DE69214102D1 - Supraleitendes Bauelement mit extrem dünnem Kanal aus supraleitendem Oxidmaterial und Herstellungsverfahren - Google Patents

Supraleitendes Bauelement mit extrem dünnem Kanal aus supraleitendem Oxidmaterial und Herstellungsverfahren

Info

Publication number
DE69214102D1
DE69214102D1 DE69214102T DE69214102T DE69214102D1 DE 69214102 D1 DE69214102 D1 DE 69214102D1 DE 69214102 T DE69214102 T DE 69214102T DE 69214102 T DE69214102 T DE 69214102T DE 69214102 D1 DE69214102 D1 DE 69214102D1
Authority
DE
Germany
Prior art keywords
superconducting
manufacturing process
oxide material
extremely thin
channel made
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69214102T
Other languages
English (en)
Other versions
DE69214102T2 (de
Inventor
Takao Nakamura
Michitomo Iiyama
Hiroshi Inada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP4351722A external-priority patent/JPH05299714A/ja
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Application granted granted Critical
Publication of DE69214102D1 publication Critical patent/DE69214102D1/de
Publication of DE69214102T2 publication Critical patent/DE69214102T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/20—Permanent superconducting devices
    • H10N60/205—Permanent superconducting devices having three or more electrodes, e.g. transistor-like structures 
    • H10N60/207—Field effect devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y10S505/702—Josephson junction present
DE69214102T 1991-12-12 1992-12-14 Supraleitendes Bauelement mit extrem dünnem Kanal aus supraleitendem Oxidmaterial und Herstellungsverfahren Expired - Fee Related DE69214102T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP35166891 1991-12-12
JP6118392 1992-02-17
JP4351722A JPH05299714A (ja) 1991-12-12 1992-12-08 超電導電界効果型素子およびその作製方法

Publications (2)

Publication Number Publication Date
DE69214102D1 true DE69214102D1 (de) 1996-10-31
DE69214102T2 DE69214102T2 (de) 1997-03-20

Family

ID=27297417

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69214102T Expired - Fee Related DE69214102T2 (de) 1991-12-12 1992-12-14 Supraleitendes Bauelement mit extrem dünnem Kanal aus supraleitendem Oxidmaterial und Herstellungsverfahren

Country Status (4)

Country Link
US (2) US5408108A (de)
EP (1) EP0546957B1 (de)
CA (1) CA2085172C (de)
DE (1) DE69214102T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05251776A (ja) * 1991-12-13 1993-09-28 Sumitomo Electric Ind Ltd 超電導素子およびその作製方法
US5479059A (en) * 1993-08-23 1995-12-26 United Technologies Corporation Thin film superconductor magnetic bearings
EP0790655B1 (de) * 1995-09-29 1999-04-14 Sumitomo Electric Industries, Limited Supraleitende Feldeffektanordnung mit supraleitendem Kanal und Verfahren zur Herstellung
US6160266A (en) * 1996-02-22 2000-12-12 Matsushita Electric Industrial Co., Ltd. Superconducting device and a method of manufacturing the same
EP1816689A1 (de) * 2006-02-07 2007-08-08 ST Microelectronics Crolles 2 SAS Transistor- oder Triodenstruktur mit Tunneleffekt und einem nichtleitenden Nanokanal
CA3105355C (en) 2018-06-29 2023-04-25 Ntp Tec, Llc Processes for the manufacture of isobutylene, polyisobutylene, and derivatives thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR910002311B1 (ko) * 1987-02-27 1991-04-11 가부시기가이샤 히다찌세이사꾸쇼 초전도 디바이스
CA2052970C (en) * 1990-10-08 1996-07-02 Takao Nakamura Superconducting device having an extremely thin superconducting channel formed of oxide superconductor material and method for manufacturing the same
DE59203408D1 (de) * 1991-01-21 1995-10-05 Siemens Ag Verfahren zur Herstellung eines strukturierten Aufbaus mit Hochtemperatursupraleitermaterial.
JPH04284632A (ja) * 1991-03-14 1992-10-09 Fujitsu Ltd 超伝導体線路の形成方法
JPH05304320A (ja) * 1991-03-27 1993-11-16 Semiconductor Energy Lab Co Ltd 超伝導薄膜トランジスタ及びその作製方法
EP0545801B1 (de) * 1991-11-30 1997-03-19 Sumitomo Electric Industries, Ltd. Supraleitendes Bauelement mit extrem dünnen supraleitenden Kanal und Herstellungsverfahren

Also Published As

Publication number Publication date
CA2085172A1 (en) 1993-06-13
DE69214102T2 (de) 1997-03-20
US5408108A (en) 1995-04-18
CA2085172C (en) 1996-07-23
US5510324A (en) 1996-04-23
EP0546957B1 (de) 1996-09-25
EP0546957A2 (de) 1993-06-16
EP0546957A3 (en) 1993-07-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee