DE69127379D1 - Mikrosonde, Herstellungsverfahren zur Herstellung derselben und Informations-Eingabe- und/oder Ausgabe-Gerät welches dieselbe verwendet - Google Patents

Mikrosonde, Herstellungsverfahren zur Herstellung derselben und Informations-Eingabe- und/oder Ausgabe-Gerät welches dieselbe verwendet

Info

Publication number
DE69127379D1
DE69127379D1 DE69127379T DE69127379T DE69127379D1 DE 69127379 D1 DE69127379 D1 DE 69127379D1 DE 69127379 T DE69127379 T DE 69127379T DE 69127379 T DE69127379 T DE 69127379T DE 69127379 D1 DE69127379 D1 DE 69127379D1
Authority
DE
Germany
Prior art keywords
manufacturing
same
output device
information input
micro probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69127379T
Other languages
English (en)
Other versions
DE69127379T2 (de
Inventor
Kurihara Suomi
Kawada Haruki
Takimoto Kiyoshi
Kasanuki Yuji
Kawase Toshimitsu
Kawade Hisaaki
Eguchi Ken
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2002500A external-priority patent/JP2805232B2/ja
Priority claimed from JP2077063A external-priority patent/JP2703643B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69127379D1 publication Critical patent/DE69127379D1/de
Publication of DE69127379T2 publication Critical patent/DE69127379T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1409—Heads
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/08—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by electric charge or by variation of electric resistance or capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G01Q60/40—Conductive probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper
    • G01Q70/12—Nanotube tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q80/00—Applications, other than SPM, of scanning-probe techniques
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/875—Scanning probe structure with tip detail
    • Y10S977/878—Shape/taper

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
DE69127379T 1990-01-11 1991-01-11 Mikrosonde, Herstellungsverfahren zur Herstellung derselben und Informations-Eingabe- und/oder Ausgabe-Gerät welches dieselbe verwendet Expired - Fee Related DE69127379T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002500A JP2805232B2 (ja) 1990-01-11 1990-01-11 微小プローブおよびその製造方法
JP2077063A JP2703643B2 (ja) 1990-03-28 1990-03-28 微小プローブ電極を用いた記録・再生装置

Publications (2)

Publication Number Publication Date
DE69127379D1 true DE69127379D1 (de) 1997-10-02
DE69127379T2 DE69127379T2 (de) 1998-03-19

Family

ID=26335885

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69127379T Expired - Fee Related DE69127379T2 (de) 1990-01-11 1991-01-11 Mikrosonde, Herstellungsverfahren zur Herstellung derselben und Informations-Eingabe- und/oder Ausgabe-Gerät welches dieselbe verwendet

Country Status (3)

Country Link
US (1) US5390161A (de)
EP (1) EP0437275B1 (de)
DE (1) DE69127379T2 (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH041948A (ja) * 1990-04-18 1992-01-07 Canon Inc 情報記録装置及び情報再生装置及び情報記録再生装置
JPH081382B2 (ja) * 1990-10-31 1996-01-10 インターナショナル・ビジネス・マシーンズ・コーポレイション ナノメートル・スケールのプローブ及びその製造方法
EP0530473B1 (de) * 1991-07-15 1996-03-13 Matsushita Electric Industrial Co., Ltd. Freitragender Ausleger für Atomkraftmikroskop und Verfahren zu dessen Herstellung
US5348638A (en) * 1992-01-16 1994-09-20 Matsushita Electric Industrial Co., Ltd. Method of manufacturing a probe for a scanning tunneling microscope
JP2917674B2 (ja) * 1992-06-03 1999-07-12 松下電器産業株式会社 走査トンネル顕微鏡用探針およびその製造方法
JPH0642953A (ja) * 1992-07-24 1994-02-18 Matsushita Electric Ind Co Ltd 原子間力顕微鏡
JPH06305898A (ja) * 1993-03-10 1994-11-01 Internatl Business Mach Corp <Ibm> 単結晶ティップ構造物およびその形成方法
JP2923190B2 (ja) * 1993-12-16 1999-07-26 シャープ株式会社 高密度記録媒体及びその記録再生装置
EP0772876A1 (de) * 1995-04-29 1997-05-14 International Business Machines Corporation Mikromechanisch gefertigter schreib-/lesekopf für ladungsspeicherelemente
US5874668A (en) 1995-10-24 1999-02-23 Arch Development Corporation Atomic force microscope for biological specimens
US6088320A (en) * 1997-02-19 2000-07-11 International Business Machines Corporation Micro-mechanically fabricated read/write head with a strengthening shell on the tip shaft
US7260051B1 (en) * 1998-12-18 2007-08-21 Nanochip, Inc. Molecular memory medium and molecular memory integrated circuit
US20020138301A1 (en) * 2001-03-22 2002-09-26 Thanos Karras Integration of a portal into an application service provider data archive and/or web based viewer
US7233517B2 (en) * 2002-10-15 2007-06-19 Nanochip, Inc. Atomic probes and media for high density data storage
US20050128927A1 (en) * 2003-12-15 2005-06-16 Hewlett-Packard Development Co., L.P. Electrostatic actuator for contact probe storage device
US20050243660A1 (en) * 2004-04-16 2005-11-03 Rust Thomas F Methods for erasing bit cells in a high density data storage device
US20050243592A1 (en) * 2004-04-16 2005-11-03 Rust Thomas F High density data storage device having eraseable bit cells
US20060212978A1 (en) * 2005-03-15 2006-09-21 Sarah Brandenberger Apparatus and method for reading bit values using microprobe on a cantilever
US7463573B2 (en) * 2005-06-24 2008-12-09 Nanochip, Inc. Patterned media for a high density data storage device
US20060291271A1 (en) * 2005-06-24 2006-12-28 Nanochip, Inc. High density data storage devices having servo indicia formed in a patterned media
US20070041237A1 (en) * 2005-07-08 2007-02-22 Nanochip, Inc. Media for writing highly resolved domains
US7367119B2 (en) * 2005-06-24 2008-05-06 Nanochip, Inc. Method for forming a reinforced tip for a probe storage device
US20070008867A1 (en) * 2005-07-08 2007-01-11 Nanochip, Inc. High density data storage devices with a lubricant layer comprised of a field of polymer chains
US20070008865A1 (en) * 2005-07-08 2007-01-11 Nanochip, Inc. High density data storage devices with polarity-dependent memory switching media
US7309630B2 (en) 2005-07-08 2007-12-18 Nanochip, Inc. Method for forming patterned media for a high density data storage device
US20070008866A1 (en) * 2005-07-08 2007-01-11 Nanochip, Inc. Methods for writing and reading in a polarity-dependent memory switch media
US20080001075A1 (en) * 2006-06-15 2008-01-03 Nanochip, Inc. Memory stage for a probe storage device
US20080175033A1 (en) * 2007-01-19 2008-07-24 Nanochip, Inc. Method and system for improving domain stability in a ferroelectric media
US20080174918A1 (en) * 2007-01-19 2008-07-24 Nanochip, Inc. Method and system for writing and reading a charge-trap media with a probe tip
US20080233672A1 (en) * 2007-03-20 2008-09-25 Nanochip, Inc. Method of integrating mems structures and cmos structures using oxide fusion bonding
US20090129246A1 (en) * 2007-11-21 2009-05-21 Nanochip, Inc. Environmental management of a probe storage device
US20090294028A1 (en) * 2008-06-03 2009-12-03 Nanochip, Inc. Process for fabricating high density storage device with high-temperature media
US20100039729A1 (en) * 2008-08-14 2010-02-18 Nanochip, Inc. Package with integrated magnets for electromagnetically-actuated probe-storage device
US20100039919A1 (en) * 2008-08-15 2010-02-18 Nanochip, Inc. Cantilever Structure for Use in Seek-and-Scan Probe Storage
JP5787586B2 (ja) 2011-04-14 2015-09-30 キヤノン株式会社 電気機械変換装置
US10598477B2 (en) * 2016-02-04 2020-03-24 Kla-Tencor Corporation Dynamic determination of metal film thickness from sheet resistance and TCR value

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4575822A (en) * 1983-02-15 1986-03-11 The Board Of Trustees Of The Leland Stanford Junior University Method and means for data storage using tunnel current data readout
JP2556492B2 (ja) * 1986-12-24 1996-11-20 キヤノン株式会社 再生装置及び再生法
JPS63204531A (ja) * 1987-02-19 1988-08-24 Canon Inc 再生装置
JP2556491B2 (ja) * 1986-12-24 1996-11-20 キヤノン株式会社 記録装置及び記録法
JPS63238503A (ja) * 1987-03-27 1988-10-04 Jeol Ltd 走査トンネル顕微鏡におけるチツプ走査装置
JP2673352B2 (ja) * 1987-10-07 1997-11-05 セイコーインスツルメンツ株式会社 メモリー入力装置
DE3856336T2 (de) * 1987-09-24 2000-01-27 Canon K.K., Tokio/Tokyo Mikrosonde
JPH0758164B2 (ja) * 1988-04-22 1995-06-21 三菱電機株式会社 走査型トンネル顕微鏡の微動機構
GB8818445D0 (en) * 1988-08-03 1988-09-07 Jones B L Stm probe
JPH0718324B2 (ja) * 1988-08-04 1995-03-01 防衛庁技術研究本部長 ランキンサイクル型エンジンを備えた水中航走体の起動方式
EP0355241A1 (de) * 1988-08-18 1990-02-28 International Business Machines Corporation Raster-Tunnelmikroskop mit polarisiertem Spin
JPH0275902A (ja) * 1988-09-13 1990-03-15 Seiko Instr Inc ダイヤモンド探針及びその成形方法
JP2547869B2 (ja) * 1988-11-09 1996-10-23 キヤノン株式会社 プローブユニット，該プローブの駆動方法及び該プローブユニットを備えた走査型トンネル電流検知装置
DE68903950T2 (de) * 1989-08-16 1993-07-01 Ibm Verfahren fuer die herstellung ultrafeiner siliziumspitzen fuer afm/stm-profilometrie.

Also Published As

Publication number Publication date
EP0437275B1 (de) 1997-08-27
EP0437275A2 (de) 1991-07-17
DE69127379T2 (de) 1998-03-19
US5390161A (en) 1995-02-14
EP0437275A3 (en) 1992-09-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: WESER & KOLLEGEN, 81245 MUENCHEN

8339 Ceased/non-payment of the annual fee