DE69105641D1 - Infrarotdetektoren und deren Herstellung. - Google Patents

Infrarotdetektoren und deren Herstellung.

Info

Publication number
DE69105641D1
DE69105641D1 DE69105641T DE69105641T DE69105641D1 DE 69105641 D1 DE69105641 D1 DE 69105641D1 DE 69105641 T DE69105641 T DE 69105641T DE 69105641 T DE69105641 T DE 69105641T DE 69105641 D1 DE69105641 D1 DE 69105641D1
Authority
DE
Germany
Prior art keywords
manufacture
infrared detectors
detectors
infrared
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69105641T
Other languages
English (en)
Other versions
DE69105641T2 (de
Inventor
David John Gowlett
Robert John Barton
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BAE Systems Electronics Ltd
Original Assignee
GEC Marconi Ltd
Marconi Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GEC Marconi Ltd, Marconi Co Ltd filed Critical GEC Marconi Ltd
Application granted granted Critical
Publication of DE69105641D1 publication Critical patent/DE69105641D1/de
Publication of DE69105641T2 publication Critical patent/DE69105641T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/061—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/024—Arrangements for cooling, heating, ventilating or temperature compensation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
DE69105641T 1990-06-22 1991-06-18 Infrarotdetektoren und deren Herstellung. Expired - Fee Related DE69105641T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9013939A GB2245415A (en) 1990-06-22 1990-06-22 Infrared detector with a getter

Publications (2)

Publication Number Publication Date
DE69105641D1 true DE69105641D1 (de) 1995-01-19
DE69105641T2 DE69105641T2 (de) 1995-04-13

Family

ID=10678036

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69105641T Expired - Fee Related DE69105641T2 (de) 1990-06-22 1991-06-18 Infrarotdetektoren und deren Herstellung.

Country Status (6)

