DE69123898D1 - Drehanlage für flüssige Medien - Google Patents

Drehanlage für flüssige Medien

Info

Publication number
DE69123898D1
DE69123898D1 DE69123898T DE69123898T DE69123898D1 DE 69123898 D1 DE69123898 D1 DE 69123898D1 DE 69123898 T DE69123898 T DE 69123898T DE 69123898 T DE69123898 T DE 69123898T DE 69123898 D1 DE69123898 D1 DE 69123898D1
Authority
DE
Germany
Prior art keywords
liquid media
rotary system
rotary
media
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69123898T
Other languages
English (en)
Other versions
DE69123898T2 (de
DE69123898T3 (de
Inventor
Teruo Maruyama
Tatsuhisa Taguchi
Yoshikazu Abe
Mikio Hasegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27328427&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69123898(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from JP25579890A external-priority patent/JP2589865B2/ja
Priority claimed from JP2332358A external-priority patent/JP2981512B2/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE69123898D1 publication Critical patent/DE69123898D1/de
Publication of DE69123898T2 publication Critical patent/DE69123898T2/de
Publication of DE69123898T3 publication Critical patent/DE69123898T3/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/02—Arrangements of bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085—Prime movers
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K16/00—Machines with more than one rotor or stator
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/402—Plurality of electronically synchronised motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F04C2240/51—Bearings for cantilever assemblies

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
DE69123898T 1990-08-01 1991-07-30 Drehanlage für flüssige Medien Expired - Lifetime DE69123898T3 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP204912/90 1990-08-01
JP20491290 1990-08-01
JP255798/90 1990-09-25
JP25579890A JP2589865B2 (ja) 1990-08-01 1990-09-25 複合型真空ポンプ
JP2332358A JP2981512B2 (ja) 1990-11-28 1990-11-28 真空ポンプ
JP332358/90 1990-11-28

Publications (3)

Publication Number Publication Date
DE69123898D1 true DE69123898D1 (de) 1997-02-13
DE69123898T2 DE69123898T2 (de) 1997-05-28
DE69123898T3 DE69123898T3 (de) 2004-08-05

Family

ID=27328427

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69123898T Expired - Lifetime DE69123898T3 (de) 1990-08-01 1991-07-30 Drehanlage für flüssige Medien
DE69132867T Expired - Fee Related DE69132867T2 (de) 1990-08-01 1991-07-30 Drehkolbenanlage für flüssige Medien

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69132867T Expired - Fee Related DE69132867T2 (de) 1990-08-01 1991-07-30 Drehkolbenanlage für flüssige Medien

Country Status (4)

Country Link
US (1) US5197861A (de)
EP (1) EP0472933B2 (de)
KR (1) KR960002022B1 (de)
DE (2) DE69123898T3 (de)

Families Citing this family (56)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5354179A (en) * 1990-08-01 1994-10-11 Matsushita Electric Industrial Co., Ltd. Fluid rotating apparatus
JP3074845B2 (ja) * 1991-10-08 2000-08-07 松下電器産業株式会社 流体回転装置
JPH05195957A (ja) * 1992-01-23 1993-08-06 Matsushita Electric Ind Co Ltd 真空ポンプ
JPH05202855A (ja) * 1992-01-29 1993-08-10 Matsushita Electric Ind Co Ltd 流体回転装置
JPH05209589A (ja) * 1992-01-31 1993-08-20 Matsushita Electric Ind Co Ltd 流体回転装置
EP0558921B2 (de) † 1992-01-31 2003-09-10 Matsushita Electric Industrial Co., Ltd. Gerät mit mehreren synchron rotierenden Wellen
JPH05272478A (ja) * 1992-01-31 1993-10-19 Matsushita Electric Ind Co Ltd 真空ポンプ
JP3569924B2 (ja) * 1992-03-19 2004-09-29 松下電器産業株式会社 流体回転装置
KR100190310B1 (ko) * 1992-09-03 1999-06-01 모리시따 요오이찌 진공배기장치
US5374173A (en) * 1992-09-04 1994-12-20 Matsushita Electric Industrial Co., Ltd. Fluid rotating apparatus with sealing arrangement
DE4234169A1 (de) * 1992-10-12 1994-04-14 Leybold Ag Verfahren zum Betrieb einer trockenverdichteten Vakuumpumpe sowie für dieses Betriebsverfahren geeignete Vakuumpumpe
EP0603694A1 (de) * 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Vakuumpumpsystem
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE4318707A1 (de) * 1993-06-04 1994-12-08 Sihi Gmbh & Co Kg Verdrängermaschine mit elektronischer Motorsynchronisation
ES2077513B1 (es) * 1993-11-15 1997-10-16 Tremino Gomez J Medidor volumetrico de desplazamiento positivo.
US5443644A (en) * 1994-03-15 1995-08-22 Kashiyama Industry Co., Ltd. Gas exhaust system and pump cleaning system for a semiconductor manufacturing apparatus
JP3331749B2 (ja) * 1994-06-27 2002-10-07 松下電器産業株式会社 真空ポンプ
JPH0828471A (ja) * 1994-07-11 1996-01-30 Matsushita Electric Ind Co Ltd 容積型ポンプ
JPH08100779A (ja) * 1994-10-04 1996-04-16 Matsushita Electric Ind Co Ltd 真空ポンプ
JPH08144977A (ja) * 1994-11-24 1996-06-04 Kashiyama Kogyo Kk 複合ドライ真空ポンプ
PT834017E (pt) * 1995-06-21 2000-04-28 Sterling Ind Consult Gmbh Bomba de vacuo
ATE187528T1 (de) * 1995-06-21 1999-12-15 Sterling Ind Consult Gmbh Mehrstufiger schraubenspindelverdichter
DE19522555A1 (de) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Rotationskolbenverdichter mit zwei Rotoren
ATE229127T1 (de) * 1995-12-11 2002-12-15 Busch Sa Atel Zwillingsschraubensatz
US5782560A (en) * 1996-06-24 1998-07-21 Kabushiki Kaisha Kobe Seiko Sho Internal mixer
DE19736017A1 (de) * 1997-08-20 1999-02-25 Peter Frieden Trockenverdichtende Vakuumpumpe oder Kompressor
DE19809957A1 (de) * 1998-03-07 1999-09-09 Pfeiffer Vacuum Gmbh Mehrwellenvakuumpumpe
DE19817351A1 (de) * 1998-04-18 1999-10-21 Peter Frieden Schraubenspindel-Vakuumpumpe mit Gaskühlung
DE59809839D1 (de) 1998-08-25 2003-11-13 Maag Pump Systems Textron Ag Z Zahnradpumpe mit einem Mehrwellenantrieb
DK1070848T3 (da) * 1999-07-19 2004-08-09 Sterling Fluid Sys Gmbh Fortrængningsmaskine til kompressible medier
DE10019066A1 (de) * 2000-04-18 2001-10-25 Leybold Vakuum Gmbh Vakuumpumpe mit zwei zusammenwirkenden Rotoren
GB2385381A (en) * 2002-02-15 2003-08-20 Alfa Laval Lkm As Synchronised rotary lobed pump
US6672828B2 (en) * 2002-06-03 2004-01-06 Varian S.P.A. Vacuum pump
US20040074516A1 (en) * 2002-10-18 2004-04-22 Hogle Richard A. Sub-atmospheric supply of fluorine to semiconductor process chamber
US7717684B2 (en) * 2003-08-21 2010-05-18 Ebara Corporation Turbo vacuum pump and semiconductor manufacturing apparatus having the same
JP2005163713A (ja) * 2003-12-04 2005-06-23 Toyota Industries Corp 流体圧縮機
US20100322806A1 (en) * 2009-06-18 2010-12-23 Aregger Markus Arrangement including a gear pump
US8764424B2 (en) 2010-05-17 2014-07-01 Tuthill Corporation Screw pump with field refurbishment provisions
BE1019398A3 (nl) * 2010-07-02 2012-06-05 Atlas Copco Airpower Nv Compressorelement van een schroefcompressor.
UA104999C2 (uk) * 2010-07-28 2014-04-10 Максим Вікторович Оленич Роторно-поршневий компресор
CN103104493B (zh) * 2011-11-11 2015-12-09 中国科学院沈阳科学仪器股份有限公司 一种用于无油干式真空泵双驱动主轴控制系统
JP7145585B2 (ja) 2014-02-28 2022-10-03 プロジェクト・フェニックス・エルエルシー ポンプ、及び流体をポンプの第１のポートから第２のポートへ移動させる方法
US10465721B2 (en) 2014-03-25 2019-11-05 Project Phoenix, LLC System to pump fluid and control thereof
US10294936B2 (en) 2014-04-22 2019-05-21 Project Phoenix, Llc. Fluid delivery system with a shaft having a through-passage
EP3149362B1 (de) 2014-06-02 2019-04-10 Project Phoenix LLC Hydrostatische getriebeanordnung und system
EP4036412A1 (de) 2014-06-02 2022-08-03 Project Phoenix LLC Linearaktuatoranordnung und -system
EP3172444B1 (de) 2014-07-22 2018-09-12 Project Phoenix LLC Mit zwei unabhängig angetriebenen kraftmaschinen integrierte externe getriebepumpe
US10072676B2 (en) 2014-09-23 2018-09-11 Project Phoenix, LLC System to pump fluid and control thereof
EP3204647B1 (de) 2014-10-06 2021-05-26 Project Phoenix LLC Linearaktuatoranordnung und -system
WO2016064569A1 (en) 2014-10-20 2016-04-28 Afshari Thomas Hydrostatic transmission assembly and system
CN104454524A (zh) * 2014-11-18 2015-03-25 杭州久益机械有限公司 一种阴阳螺杆转子同步变频一体压缩机机头
CN209033764U (zh) 2015-04-06 2019-06-28 特灵国际有限公司 螺杆压缩机中的主动间隙管理
EP3344874B1 (de) 2015-09-02 2021-01-20 Project Phoenix LLC System zum pumpen einer flüssigkeit und steuerung dafür
TWI768455B (zh) * 2015-09-02 2022-06-21 美商鳳凰計劃股份有限公司 泵送流體之系統及其控制
DE202016005208U1 (de) * 2016-08-30 2017-12-01 Leybold Gmbh Trockenverdichtende Vakuumpumpe
EP3315778B2 (de) * 2016-10-28 2022-12-07 ALMiG Kompressoren GmbH Öleingespritzter schraubenluftverdichter

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US2640428A (en) * 1949-05-03 1953-06-02 Dresser Ind Drive for fluid handling devices of the rotary, positive displacement type
GB809445A (en) * 1954-02-27 1959-02-25 Heraeus Gmbh W C Improvements in or relating to rotary high vacuum pumps
CH659290A5 (de) * 1982-07-08 1987-01-15 Maag Zahnraeder & Maschinen Ag Zahnradpumpe.
JPS60259791A (ja) * 1984-06-04 1985-12-21 Hitachi Ltd オイルフリ−スクリユ−真空ポンプ
EP0206984B1 (de) * 1985-06-26 1991-02-20 Reishauer Ag. Verfahren und Vorrichtung zur Regelung der Drehzahl einer Spindel einer Zahnradbearbeitungsmaschine
CH664604A5 (fr) * 1985-11-25 1988-03-15 Cerac Inst Sa Machine rotative.
JPH0784871B2 (ja) * 1986-06-12 1995-09-13 株式会社日立製作所 真空排気装置
JPS63173866A (ja) * 1987-01-09 1988-07-18 Hitachi Ltd 無脈動ポンプの制御方式
JPH0674796B2 (ja) * 1987-08-07 1994-09-21 日本原子力研究所 マルチチヤンネル型真空ポンプ
JPH01277698A (ja) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Kk 複合型真空ポンプ
FR2656658B1 (fr) * 1989-12-28 1993-01-29 Cit Alcatel Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.

Also Published As

Publication number Publication date
KR960002022B1 (en) 1996-02-09
EP0472933A3 (en) 1992-09-16
DE69123898T2 (de) 1997-05-28
EP0472933A2 (de) 1992-03-04
DE69123898T3 (de) 2004-08-05
EP0472933B1 (de) 1997-01-02
DE69132867T2 (de) 2002-09-12
DE69132867D1 (de) 2002-01-24
EP0472933B2 (de) 2003-12-03
US5197861A (en) 1993-03-30

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP

8320 Willingness to grant licences declared (paragraph 23)