-29 1985-01-28 Asea Ab Integrerad kapacitiv givare
US4457179A (en) * 1981-03-16 1984-07-03 The Bendix Corporation Differential pressure measuring system
US4398426A (en) * 1981-07-02 1983-08-16 Kavlico Corporation Linear capacitive pressure transducer system
US4449409A (en) * 1981-07-13 1984-05-22 The Bendix Corporation Pressure measurement system with a constant settlement time
US5245873A (en) * 1982-08-25 1993-09-21 Berwind Corporation Capacitance-type material level indicator and method of operation
US4517622A (en) * 1983-08-29 1985-05-14 United Technologies Corporation Capacitive pressure transducer signal conditioning circuit
US4624139A (en) * 1984-09-21 1986-11-25 Berwind Corporation Capacitance-type material level indicator
US4669052A (en) * 1985-07-02 1987-05-26 Motorola, Inc. Apparatus and method for calibrating a sensor
US4736629A (en) * 1985-12-20 1988-04-12 Silicon Designs, Inc. Micro-miniature accelerometer
US4951236A (en) * 1986-05-05 1990-08-21 Texas Instruments Incorporated Low cost high precision sensor
US4820971A (en) * 1986-05-29 1989-04-11 Ko Wen Hsiung Precision impedance variation measurement circuit
US4922756A (en) * 1988-06-20 1990-05-08 Triton Technologies, Inc. Micro-machined accelerometer
US5028876A (en) * 1989-01-30 1991-07-02 Dresser Industries, Inc. Precision capacitive transducer circuits and methods
US4917199A (en) * 1989-04-10 1990-04-17 Toledo Scale Corp. Automatic verification of variable capacitance weighing apparatus
US5103667A (en) * 1989-06-22 1992-04-14 Ic Sensors, Inc. Self-testable micro-accelerometer and method
US5253510A (en) * 1989-06-22 1993-10-19 I C Sensors Self-testable micro-accelerometer
US5126812A (en) * 1990-02-14 1992-06-30 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical accelerometer
EP0459723B1 (de) * 1990-05-30 1996-01-17 Hitachi, Ltd. Halbleiterbeschleunigungsmesser und Kraftfahrzeugsteuerungssystem mit einem solchen
WO1992003740A1 (en) * 1990-08-17 1992-03-05 Analog Devices, Inc. Monolithic accelerometer
US5241850A (en) * 1991-11-01 1993-09-07 Texas Instruments Incorporated Sensor with programmable temperature compensation
US5495414A (en) * 1993-04-07 1996-02-27 Ford Motor Company Integrated silicon automotive accelerometer and single-point impact sensor
US5337260A (en) * 1993-07-12 1994-08-09 Ford Motor Company Method for calibrating a single point impact sensor

Also Published As

Publication number Publication date
DE69517139D1 (de) 2000-06-29
EP0716308A3 (de) 1998-01-28
EP0716308A2 (de) 1996-06-12
US5528520A (en) 1996-06-18
EP0716308B1 (de) 2000-05-24
JPH08233598A (ja) 1996-09-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: FORD-WERKE AG, 50735 KOELN, DE

8327 Change in the person/name/address of the patent owner

Owner name: VISTEON GLOBAL TECHNOLOGIES, INC., DEARBORN, MICH.