DE69117378T2 - Supraleitende Einrichtung mit geschichteter Struktur, zusammengesetzt aus oxidischem Supraleiter und Isolatordünnschicht und deren Herstellungsmethode - Google Patents

Supraleitende Einrichtung mit geschichteter Struktur, zusammengesetzt aus oxidischem Supraleiter und Isolatordünnschicht und deren Herstellungsmethode

Info

Publication number
DE69117378T2
DE69117378T2 DE69117378T DE69117378T DE69117378T2 DE 69117378 T2 DE69117378 T2 DE 69117378T2 DE 69117378 T DE69117378 T DE 69117378T DE 69117378 T DE69117378 T DE 69117378T DE 69117378 T2 DE69117378 T2 DE 69117378T2
Authority
DE
Germany
Prior art keywords
manufacture
thin film
layered structure
oxide superconductor
superconducting device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69117378T
Other languages
English (en)
Other versions
DE69117378D1 (de
Inventor
Mitsuchika Saitoh
Sou Tanaka
Michitomo Iiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2191174A external-priority patent/JPH0476967A/ja
Priority claimed from JP3188075A external-priority patent/JP2819871B2/ja
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Application granted granted Critical
Publication of DE69117378D1 publication Critical patent/DE69117378D1/de
Publication of DE69117378T2 publication Critical patent/DE69117378T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/10—Junction-based devices
    • H10N60/12—Josephson-effect devices
    • H10N60/124—Josephson-effect devices comprising high-Tc ceramic materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0661—After-treatment, e.g. patterning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0661—After-treatment, e.g. patterning
    • H10N60/0716—Passivation

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
DE69117378T 1990-07-19 1991-07-19 Supraleitende Einrichtung mit geschichteter Struktur, zusammengesetzt aus oxidischem Supraleiter und Isolatordünnschicht und deren Herstellungsmethode Expired - Fee Related DE69117378T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2191174A JPH0476967A (ja) 1990-07-19 1990-07-19 超電導装置および作製方法
JP3188075A JP2819871B2 (ja) 1991-07-02 1991-07-02 超電導装置の作製方法

Publications (2)

Publication Number Publication Date
DE69117378D1 DE69117378D1 (de) 1996-04-04
DE69117378T2 true DE69117378T2 (de) 1996-09-12

Family

ID=26504721

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69117378T Expired - Fee Related DE69117378T2 (de) 1990-07-19 1991-07-19 Supraleitende Einrichtung mit geschichteter Struktur, zusammengesetzt aus oxidischem Supraleiter und Isolatordünnschicht und deren Herstellungsmethode

Country Status (3)

Country Link
US (1) US5422497A (de)
EP (1) EP0468868B1 (de)
DE (1) DE69117378T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5710437A (en) * 1993-03-05 1998-01-20 Nippon Steel Corporation Radiation detecting device using superconducting tunnel junction and method of fabricating the same
US5567673A (en) * 1994-10-17 1996-10-22 E. I. Du Pont De Nemours And Company Process of forming multilayered Tl-containing superconducting composites
KR0175359B1 (ko) * 1995-12-15 1999-02-01 양승택 초전도체-절연체-초전도체 조셉슨 터널 접합구조의 제조방법
US6160266A (en) * 1996-02-22 2000-12-12 Matsushita Electric Industrial Co., Ltd. Superconducting device and a method of manufacturing the same
US6147360A (en) * 1996-02-22 2000-11-14 Matsushita Electric Industrial Co. Ltd. Superconducting device and a method of manufacturing the same
DE19619585C2 (de) * 1996-05-15 1999-11-11 Bosch Gmbh Robert Schaltbarer planarer Hochfrequenzresonator und Filter
US5776863A (en) * 1996-07-08 1998-07-07 Trw Inc. In-situ fabrication of a superconductor hetero-epitaxial Josephson junction
DE69718718T2 (de) * 1996-07-09 2003-08-14 Matsushita Electric Ind Co Ltd Supraleitendes Tunnel-Sperrschichtelement und supraleitende Vorrichtung
US9929334B2 (en) 2015-01-15 2018-03-27 International Business Machines Corporation Josephson junction with spacer
US11563162B2 (en) * 2020-01-09 2023-01-24 International Business Machines Corporation Epitaxial Josephson junction transmon device

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4490733A (en) * 1982-10-15 1984-12-25 Sperry Corporation Josephson device with tunneling barrier having low density of localized states and enhanced figures of merit
US4499119A (en) * 1983-07-06 1985-02-12 Sperry Corporation Method of manufacturing super-conductive tunnel junction devices with precise junction area control
FR2626715B1 (fr) * 1988-02-02 1990-05-18 Thomson Csf Dispositif en couches minces de materiau supraconducteur et procede de realisation
DE68923325T2 (de) * 1988-05-11 1995-11-23 Canon Kk Josephson-Einrichtung.
US4970395A (en) * 1988-12-23 1990-11-13 Honeywell Inc. Wavelength tunable infrared detector based upon super-schottky or superconductor-insulator-superconductor structures employing high transition temperature superconductors
JPH02260674A (ja) * 1989-03-31 1990-10-23 Sumitomo Electric Ind Ltd トンネル型ジョセフソン素子とその作製方法
NL8901874A (nl) * 1989-07-20 1991-02-18 Philips Nv Planaire josephson inrichting.
JPH03166776A (ja) * 1989-11-27 1991-07-18 Sumitomo Electric Ind Ltd トンネル接合素子とその作製方法
CA2043545C (en) * 1990-05-30 1997-03-04 Saburo Tanaka Process for preparing superconducting junction of oxide superconductor

Also Published As

Publication number Publication date
US5422497A (en) 1995-06-06
EP0468868A2 (de) 1992-01-29
EP0468868B1 (de) 1996-02-28
EP0468868A3 (en) 1992-05-27
DE69117378D1 (de) 1996-04-04

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Legal Events

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8339 Ceased/non-payment of the annual fee