DE69218277D1 - Titan-Oxid-Schichten und deren Herstellung - Google Patents

Titan-Oxid-Schichten und deren Herstellung

Info

Publication number
DE69218277D1
DE69218277D1 DE69218277T DE69218277T DE69218277D1 DE 69218277 D1 DE69218277 D1 DE 69218277D1 DE 69218277 T DE69218277 T DE 69218277T DE 69218277 T DE69218277 T DE 69218277T DE 69218277 D1 DE69218277 D1 DE 69218277D1
Authority
DE
Germany
Prior art keywords
production
titanium oxide
oxide layers
layers
titanium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69218277T
Other languages
English (en)
Other versions
DE69218277T2 (de
Inventor
Atsushi Mizuno
Yasushi Fukui
Kazunari Nakamoto
Tsuguyasu Yoshii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Nisshin Co Ltd
Original Assignee
Nisshin Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nisshin Steel Co Ltd filed Critical Nisshin Steel Co Ltd
Application granted granted Critical
Publication of DE69218277D1 publication Critical patent/DE69218277D1/de
Publication of DE69218277T2 publication Critical patent/DE69218277T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
DE69218277T 1991-04-03 1992-03-31 Titan-Oxid-Schichten und deren Herstellung Expired - Fee Related DE69218277T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3098283A JP3004760B2 (ja) 1991-04-03 1991-04-03 チタン酸化物青色膜

Publications (2)

Publication Number Publication Date
DE69218277D1 true DE69218277D1 (de) 1997-04-24
DE69218277T2 DE69218277T2 (de) 1997-07-17

Family

ID=14215606

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69218277T Expired - Fee Related DE69218277T2 (de) 1991-04-03 1992-03-31 Titan-Oxid-Schichten und deren Herstellung

Country Status (5)

Country Link
US (1) US5225382A (de)
EP (1) EP0507545B1 (de)
JP (1) JP3004760B2 (de)
KR (1) KR0139619B1 (de)
DE (1) DE69218277T2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5641719A (en) * 1995-05-09 1997-06-24 Flex Products, Inc. Mixed oxide high index optical coating material and method
DE19607833A1 (de) * 1996-03-01 1997-09-04 Merck Patent Gmbh Stabilisierte Aufdampfmaterialien auf Basis von Titanoxid
US5766784A (en) * 1996-04-08 1998-06-16 Battelle Memorial Institute Thin films and uses
EP0816123B1 (de) * 1996-06-27 2009-02-18 Daiwa Seiko Inc. Element für Angel- oder Sportgerät
JP3650079B2 (ja) * 2002-04-25 2005-05-18 株式会社鈴寅 機能性繊維シート
JP5700622B2 (ja) * 2010-05-21 2015-04-15 国立大学法人 東京大学 酸化チタン薄膜、その製造方法、磁気メモリ、光情報記録媒体及び電荷蓄積型メモリ
US8974896B2 (en) * 2013-03-08 2015-03-10 Vapor Technologies, Inc. Coated article with dark color
EP3892151A1 (de) * 2020-04-06 2021-10-13 Rolex Sa Uhrenkomponente und verfahren zur herstellung einer uhrenkomponente

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2028376B (en) * 1978-08-23 1982-11-03 Ppg Industries Inc Electrically conductive coatings
JP2590464B2 (ja) * 1986-11-17 1997-03-12 セイコーエプソン株式会社 時計用外装部品
JPS63161156A (ja) * 1986-12-24 1988-07-04 Shinko Seiki Kk 硬質青色薄膜およびその製造方法
US4931213A (en) * 1987-01-23 1990-06-05 Cass Richard B Electrically-conductive titanium suboxides
JPH02270108A (ja) * 1990-03-24 1990-11-05 Sony Corp 回転ヘッド型記録再生装置

Also Published As

Publication number Publication date
DE69218277T2 (de) 1997-07-17
EP0507545B1 (de) 1997-03-19
KR920019963A (ko) 1992-11-20
US5225382A (en) 1993-07-06
JP3004760B2 (ja) 2000-01-31
EP0507545A1 (de) 1992-10-07
KR0139619B1 (ko) 1998-07-15
JPH04308074A (ja) 1992-10-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee