DE69208331D1 - Selbstklemmender Halter für Polysiliziumstäbe zur Anwendung in dem tiegelfreien Einkristall-Zonenschmelzenverfahren - Google Patents

Selbstklemmender Halter für Polysiliziumstäbe zur Anwendung in dem tiegelfreien Einkristall-Zonenschmelzenverfahren

Info

Publication number
DE69208331D1
DE69208331D1 DE69208331T DE69208331T DE69208331D1 DE 69208331 D1 DE69208331 D1 DE 69208331D1 DE 69208331 T DE69208331 T DE 69208331T DE 69208331 T DE69208331 T DE 69208331T DE 69208331 D1 DE69208331 D1 DE 69208331D1
Authority
DE
Germany
Prior art keywords
crucible
self
melting process
zone melting
clamping holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69208331T
Other languages
English (en)
Other versions
DE69208331T2 (de
Inventor
Michiaki Hattori
Keiichi Nakazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Publication of DE69208331D1 publication Critical patent/DE69208331D1/de
Application granted granted Critical
Publication of DE69208331T2 publication Critical patent/DE69208331T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating
    • C30B13/285—Crystal holders, e.g. chucks
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/32—Mechanisms for moving either the charge or the heater
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/108—Including a solid member other than seed or product contacting the liquid [e.g., crucible, immersed heating element]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/1084—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone having details of a stabilizing feature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE69208331T 1991-11-28 1992-11-26 Selbstklemmender Halter für Polysiliziumstäbe zur Anwendung in dem tiegelfreien Einkristall-Zonenschmelzenverfahren Expired - Fee Related DE69208331T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3341987A JP2617258B2 (ja) 1991-11-28 1991-11-28 シリコン多結晶棒自重締付保持具

Publications (2)

Publication Number Publication Date
DE69208331D1 true DE69208331D1 (de) 1996-03-28
DE69208331T2 DE69208331T2 (de) 1996-06-27

Family

ID=18350305

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69208331T Expired - Fee Related DE69208331T2 (de) 1991-11-28 1992-11-26 Selbstklemmender Halter für Polysiliziumstäbe zur Anwendung in dem tiegelfreien Einkristall-Zonenschmelzenverfahren

Country Status (4)

Country Link
US (1) US5427057A (de)
EP (1) EP0544309B1 (de)
JP (1) JP2617258B2 (de)
DE (1) DE69208331T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6578630B2 (en) * 1999-12-22 2003-06-17 Weatherford/Lamb, Inc. Apparatus and methods for expanding tubulars in a wellbore
DE202010002486U1 (de) * 2009-03-31 2010-06-10 Centrotherm Sitec Gmbh Spann- und Kontaktierungsvorrichtung für Silizium-Dünnstäbe
CN102642050A (zh) * 2011-02-18 2012-08-22 扬州荣德新能源科技有限公司 一种用于带锯机床的夹具
CN102321912B (zh) * 2011-09-30 2016-02-17 上海汉虹精密机械有限公司 晶棒定位装置输出轴机构
CN102644107A (zh) * 2012-04-20 2012-08-22 上海汉虹精密机械有限公司 多晶炉腔体卡扣装置
US9333579B1 (en) * 2015-03-10 2016-05-10 Erik J Tostengard Soldering iron arms
CN116397319B (zh) * 2023-04-06 2024-04-09 曲靖阳光新能源股份有限公司 一种具有拉晶状态监测装置的拉晶设备

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1114171B (de) * 1959-12-31 1961-09-28 Siemens Ag Halterung fuer stabfoermiges Halbleitermaterial in Vorrichtungen zum tiegelfreien Zonenschmelzen
DE1519907C3 (de) * 1966-12-07 1974-01-31 Siemens Ag, 1000 Berlin U. 8000 Muenchen Vorrichtung zum tiegelfreien Zonenschmelzen kristalliner Stäbe
US3547428A (en) * 1967-11-09 1970-12-15 Siemens Ag Holder for a crystalline rod in apparatus for crucible-free zone melting
DE2322969C3 (de) * 1973-05-07 1980-10-16 Siemens Ag, 1000 Berlin Und 8000 Muenchen Vorrichtung zum Haltern der Stabenden beim tiegelfreien Zonenschmelzen
FR2288821A1 (fr) * 1974-08-01 1976-05-21 Fondasol Tech Dispositif de blocage des tubes pour sondeuse
US4157819A (en) * 1977-01-27 1979-06-12 Meyer Richard W Adjustable work piece clamping system
DE2853414A1 (de) * 1978-12-11 1980-06-19 Siemens Ag Vorrichtung zum tiegelfreien zonenschmelzen eines an seinem unteren ende mit einem angeschmolzenen keimkristall versehenen halbleiterkristallstabes
USRE31993E (en) * 1979-06-11 1985-10-01 Cylinder gripping apparatus
CH651814A5 (de) * 1981-06-12 1985-10-15 Maag Zahnraeder & Maschinen Ag Greifer eines hebezeuges.

Also Published As

Publication number Publication date
JPH05246792A (ja) 1993-09-24
US5427057A (en) 1995-06-27
EP0544309B1 (de) 1996-02-14
EP0544309A1 (de) 1993-06-02
JP2617258B2 (ja) 1997-06-04
DE69208331T2 (de) 1996-06-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee