DE69206165D1 - Hermetische Verpackung für frequenzselektive Mikroelektronikteile. - Google Patents

Hermetische Verpackung für frequenzselektive Mikroelektronikteile.

Info

Publication number
DE69206165D1
DE69206165D1 DE69206165T DE69206165T DE69206165D1 DE 69206165 D1 DE69206165 D1 DE 69206165D1 DE 69206165 T DE69206165 T DE 69206165T DE 69206165 T DE69206165 T DE 69206165T DE 69206165 D1 DE69206165 D1 DE 69206165D1
Authority
DE
Germany
Prior art keywords
frequency selective
hermetic packaging
microelectronic parts
microelectronic
parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69206165T
Other languages
English (en)
Other versions
DE69206165T2 (de
Inventor
Robert Frank Falkner
Russell Thomas Fiorenzo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of DE69206165D1 publication Critical patent/DE69206165D1/de
Application granted granted Critical
Publication of DE69206165T2 publication Critical patent/DE69206165T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/058—Holders; Supports for surface acoustic wave devices
    • H03H9/0585—Holders; Supports for surface acoustic wave devices consisting of an adhesive layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
DE69206165T 1991-02-04 1992-01-20 Hermetische Verpackung für frequenzselektive Mikroelektronikteile. Expired - Fee Related DE69206165T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US65011791A 1991-02-04 1991-02-04

Publications (2)

Publication Number Publication Date
DE69206165D1 true DE69206165D1 (de) 1996-01-04
DE69206165T2 DE69206165T2 (de) 1996-06-05

Family

ID=24607534

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69206165T Expired - Fee Related DE69206165T2 (de) 1991-02-04 1992-01-20 Hermetische Verpackung für frequenzselektive Mikroelektronikteile.

Country Status (4)

Country Link
US (1) US5303457A (de)
EP (1) EP0498198B1 (de)
JP (1) JP3222525B2 (de)
DE (1) DE69206165T2 (de)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5420472A (en) * 1992-06-11 1995-05-30 Motorola, Inc. Method and apparatus for thermal coefficient of expansion matched substrate attachment
JP3306272B2 (ja) * 1995-10-20 2002-07-24 富士通株式会社 弾性表面波装置
EP0872495B1 (de) * 1995-12-28 2001-11-14 Daikin Industries, Limited Fluorhaltige, elastische copolymere, härtbare zusammensetzung und daraus hergestellte dichtungsmasse
US6119920A (en) * 1996-12-20 2000-09-19 Rf Monolithics, Inc. Method of forming an electronic package with a solder seal
US5892417A (en) * 1996-12-27 1999-04-06 Motorola Inc. Saw device package and method
US5855995A (en) * 1997-02-21 1999-01-05 Medtronic, Inc. Ceramic substrate for implantable medical devices
US6146743A (en) * 1997-02-21 2000-11-14 Medtronic, Inc. Barrier metallization in ceramic substrate for implantable medical devices
US6303992B1 (en) 1999-07-06 2001-10-16 Visteon Global Technologies, Inc. Interposer for mounting semiconductor dice on substrates
US6339276B1 (en) * 1999-11-01 2002-01-15 Agere Systems Guardian Corp. Incremental tuning process for electrical resonators based on mechanical motion
US6437667B1 (en) 2000-02-04 2002-08-20 Agere Systems Guardian Corp. Method of tuning thin film resonator filters by removing or adding piezoelectric material
US6323744B1 (en) 2000-02-04 2001-11-27 Agere Systems Guardian Corp. Grounding of TFR ladder filters
US7296329B1 (en) 2000-02-04 2007-11-20 Agere Systems Inc. Method of isolation for acoustic resonator device
US6377136B1 (en) 2000-02-04 2002-04-23 Agere Systems Guardian Corporation Thin film resonator filter having at least one component with different resonant frequency sets or electrode capacitance
US6603241B1 (en) 2000-05-23 2003-08-05 Agere Systems, Inc. Acoustic mirror materials for acoustic devices
US6355498B1 (en) 2000-08-11 2002-03-12 Agere Systems Guartian Corp. Thin film resonators fabricated on membranes created by front side releasing
US6486751B1 (en) 2000-09-26 2002-11-26 Agere Systems Inc. Increased bandwidth thin film resonator having a columnar structure
US6674291B1 (en) 2000-10-30 2004-01-06 Agere Systems Guardian Corp. Method and apparatus for determining and/or improving high power reliability in thin film resonator devices, and a thin film resonator device resultant therefrom
US6587212B1 (en) 2000-10-31 2003-07-01 Agere Systems Inc. Method and apparatus for studying vibrational modes of an electro-acoustic device
US6743731B1 (en) 2000-11-17 2004-06-01 Agere Systems Inc. Method for making a radio frequency component and component produced thereby
US6550664B2 (en) * 2000-12-09 2003-04-22 Agilent Technologies, Inc. Mounting film bulk acoustic resonators in microwave packages using flip chip bonding technology
US7651879B2 (en) * 2005-12-07 2010-01-26 Honeywell International Inc. Surface acoustic wave pressure sensors
JP5216290B2 (ja) * 2007-09-27 2013-06-19 日本電波工業株式会社 圧電デバイス及び圧電デバイスの製造方法
US8395247B1 (en) * 2009-06-29 2013-03-12 Integrated Device Technology, Inc. Method and apparatus for placing quartz SAW devices together with clock/oscillator
DE102015102869B4 (de) * 2015-02-27 2017-05-11 Snaptrack, Inc. MEMS-Bauelement mit hoher Integrationsdichte und Verfahren zu seiner Herstellung
CN111954660A (zh) 2018-05-28 2020-11-17 国立大学法人东京工业大学 腈氧化合物
JP7032682B2 (ja) 2018-11-02 2022-03-09 ダイキン工業株式会社 フッ素ゴム組成物および成形品
CN113924686B (zh) 2019-06-14 2023-08-18 大金工业株式会社 电化学器件用被压缩部件
WO2021090713A1 (ja) 2019-11-05 2021-05-14 ダイキン工業株式会社 積層体および押出成形品
CN116113660A (zh) 2020-09-18 2023-05-12 大金工业株式会社 氟橡胶交联用组合物和成型品
CN117043259A (zh) 2021-04-02 2023-11-10 大金工业株式会社 氟橡胶交联用组合物、成型品和密封材料
EP4317305A1 (de) 2021-04-02 2024-02-07 Daikin Industries, Ltd. Zusammensetzung zur fluorkautschukvernetzung, formkörper und dichtungselement
KR20230163540A (ko) 2021-04-02 2023-11-30 다이킨 고교 가부시키가이샤 불소 고무 가교용 조성물, 성형품 및 시일재
CN117120537A (zh) 2021-04-15 2023-11-24 大金工业株式会社 氟橡胶交联用组合物、成型品和密封材料
CN117460781A (zh) 2021-06-15 2024-01-26 大金工业株式会社 氟橡胶交联用组合物、成型品和密封材料
EP4357414A1 (de) 2021-06-16 2024-04-24 Daikin Industries, Ltd. Zusammensetzung zur fluorkautschukvernetzung, formprodukt und dichtungsmaterial
JPWO2023063388A1 (de) 2021-10-15 2023-04-20
WO2023100589A1 (ja) 2021-11-30 2023-06-08 ダイキン工業株式会社 フッ素ゴム架橋用組成物および成形品

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55127098A (en) * 1979-03-09 1980-10-01 Matsushita Electric Ind Co Ltd Method of mounting electronic part
US4356047A (en) * 1980-02-19 1982-10-26 Consolidated Refining Co., Inc. Method of making ceramic lid assembly for hermetic sealing of a semiconductor chip
US4592794A (en) * 1981-09-01 1986-06-03 Motorola, Inc. Glass bonding method
US4459166A (en) * 1982-03-08 1984-07-10 Johnson Matthey Inc. Method of bonding an electronic device to a ceramic substrate
US4550376A (en) * 1983-02-14 1985-10-29 Maciejczak Robert A Inspection system for mechanical structures
US4622433A (en) * 1984-03-30 1986-11-11 Diacon, Inc. Ceramic package system using low temperature sealing glasses
US4906311A (en) * 1985-09-24 1990-03-06 John Fluke Co., Inc. Method of making a hermetically sealed electronic component

Also Published As

Publication number Publication date
EP0498198A1 (de) 1992-08-12
JP3222525B2 (ja) 2001-10-29
EP0498198B1 (de) 1995-11-22
US5303457A (en) 1994-04-19
JPH0563482A (ja) 1993-03-12
DE69206165T2 (de) 1996-06-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee