DE69212670D1 - Supraleitende oxydische Dünnschicht mit lokal unterschiedlichen Kristallorientierungen und ein Verfahren zu deren Herstellung - Google Patents

Supraleitende oxydische Dünnschicht mit lokal unterschiedlichen Kristallorientierungen und ein Verfahren zu deren Herstellung

Info

Publication number
DE69212670D1
DE69212670D1 DE69212670T DE69212670T DE69212670D1 DE 69212670 D1 DE69212670 D1 DE 69212670D1 DE 69212670 T DE69212670 T DE 69212670T DE 69212670 T DE69212670 T DE 69212670T DE 69212670 D1 DE69212670 D1 DE 69212670D1
Authority
DE
Germany
Prior art keywords
production
thin film
oxide thin
different crystal
crystal orientations
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69212670T
Other languages
English (en)
Other versions
DE69212670T2 (de
Inventor
Hiroshi Inada
Michitomo Iiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Application granted granted Critical
Publication of DE69212670D1 publication Critical patent/DE69212670D1/de
Publication of DE69212670T2 publication Critical patent/DE69212670T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices
    • H10N60/0941—Manufacture or treatment of Josephson-effect devices comprising high-Tc ceramic materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/922—Static electricity metal bleed-off metallic stock
    • Y10S428/9265—Special properties
    • Y10S428/93—Electric superconducting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/922—Static electricity metal bleed-off metallic stock
    • Y10S428/9335—Product by special process
    • Y10S428/936—Chemical deposition, e.g. electroless plating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73—Vacuum treating or coating
    • Y10S505/731—Sputter coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24926—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including ceramic, glass, porcelain or quartz layer

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
DE69212670T 1991-03-04 1992-03-04 Supraleitende oxydische Dünnschicht mit lokal unterschiedlichen Kristallorientierungen und ein Verfahren zu deren Herstellung Expired - Fee Related DE69212670T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP6260391 1991-03-04
JP6260291 1991-03-04

Publications (2)

Publication Number Publication Date
DE69212670D1 true DE69212670D1 (de) 1996-09-19
DE69212670T2 DE69212670T2 (de) 1997-03-06

Family

ID=26403646

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69212670T Expired - Fee Related DE69212670T2 (de) 1991-03-04 1992-03-04 Supraleitende oxydische Dünnschicht mit lokal unterschiedlichen Kristallorientierungen und ein Verfahren zu deren Herstellung

Country Status (4)

Country Link
US (2) US5464812A (de)
EP (2) EP0502787B1 (de)
CA (1) CA2062294C (de)
DE (1) DE69212670T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04300292A (ja) * 1991-03-26 1992-10-23 Sumitomo Electric Ind Ltd 複合酸化物超電導薄膜の成膜方法
CA2084394C (en) * 1991-12-02 1997-06-24 Takao Nakamura Superconducting multilayer interconnection formed of oxide superconductor material and method for manufacturing the same
EP0551033B1 (de) * 1991-12-10 1997-03-19 Sumitomo Electric Industries, Ltd. Supraleitendes Bauelement mit extrem dünnem Kanal aus supraleitendem Oxyd und sein Herstellungsverfahren
DE69328512T2 (de) * 1992-02-19 2001-01-11 Sumitomo Electric Industries Josephson-Übergangseinrichtung aus oxidischem Supraleiter und Verfahren zu ihrer Herstellung
DE69333799T2 (de) * 1992-07-28 2006-01-19 Nippon Telegraph And Telephone Corp. Bauelement mit Gitteranpassung und Verfahren zu seiner Herstellung
KR0148598B1 (ko) * 1994-11-21 1998-10-15 정선종 두꺼운 초전도채널층을 구비한 고온초전도 전계효과 트랜지스터의 제조방법
US5656575A (en) * 1995-02-13 1997-08-12 Superconducting Core Technologies, Inc. Method and apparatus for fabricating weak link junctions on vicinally cut substrates
US6765151B2 (en) * 1999-07-23 2004-07-20 American Superconductor Corporation Enhanced high temperature coated superconductors
JP4139855B2 (ja) * 2001-09-06 2008-08-27 独立行政法人科学技術振興機構 酸化物高温超伝導体およびその作製方法
JP3511098B2 (ja) * 2001-09-14 2004-03-29 独立行政法人産業技術総合研究所 超高速光電気信号変換素子
US6635368B1 (en) * 2001-12-20 2003-10-21 The United States Of America As Represented By The Secretary Of The Navy HTS film-based electronic device characterized by low ELF and white noise
US8633472B2 (en) * 2009-09-14 2014-01-21 Los Alamos National Security, Llc Tunable terahertz radiation source

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB324220A (en) * 1929-01-16 1930-01-23 Ludwig Bergfeld Improvements in the recovery of oxides of nitrogen
GB459905A (en) * 1935-10-08 1937-01-18 Riley Coventry Ltd Improvements relating to bonnets and mudguards of motor-vehicles
US2190826A (en) * 1935-12-07 1940-02-20 Cornell Dubilier Corp Electrolytic condenser
KR910002311B1 (ko) * 1987-02-27 1991-04-11 가부시기가이샤 히다찌세이사꾸쇼 초전도 디바이스
US4960751A (en) * 1987-04-01 1990-10-02 Semiconductor Energy Laboratory Co., Ltd. Electric circuit having superconducting multilayered structure and manufacturing method for same
US4942142A (en) * 1987-07-27 1990-07-17 Sumitomo Electric Industries Ltd. Superconducting thin film and a method for preparing the same
DE3726016A1 (de) * 1987-08-05 1989-02-16 Siemens Ag Verfahren zur herstellung eines schichtartigen aufbaus aus einem oxidkeramischen supralteitermaterial
GB2213839B (en) * 1987-12-23 1992-06-17 Plessey Co Plc Semiconducting thin films
US5047385A (en) * 1988-07-20 1991-09-10 The Board Of Trustees Of The Leland Stanford Junior University Method of forming superconducting YBa2 Cu3 O7-x thin films with controlled crystal orientation
US5030613A (en) * 1988-08-15 1991-07-09 Allied-Signal Inc. Epitaxial Ba--Y--Cu--O ceramic superconductor film on perovskite structure substrate
US5024894A (en) * 1988-11-02 1991-06-18 Academy Of Applied Science Method of producing silicon and similar wafers buffered for the deposition of metal oxide superconducting (MOS) polymer composites and the like by insulating metal oxides (IMO) suitable as substrates for MOS, and novel buffered wafers provided thereby
JP2524827B2 (ja) * 1988-11-29 1996-08-14 財団法人生産開発科学研究所 積層薄膜体及びその製造法
CA2043541C (en) * 1990-05-30 1996-03-19 Saburo Tanaka Process for preparing high-temperature superconducting thin films
JPH0563247A (ja) * 1990-09-18 1993-03-12 Sumitomo Electric Ind Ltd 超電導接合構造体およびその作製方法

Also Published As

Publication number Publication date
EP0502787A2 (de) 1992-09-09
EP0502787B1 (de) 1996-08-14
DE69212670T2 (de) 1997-03-06
EP0684654A1 (de) 1995-11-29
US5567674A (en) 1996-10-22
US5464812A (en) 1995-11-07
CA2062294C (en) 1997-01-14
EP0502787A3 (en) 1993-01-20
CA2062294A1 (en) 1992-09-05

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