DE69219296D1 - Supraleitender Feld-Effekt-Transistor mit extrem dünnen supraleitenden Kanal aus Oxid-Supraleiter Material - Google Patents

Supraleitender Feld-Effekt-Transistor mit extrem dünnen supraleitenden Kanal aus Oxid-Supraleiter Material

Info

Publication number
DE69219296D1
DE69219296D1 DE69219296T DE69219296T DE69219296D1 DE 69219296 D1 DE69219296 D1 DE 69219296D1 DE 69219296 T DE69219296 T DE 69219296T DE 69219296 T DE69219296 T DE 69219296T DE 69219296 D1 DE69219296 D1 DE 69219296D1
Authority
DE
Germany
Prior art keywords
superconducting
effect transistor
extremely thin
oxide superconductor
superconductor material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69219296T
Other languages
English (en)
Other versions
DE69219296T2 (de
Inventor
Hiroshi Inada
So Tanaka
Michitomo Iiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of DE69219296D1 publication Critical patent/DE69219296D1/de
Application granted granted Critical
Publication of DE69219296T2 publication Critical patent/DE69219296T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0661—Processes performed after copper oxide formation, e.g. patterning
    • H10N60/0688—Etching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/20—Permanent superconducting devices
    • H10N60/205—Permanent superconducting devices having three or more electrodes, e.g. transistor-like structures 
    • H10N60/207—Field effect devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/728—Etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
DE69219296T 1991-12-13 1992-12-14 Supraleitender Feld-Effekt-Transistor mit extrem dünnen supraleitenden Kanal aus Oxid-Supraleiter Material Expired - Fee Related DE69219296T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP35219891 1991-12-13
JP35219691 1991-12-13
JP4352660A JPH05251777A (ja) 1991-12-13 1992-12-10 超電導電界効果型素子およびその作製方法

Publications (2)

Publication Number Publication Date
DE69219296D1 true DE69219296D1 (de) 1997-05-28
DE69219296T2 DE69219296T2 (de) 1997-12-04

Family

ID=27341409

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69219296T Expired - Fee Related DE69219296T2 (de) 1991-12-13 1992-12-14 Supraleitender Feld-Effekt-Transistor mit extrem dünnen supraleitenden Kanal aus Oxid-Supraleiter Material

Country Status (4)

Country Link
US (2) US5413982A (de)
EP (2) EP0546958B1 (de)
JP (1) JPH05251777A (de)
DE (1) DE69219296T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5994276A (en) * 1997-09-08 1999-11-30 Mcmaster University Composite high Tc superconductor film
JP2000195837A (ja) * 1998-12-24 2000-07-14 Hitachi Ltd 微細加工方法、磁気力顕微鏡用プローブおよび電場センサ
US6613463B1 (en) * 1999-09-06 2003-09-02 International Superconductivity Technology Center Superconducting laminated oxide substrate and superconducting integrated circuit
JP3776889B2 (ja) * 2003-02-07 2006-05-17 株式会社東芝 半導体装置およびその製造方法
CN109626323B (zh) 2009-02-27 2020-12-01 D-波系统公司 超导集成电路
US9768371B2 (en) 2012-03-08 2017-09-19 D-Wave Systems Inc. Systems and methods for fabrication of superconducting integrated circuits
US9741918B2 (en) 2013-10-07 2017-08-22 Hypres, Inc. Method for increasing the integration level of superconducting electronics circuits, and a resulting circuit
WO2018144601A1 (en) 2017-02-01 2018-08-09 D-Wave Systems Inc. Systems and methods for fabrication of superconducting integrated circuits
US20200152851A1 (en) 2018-11-13 2020-05-14 D-Wave Systems Inc. Systems and methods for fabricating superconducting integrated circuits

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63269585A (ja) * 1987-04-27 1988-11-07 Fujikura Ltd ジヨセフソン接合素子
NL8703039A (nl) * 1987-12-16 1989-07-17 Philips Nv Werkwijze voor het patroonmatig vervaardigen van een dunne laag uit een oxidisch supergeleidend materiaal.
JPH01170080A (ja) * 1987-12-25 1989-07-05 Furukawa Electric Co Ltd:The 超電導ｆｅｔ素子
US5087605A (en) * 1989-06-01 1992-02-11 Bell Communications Research, Inc. Layered lattice-matched superconducting device and method of making
KR930004024B1 (ko) * 1990-04-27 1993-05-19 삼성전기 주식회사 초전도 집적회로소자의 제조방법
JPH04300292A (ja) * 1991-03-26 1992-10-23 Sumitomo Electric Ind Ltd 複合酸化物超電導薄膜の成膜方法
CA2084174C (en) * 1991-11-30 1997-07-29 Takao Nakamura Superconducting device having an extremely thin superconducting channel formed of oxide superconductor material and method for manufacturing thesame

Also Published As

Publication number Publication date
EP0546958A3 (en) 1993-07-14
EP0732756A2 (de) 1996-09-18
US5413982A (en) 1995-05-09
EP0546958B1 (de) 1997-04-23
JPH05251777A (ja) 1993-09-28
EP0732756A3 (de) 1996-10-02
EP0546958A2 (de) 1993-06-16
US5840204A (en) 1998-11-24
DE69219296T2 (de) 1997-12-04

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