DE69208051T2 - Verfahren zur Entfernung von Metallen aus Vinylphenolpolymeren - Google Patents
Verfahren zur Entfernung von Metallen aus VinylphenolpolymerenInfo
- Publication number
- DE69208051T2 DE69208051T2 DE69208051T DE69208051T DE69208051T2 DE 69208051 T2 DE69208051 T2 DE 69208051T2 DE 69208051 T DE69208051 T DE 69208051T DE 69208051 T DE69208051 T DE 69208051T DE 69208051 T2 DE69208051 T2 DE 69208051T2
- Authority
- DE
- Germany
- Prior art keywords
- removing metals
- vinylphenol polymers
- vinylphenol
- polymers
- metals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F6/00—Post-polymerisation treatments
- C08F6/02—Neutralisation of the polymerisation mass, e.g. killing the catalyst also removal of catalyst residues
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3339727A JPH0768296B2 (ja) | 1991-11-28 | 1991-11-28 | ビニルフェノール系重合体の金属除去方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69208051D1 DE69208051D1 (de) | 1996-03-14 |
DE69208051T2 true DE69208051T2 (de) | 1996-05-30 |
Family
ID=18330239
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69208051T Expired - Fee Related DE69208051T2 (de) | 1991-11-28 | 1992-11-27 | Verfahren zur Entfernung von Metallen aus Vinylphenolpolymeren |
Country Status (4)
Country | Link |
---|---|
US (1) | US5288850A (de) |
EP (1) | EP0544324B1 (de) |
JP (1) | JPH0768296B2 (de) |
DE (1) | DE69208051T2 (de) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG48902A1 (en) * | 1991-12-18 | 1998-05-18 | Hoechst Celanese Corp | Metal ion reduction in novolak resins |
US5580949A (en) * | 1991-12-18 | 1996-12-03 | Hoechst Celanese Corporation | Metal ion reduction in novolak resins and photoresists |
DE69320468T2 (de) * | 1992-03-06 | 1999-04-22 | Clariant Finance Bvi Ltd | Photoresists mit einem niedrigem grad metallionen |
SG52770A1 (en) * | 1992-07-10 | 1998-09-28 | Hoechst Celanese Corp | Metal ion reduction in top anti-reflective coatings for photoresists |
US5830990A (en) * | 1992-07-10 | 1998-11-03 | Clariant Finance (Bvi) Limited | Low metals perfluorooctanoic acid and top anti-reflective coatings for photoresists |
DE69313132T2 (de) * | 1992-11-25 | 1997-12-11 | Hoechst Celanese Corp | Metallionenreduzierung in antireflexunterschichten für photoresist |
US5476750A (en) * | 1992-12-29 | 1995-12-19 | Hoechst Celanese Corporation | Metal ion reduction in the raw materials and using a Lewis base to control molecular weight of novolak resin to be used in positive photoresists |
WO1994014858A1 (en) * | 1992-12-29 | 1994-07-07 | Hoechst Celanese Corporation | Metal ion reduction in polyhydroxystyrene and photoresists |
US5571657A (en) * | 1993-09-30 | 1996-11-05 | Shipley Company, Inc. | Modified cation exhange process |
US5679766A (en) * | 1993-12-07 | 1997-10-21 | Shipley Company, L.L.C. | Purification process of novolar resins using acid treated chelating cation exchange resin |
US5614352A (en) * | 1994-12-30 | 1997-03-25 | Hoechst Celanese Corporation | Metal ion reduction in novolak resins solution in PGMEA by chelating ion exchange resin |
US5521052A (en) * | 1994-12-30 | 1996-05-28 | Hoechst Celanese Corporation | Metal ion reduction in novolak resin using an ion exchange catalyst in a polar solvent and photoresists compositions therefrom |
US5837417A (en) * | 1994-12-30 | 1998-11-17 | Clariant Finance (Bvi) Limited | Quinone diazide compositions containing low metals p-cresol oligomers and process of producing the composition |
US5750031A (en) * | 1995-09-26 | 1998-05-12 | Clariant Finance (Bvi) Limited | Process for producing surfactant having a low metal ion level and developer produced therefrom |
US5656413A (en) * | 1995-09-28 | 1997-08-12 | Hoechst Celanese Corporation | Low metal ion containing 4,4'-[1-[4-[1-(4-Hydroxyphenyl)-1-methylethyl]phenyl]ethylidene]bisphe nol and photoresist compositions therefrom |
US5665517A (en) * | 1996-01-11 | 1997-09-09 | Hoechst Celanese Corporation | Acidic ion exchange resin as a catalyst to synthesize a novolak resin and photoresist composition therefrom |
CA2261862A1 (en) * | 1996-07-30 | 1998-02-05 | Cuno Incorporated | Filter sheet and process for purifying photoresist composition employing the filter sheet |
US6576139B1 (en) | 1996-07-30 | 2003-06-10 | Kenneth C. Hou | Process for purifying photoresist composition employing a filter sheet |
JP3363051B2 (ja) * | 1997-02-21 | 2003-01-07 | 丸善石油化学株式会社 | ビニルフェノール系重合体の金属除去法 |
FR2763330B1 (fr) * | 1997-05-15 | 1999-07-30 | Atochem Elf Sa | Procede de purification de liquides organiques quasi anhydres |
US5936071A (en) * | 1998-02-02 | 1999-08-10 | Clariant Finance (Bvi) Limited | Process for making a photoactive compound and photoresist therefrom |
ATE262542T1 (de) * | 1998-05-05 | 2004-04-15 | Triquest L P | Herstellung von co- und terpolymeren von p- hydroxystyrol und alkylacrylaten |
US6759483B2 (en) | 1998-05-05 | 2004-07-06 | Chemfirst Electronic Materials L.P. | Preparation of homo-, co- and terpolymers of substituted styrenes |
JP3348040B2 (ja) * | 1999-06-04 | 2002-11-20 | 群栄化学工業株式会社 | ノボラック型フェノール樹脂 |
US6787611B2 (en) * | 2000-06-27 | 2004-09-07 | Chemfirst Electronic Materials L.P. | Purification means |
US6593431B2 (en) | 2000-06-27 | 2003-07-15 | Chemfirst Electronic Materials Lp | Purification means |
US6864324B2 (en) | 2002-04-19 | 2005-03-08 | Chem First Electronic Materials L.P. | Anhydrous, liquid phase process for preparing hydroxyl containing polymers of enhanced purity |
US7834113B2 (en) * | 2003-05-08 | 2010-11-16 | E. I. Du Pont De Nemours And Company | Photoresist compositions and processes for preparing the same |
JP4825405B2 (ja) * | 2003-05-08 | 2011-11-30 | イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー | フォトレジスト組成物およびそれらの調製方法 |
US20060073411A1 (en) * | 2004-09-28 | 2006-04-06 | Sumitomo Chemical Company, Limited | Chemically amplified resist composition |
US20070248913A1 (en) * | 2006-04-24 | 2007-10-25 | Rahman M Dalil | Process for producing film forming resins for photoresist compositions |
JP5551474B2 (ja) * | 2010-03-03 | 2014-07-16 | 日本曹達株式会社 | 両親媒性化合物の製造方法 |
WO2015017295A1 (en) * | 2013-07-29 | 2015-02-05 | E. I. Du Pont De Nemours And Company | Polymer purification |
FR3021551A1 (fr) | 2014-06-03 | 2015-12-04 | Arkema France | Procede d'elimination d'ions metalliques dans une solution organique visqueuse |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60258206A (ja) * | 1984-06-01 | 1985-12-20 | Cosmo Co Ltd | p−ビニルフエノ−ル重合体の低着色改質体の製造方法 |
US4636540A (en) * | 1985-07-08 | 1987-01-13 | Atlantic Richfield Company | Purification of polymer solutions |
JPH03128903A (ja) * | 1989-07-13 | 1991-05-31 | Fine Kurei:Kk | 合成樹脂の改質方法および改質合成樹脂 |
US4985540A (en) * | 1989-11-20 | 1991-01-15 | Polysar Limited | Process for removing rhodium-containing catalyst residue from hydrogenated nitrile rubber |
-
1991
- 1991-11-28 JP JP3339727A patent/JPH0768296B2/ja not_active Expired - Fee Related
-
1992
- 1992-11-23 US US07/980,310 patent/US5288850A/en not_active Expired - Lifetime
- 1992-11-27 DE DE69208051T patent/DE69208051T2/de not_active Expired - Fee Related
- 1992-11-27 EP EP92120310A patent/EP0544324B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0544324A1 (de) | 1993-06-02 |
EP0544324B1 (de) | 1996-01-31 |
JPH0768296B2 (ja) | 1995-07-26 |
DE69208051D1 (de) | 1996-03-14 |
JPH05148308A (ja) | 1993-06-15 |
US5288850A (en) | 1994-02-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |