DE69214102D1 - Supraleitendes Bauelement mit extrem dünnem Kanal aus supraleitendem Oxidmaterial und Herstellungsverfahren - Google Patents
Supraleitendes Bauelement mit extrem dünnem Kanal aus supraleitendem Oxidmaterial und HerstellungsverfahrenInfo
- Publication number
- DE69214102D1 DE69214102D1 DE69214102T DE69214102T DE69214102D1 DE 69214102 D1 DE69214102 D1 DE 69214102D1 DE 69214102 T DE69214102 T DE 69214102T DE 69214102 T DE69214102 T DE 69214102T DE 69214102 D1 DE69214102 D1 DE 69214102D1
- Authority
- DE
- Germany
- Prior art keywords
- superconducting
- manufacturing process
- oxide material
- extremely thin
- channel made
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/20—Permanent superconducting devices
- H10N60/205—Permanent superconducting devices having three or more electrodes, e.g. transistor-like structures
- H10N60/207—Field effect devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
- Y10S505/701—Coated or thin film device, i.e. active or passive
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
- Y10S505/701—Coated or thin film device, i.e. active or passive
- Y10S505/702—Josephson junction present
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP35166891 | 1991-12-12 | ||
JP6118392 | 1992-02-17 | ||
JP4351722A JPH05299714A (ja) | 1991-12-12 | 1992-12-08 | 超電導電界効果型素子およびその作製方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69214102D1 true DE69214102D1 (de) | 1996-10-31 |
DE69214102T2 DE69214102T2 (de) | 1997-03-20 |
Family
ID=27297417
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69214102T Expired - Fee Related DE69214102T2 (de) | 1991-12-12 | 1992-12-14 | Supraleitendes Bauelement mit extrem dünnem Kanal aus supraleitendem Oxidmaterial und Herstellungsverfahren |
Country Status (4)
Country | Link |
---|---|
US (2) | US5408108A (de) |
EP (1) | EP0546957B1 (de) |
CA (1) | CA2085172C (de) |
DE (1) | DE69214102T2 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05251776A (ja) * | 1991-12-13 | 1993-09-28 | Sumitomo Electric Ind Ltd | 超電導素子およびその作製方法 |
US5479059A (en) * | 1993-08-23 | 1995-12-26 | United Technologies Corporation | Thin film superconductor magnetic bearings |
EP0790655B1 (de) * | 1995-09-29 | 1999-04-14 | Sumitomo Electric Industries, Limited | Supraleitende Feldeffektanordnung mit supraleitendem Kanal und Verfahren zur Herstellung |
US6160266A (en) * | 1996-02-22 | 2000-12-12 | Matsushita Electric Industrial Co., Ltd. | Superconducting device and a method of manufacturing the same |
EP1816689A1 (de) * | 2006-02-07 | 2007-08-08 | ST Microelectronics Crolles 2 SAS | Transistor- oder Triodenstruktur mit Tunneleffekt und einem nichtleitenden Nanokanal |
WO2020006437A1 (en) | 2018-06-29 | 2020-01-02 | Ntp Tec, Llc | Processes for the manufacture of isobutylene, polyisobutylene, and derivatives thereof |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR910002311B1 (ko) * | 1987-02-27 | 1991-04-11 | 가부시기가이샤 히다찌세이사꾸쇼 | 초전도 디바이스 |
EP0480814B1 (de) * | 1990-10-08 | 1996-04-24 | Sumitomo Electric Industries, Ltd. | Supraleitende Einrichtung mit ultradünnem Kanal aus oxydisch supraleitendem Material und Verfahren zu deren Herstellung |
EP0496215B1 (de) * | 1991-01-21 | 1995-08-30 | Siemens Aktiengesellschaft | Verfahren zur Herstellung eines strukturierten Aufbaus mit Hochtemperatursupraleitermaterial |
JPH04284632A (ja) * | 1991-03-14 | 1992-10-09 | Fujitsu Ltd | 超伝導体線路の形成方法 |
JPH05304320A (ja) * | 1991-03-27 | 1993-11-16 | Semiconductor Energy Lab Co Ltd | 超伝導薄膜トランジスタ及びその作製方法 |
CA2084174C (en) * | 1991-11-30 | 1997-07-29 | Takao Nakamura | Superconducting device having an extremely thin superconducting channel formed of oxide superconductor material and method for manufacturing thesame |
-
1992
- 1992-12-11 CA CA002085172A patent/CA2085172C/en not_active Expired - Fee Related
- 1992-12-14 DE DE69214102T patent/DE69214102T2/de not_active Expired - Fee Related
- 1992-12-14 US US07/990,841 patent/US5408108A/en not_active Expired - Fee Related
- 1992-12-14 EP EP92403400A patent/EP0546957B1/de not_active Expired - Lifetime
-
1994
- 1994-12-02 US US08/353,396 patent/US5510324A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0546957B1 (de) | 1996-09-25 |
US5408108A (en) | 1995-04-18 |
CA2085172C (en) | 1996-07-23 |
EP0546957A2 (de) | 1993-06-16 |
CA2085172A1 (en) | 1993-06-13 |
EP0546957A3 (en) | 1993-07-14 |
DE69214102T2 (de) | 1997-03-20 |
US5510324A (en) | 1996-04-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |