DE69208421T2 - Optisches Messsystem zur Ermittlung des Profils eines Gegenstandes - Google Patents
Optisches Messsystem zur Ermittlung des Profils eines GegenstandesInfo
- Publication number
- DE69208421T2 DE69208421T2 DE69208421T DE69208421T DE69208421T2 DE 69208421 T2 DE69208421 T2 DE 69208421T2 DE 69208421 T DE69208421 T DE 69208421T DE 69208421 T DE69208421 T DE 69208421T DE 69208421 T2 DE69208421 T2 DE 69208421T2
- Authority
- DE
- Germany
- Prior art keywords
- profile
- determining
- measuring system
- optical measuring
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3313532A JP2571485B2 (ja) | 1991-10-31 | 1991-10-31 | 光学式変位測定方法およびこの方法を用いた光学式変位計 |
JP3313533A JP2567767B2 (ja) | 1991-10-31 | 1991-10-31 | 光学式変位測定方法およびこの方法を用いた光学式変位計 |
JP3339041A JP2997826B2 (ja) | 1991-12-20 | 1991-12-20 | マルチヘッド型光学式変位計 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69208421D1 DE69208421D1 (de) | 1996-03-28 |
DE69208421T2 true DE69208421T2 (de) | 1996-09-12 |
Family
ID=27339335
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69208421T Expired - Fee Related DE69208421T2 (de) | 1991-10-31 | 1992-10-30 | Optisches Messsystem zur Ermittlung des Profils eines Gegenstandes |
Country Status (3)
Country | Link |
---|---|
US (1) | US5351126A (de) |
EP (1) | EP0540343B1 (de) |
DE (1) | DE69208421T2 (de) |
Families Citing this family (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2067400A1 (en) * | 1992-04-28 | 1993-10-29 | Robert E. Bredberg | Laser thickness gauge |
US5659396A (en) * | 1995-06-07 | 1997-08-19 | Electrocom Automation L.P. | Dichotomous scan system for detection of edges of objects and overlapped objects having relatively uniform surfaces |
US5838447A (en) * | 1995-07-20 | 1998-11-17 | Ebara Corporation | Polishing apparatus including thickness or flatness detector |
EP0760460B1 (de) * | 1995-08-28 | 2002-07-03 | Matsushita Electric Works, Ltd. | Optisches Abstandsmesssystem mit Triangulation |
US5877860A (en) * | 1996-05-13 | 1999-03-02 | Boxer Cross, Inc. | System and method for measuring the microroughness of a surface of a substrate |
US5757498A (en) * | 1996-05-30 | 1998-05-26 | Klein, Ii; Richard J. | Optical spray coating monitoring system and method |
US5859924A (en) * | 1996-07-12 | 1999-01-12 | Robotic Vision Systems, Inc. | Method and system for measuring object features |
US5792290A (en) * | 1996-09-04 | 1998-08-11 | Robert Burkle Gmbh & Co. | Method for exactly separating a material connected in a web-like manner along its contours |
US5757502A (en) * | 1996-10-02 | 1998-05-26 | Vlsi Technology, Inc. | Method and a system for film thickness sample assisted surface profilometry |
US6075883A (en) | 1996-11-12 | 2000-06-13 | Robotic Vision Systems, Inc. | Method and system for imaging an object or pattern |
JP3799708B2 (ja) * | 1996-12-24 | 2006-07-19 | 松下電工株式会社 | 光学式変位測定システム |
US5868840A (en) * | 1996-12-30 | 1999-02-09 | The University Of Northern Iowa Foundation | Paint gun incorporating a laser device |
DE19737919A1 (de) * | 1997-08-26 | 1999-03-11 | Joachim Buerger | Meßgerät zur Messung der Profiltiefe eines Kraftfahrzeugreifens |
JP4016526B2 (ja) * | 1998-09-08 | 2007-12-05 | 富士ゼロックス株式会社 | 3次元物体識別装置 |
DE10059156A1 (de) * | 2000-11-29 | 2002-06-06 | Sick Ag | Abstandsbestimmung |
US6757069B2 (en) * | 2001-03-05 | 2004-06-29 | Northrop Grumman Corporation | Laser non-contact thickness measurement system |
JP3565178B2 (ja) * | 2001-03-23 | 2004-09-15 | オムロン株式会社 | 変位センサ |
JP2003075117A (ja) * | 2001-06-19 | 2003-03-12 | Omron Corp | 光学式センサ装置および光学式センサの信号処理装置ならびに光学式センサ用の分岐コネクタ |
US6937350B2 (en) * | 2001-06-29 | 2005-08-30 | Massachusetts Institute Of Technology | Apparatus and methods for optically monitoring thickness |
US7310431B2 (en) * | 2002-04-10 | 2007-12-18 | Canesta, Inc. | Optical methods for remotely measuring objects |
US20040061873A1 (en) * | 2002-09-26 | 2004-04-01 | Davis Brett L. | Method and apparatus for detecting media thickness |
US7417738B2 (en) * | 2004-01-27 | 2008-08-26 | Tradewind Scientific Ltd. | Determining surface properties of a roadway or runway from a moving vehicle |
EP1566658A1 (de) * | 2004-02-19 | 2005-08-24 | Leica Geosystems AG | Handgehaltene Vorrichtung zum Messen von Distanzen |
US7283256B2 (en) * | 2004-09-21 | 2007-10-16 | Chapman Instruments, Inc. | Method and apparatus for measuring wafer thickness |
US7280232B2 (en) * | 2004-09-21 | 2007-10-09 | Chapman Instruments, Inc. | Method and apparatus for measuring wafer thickness |
US7841529B2 (en) * | 2004-10-19 | 2010-11-30 | Applied Materials Israel, Ltd. | Multiple optical head inspection system and a method for imaging an article |
DE102005042902A1 (de) | 2004-12-16 | 2007-03-22 | Benteler Automobiltechnik Gmbh | Vorrichtung zum Vermessen von Bauteilen und Auswerteeinheit |
US7383152B1 (en) | 2006-01-10 | 2008-06-03 | Alliant Techsystems Inc. | Non-contact deviation measurement system |
DE102006013584B4 (de) | 2006-03-22 | 2014-07-10 | Benteler Automobiltechnik Gmbh | Vorrichtung zum Vermessen von Bauteilen |
KR20080043047A (ko) | 2006-11-13 | 2008-05-16 | 주식회사 고영테크놀러지 | 새도우 모아레를 이용한 3차원형상 측정장치 |
US20080158572A1 (en) * | 2006-12-27 | 2008-07-03 | Honeywell, Inc. | System and method for measurement of thickness of thin films |
US20100073476A1 (en) * | 2008-09-24 | 2010-03-25 | Industrial Technology Research Institute | Systems and methods for measuring three-dimensional profile |
DE102009026618A1 (de) * | 2009-05-29 | 2010-12-02 | Hilti Aktiengesellschaft | Lasergerät zur elektrooptischen Distanzmessung |
US8641942B2 (en) | 2010-05-12 | 2014-02-04 | Corning Incorporated | Laser scanning systems and methods for measuring extruded ceramic logs |
ES2377372B1 (es) * | 2010-07-19 | 2013-01-29 | Universidad Carlos Iii De Madrid | Dispositivo para la medida del estado de la calzada. |
EP3249348B1 (de) | 2016-05-26 | 2019-07-03 | Baumer Electric AG | Sensorvorrichtung zur vermessung einer oberfläche |
CN109341606A (zh) * | 2018-11-22 | 2019-02-15 | 武汉华星光电技术有限公司 | 一种表面平坦度测量装置及方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3612890A (en) * | 1969-10-13 | 1971-10-12 | Trw Inc | Radiation sensitive optical gaging system |
US4375921A (en) * | 1980-03-13 | 1983-03-08 | Selective Electronic Co. Ab | Dimension measuring apparatus |
US4298286A (en) * | 1980-06-02 | 1981-11-03 | The Carl Maxey Company | Measuring apparatus |
FR2615279B1 (fr) * | 1987-05-11 | 1990-11-02 | Commissariat Energie Atomique | Capteur de deplacement a fibres optiques decalees |
JPH0674968B2 (ja) * | 1988-03-15 | 1994-09-21 | 三菱電機株式会社 | 光学式測定装置 |
US5028799A (en) * | 1988-08-01 | 1991-07-02 | Robotic Vision System, Inc. | Method and apparatus for three dimensional object surface determination using co-planar data from multiple sensors |
-
1992
- 1992-10-28 US US07/967,601 patent/US5351126A/en not_active Expired - Lifetime
- 1992-10-30 EP EP92309944A patent/EP0540343B1/de not_active Expired - Lifetime
- 1992-10-30 DE DE69208421T patent/DE69208421T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0540343B1 (de) | 1996-02-21 |
EP0540343A1 (de) | 1993-05-05 |
US5351126A (en) | 1994-09-27 |
DE69208421D1 (de) | 1996-03-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8320 | Willingness to grant licences declared (paragraph 23) | ||
8339 | Ceased/non-payment of the annual fee |