Country Link
US (1) US5177364A (de)
EP (1) EP0464893B1 (de)
JP (1) JPH04232427A (de)
DE (1) DE69105641T2 (de)
GB (1) GB2245415A (de)
IL (1) IL98566A0 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5260575A (en) * 1993-03-10 1993-11-09 Mitsubishi Denki Kabushiki Kaisha Infrared detector
USRE35333E (en) * 1992-05-19 1996-09-24 Mitsubishi Denki Kabushiki Kaisha Infrared detector
US5587736A (en) * 1993-02-16 1996-12-24 Envision Medical Corporation Sterilizable CCD video camera
US6021046A (en) * 1993-06-09 2000-02-01 Dallas Semiconductor Corporation Thermal protection of electrical elements systems
US5528463A (en) * 1993-07-16 1996-06-18 Dallas Semiconductor Corp. Low profile sockets and modules for surface mountable applications
US5552608A (en) * 1995-06-26 1996-09-03 Philips Electronics North America Corporation Closed cycle gas cryogenically cooled radiation detector
FR2737566B1 (fr) * 1995-08-02 1997-09-19 Sofradir Procede pour realiser l'assemblage d'un bloc de detection d'ondes electromagnetiques, notamment infrarouges, avec un support conducteur thermique, et detecteur d'ondes electromagnetiques mettant en oeuvre ce procede
US6169775B1 (en) * 1997-03-19 2001-01-02 Seiko Instruments Inc. Radiation detecting apparatus
DE10339319B4 (de) * 2003-08-27 2013-02-07 Robert Bosch Gmbh Edelgasgefülltes Sensorelement für optische Sensoren
DE102004020685B3 (de) * 2004-04-28 2005-09-01 Robert Bosch Gmbh Infrarotsensor mit Getterschicht
GB0523838D0 (en) * 2005-11-23 2006-01-04 Oxford Instr Analytical Ltd X-Ray detector and method
USRE48693E1 (en) * 2006-03-19 2021-08-17 Shimon Maimon Application of reduced dark current photodetector with a thermoelectric cooler
USRE48642E1 (en) 2006-03-19 2021-07-13 Shimon Maimon Application of reduced dark current photodetector
US9766130B2 (en) * 2006-03-19 2017-09-19 Shimon Maimon Application of reduced dark current photodetector with a thermoelectric cooler
US11264528B2 (en) * 2006-03-19 2022-03-01 Shimon Maimon Reduced dark current photodetector with charge compensated barrier layer
US11245048B2 (en) * 2006-03-19 2022-02-08 Shimon Maimon Reduced dark current photodetector with charge compensated barrier layer
WO2008005581A2 (en) * 2006-07-07 2008-01-10 United Parcel Service Of America, Inc. Compiled data for software applications
JP5780407B2 (ja) 2008-03-12 2015-09-16 アクタール リミテッド 薄層構造（ｔｈｉｎ−ｌａｙｅｒｅｄｓｔｒｕｃｔｕｒｅ）
US9010131B2 (en) * 2009-07-07 2015-04-21 Raytheon Company Methods and apparatus for Dewar and cold shield assemblies
US9157806B2 (en) * 2010-02-18 2015-10-13 Rafael Advanced Defense Systems Ltd. System and method for changing spectral range of a cryogenically cooled detector
CN102538551A (zh) * 2012-01-20 2012-07-04 中国科学院上海技术物理研究所 一种用于空间制冷机大冷量传输的圆柱型柔性冷链
KR102576702B1 (ko) 2016-07-06 2023-09-08 삼성전자주식회사 증착 공정 모니터링 시스템, 및 그 시스템을 이용한 증착 공정 제어방법과 반도체 소자 제조방법
US11205133B2 (en) 2018-01-12 2021-12-21 IonQ, Inc. Vibrationally isolated cryogenic shield for local high-quality vacuum
CN109945979B (zh) * 2019-03-11 2024-05-07 中国科学院上海技术物理研究所 一种用于低温光学系统的红外探测器组件杜瓦外壳结构
CN116625517B (zh) * 2023-07-21 2023-10-20 浙江珏芯微电子有限公司 一种新型红外探测器杜瓦

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6712083A (de) * 1967-09-02 1969-03-04
US3851173A (en) * 1973-06-25 1974-11-26 Texas Instruments Inc Thermal energy receiver
US4206354A (en) * 1976-07-09 1980-06-03 Honeywell Inc. Axial matrix Dewar
DE2818237A1 (de) * 1978-04-26 1979-11-08 Licentia Gmbh Infrarot-detektorzelle
NL7808774A (nl) * 1978-08-25 1980-02-27 Philips Nv Zonnecollector.
JPS58138383A (ja) * 1982-02-13 1983-08-17 Nippon Shinyaku Co Ltd 生理活性物質の製法
GB2115602B (en) * 1982-02-24 1986-01-02 Philips Electronic Associated Getters in infra-red radiation detectors
US4528449A (en) * 1982-12-27 1985-07-09 Honeywell Inc. Detector dewar assembly
DD217017A1 (de) * 1983-03-22 1985-01-02 Univ Dresden Tech Kryostat mit infrarotdetektor fuer pyro- oder spektrometer (i)
US4886240A (en) * 1988-10-20 1989-12-12 Santa Barbara Research Center Dewar cryopumping using barium oxide composite for moisture removal
GB2231716A (en) * 1989-05-10 1990-11-21 Philips Electronic Associated Producing and maintaining a vacuum space in an infrared detector or other device with a getter

Also Published As

Publication number Publication date
GB9013939D0 (en) 1990-08-15
EP0464893B1 (de) 1994-12-07
US5177364A (en) 1993-01-05
EP0464893A1 (de) 1992-01-08
JPH04232427A (ja) 1992-08-20
DE69105641T2 (de) 1995-04-13
GB2245415A (en) 1992-01-02
IL98566A0 (en) 1992-07-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee