DE69108648D1 - Katalysator zur Entfernung von gasförmigen Hydriden. - Google Patents

Katalysator zur Entfernung von gasförmigen Hydriden.

Info

Publication number
DE69108648D1
DE69108648D1 DE69108648T DE69108648T DE69108648D1 DE 69108648 D1 DE69108648 D1 DE 69108648D1 DE 69108648 T DE69108648 T DE 69108648T DE 69108648 T DE69108648 T DE 69108648T DE 69108648 D1 DE69108648 D1 DE 69108648D1
Authority
DE
Germany
Prior art keywords
catalyst
removal
gaseous hydrides
hydrides
gaseous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69108648T
Other languages
English (en)
Other versions
DE69108648T2 (de
Inventor
Paul Leondaridis
Albert S Vendel
Tarranum Akthar
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Publication of DE69108648D1 publication Critical patent/DE69108648D1/de
Application granted granted Critical
Publication of DE69108648T2 publication Critical patent/DE69108648T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/89—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with noble metals
    • B01J23/8926—Copper and noble metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8671—Removing components of defined structure not provided for in B01D53/8603 - B01D53/8668
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/76—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36
    • B01J23/80—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36 with zinc, cadmium or mercury

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Environmental & Geological Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Biomedical Technology (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Catalysts (AREA)
  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
DE69108648T 1990-09-07 1991-09-05 Katalysator zur Entfernung von gasförmigen Hydriden. Expired - Fee Related DE69108648T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/579,316 US5182088A (en) 1990-09-07 1990-09-07 Removal of gaseous hydrides

Publications (2)

Publication Number Publication Date
DE69108648D1 true DE69108648D1 (de) 1995-05-11
DE69108648T2 DE69108648T2 (de) 1995-10-05

Family

ID=24316412

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69108648T Expired - Fee Related DE69108648T2 (de) 1990-09-07 1991-09-05 Katalysator zur Entfernung von gasförmigen Hydriden.

Country Status (4)

Country Link
US (1) US5182088A (de)
EP (1) EP0474559B1 (de)
JP (1) JPH05317715A (de)
DE (1) DE69108648T2 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0929002A (ja) 1995-07-17 1997-02-04 Teisan Kk ガス回収装置
US5858065A (en) * 1995-07-17 1999-01-12 American Air Liquide Process and system for separation and recovery of perfluorocompound gases
US5785741A (en) * 1995-07-17 1998-07-28 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges, Claude Process and system for separation and recovery of perfluorocompound gases
US6531105B1 (en) * 1996-02-29 2003-03-11 L'air Liquide-Societe Anonyme A'directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude Process and apparatus for removing carbon monoxide from a gas stream
EP0792679A1 (de) * 1996-02-29 1997-09-03 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Verfahren und Vorrichtung zur Entfernung von Sauerstoff und Kohlenmonoxid aus einem Gasstrom
US5759237A (en) * 1996-06-14 1998-06-02 L'air Liquide Societe Anonyme Pour L'etude Et, L'exploitation Des Procedes Georges Claude Process and system for selective abatement of reactive gases and recovery of perfluorocompound gases
IE80909B1 (en) * 1996-06-14 1999-06-16 Air Liquide An improved process and system for separation and recovery of perfluorocompound gases
GB9614848D0 (en) * 1996-07-15 1996-09-04 Boc Group Plc Processes for the scrubbing of noxious substances
JPH10235185A (ja) * 1997-02-26 1998-09-08 Japan Pionics Co Ltd 有害ガスの浄化剤および浄化方法
US6491884B1 (en) * 1999-11-26 2002-12-10 Advanced Technology Materials, Inc. In-situ air oxidation treatment of MOCVD process effluent
ATE448860T1 (de) * 2001-06-28 2009-12-15 Sued Chemie Catalysts Jp Inc Behandlungsmittel für metallhydride enthaltendes abgas, verfahren zu dessen herstellung, sowie verfahren zur behandlung von metallhydride enthaltendem abgas mit dem besagten mittel
US6800259B2 (en) * 2002-03-04 2004-10-05 Cabot Corporation Methods to control H2S and arsine emissions
US7476373B2 (en) * 2002-04-08 2009-01-13 Sued-Chemie Catalysts Japan, Inc. Treating agent for exhaust gas containing metal hydride compound and method for treating exhaust gas containing metal hydride compound
US6805728B2 (en) * 2002-12-09 2004-10-19 Advanced Technology Materials, Inc. Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream
US7364603B2 (en) 2002-12-09 2008-04-29 Applied Materials, Inc. Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream
US6843830B2 (en) * 2003-04-15 2005-01-18 Advanced Technology Materials, Inc. Abatement system targeting a by-pass effluent stream of a semiconductor process tool
CN101934221B (zh) * 2010-10-14 2012-10-10 厦门大学 一种改性吸附剂及其制备方法
CN102806065B (zh) * 2011-06-03 2014-08-06 中国石油化工股份有限公司 用于吸附烯烃尾气中砷化氢和磷化氢的净化剂及其制备方法
CN102806066B (zh) * 2011-06-03 2014-08-06 中国石油化工股份有限公司 用于吸附烯烃尾气中砷烷、磷烷的洁净剂及其制备方法
TWI456194B (zh) * 2011-12-28 2014-10-11 Univ Nat Taiwan Science Tech 利用光催化技術之磷化氫氣體定量分析方法
CN102513061B (zh) * 2011-12-29 2013-06-19 翟云波 一种改性活性炭及其制备方法和应用
CN104098094B (zh) * 2014-07-26 2016-09-28 淮北市森化碳吸附剂有限责任公司 一种吸附磷化氢的活性炭及其制备方法
CN111097384B (zh) * 2019-12-16 2022-02-22 合肥学院 一种C-Bi2O3-CuO-ZnO吸附材料及其制备方法和应用

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2786867A (en) * 1953-08-05 1957-03-26 Eastman Kodak Co Synthesis of nitriles from aldehydes and ammonia
US3864399A (en) * 1969-10-02 1975-02-04 Allied Chem Catalytic reduction of nitroparaffins to oximes and catalyst therefor
US3857921A (en) * 1972-09-27 1974-12-31 Asahi Chemical Ind Method for eliminating nitrogen oxides and catalyst composition for use in practicing said method
FR2481254A1 (fr) * 1980-04-23 1981-10-30 Elf Aquitaine Procede pour l'incineration catalytique de gaz residuaires renfermant en faible concentration au moins un compose du soufre choisi parmi cos, cs2, et les mercaptans et eventuellement au moins un membre du groupe forme par h2s, so2, soufre vapeur et/ou vesiculaire
JPS5949822A (ja) * 1982-09-14 1984-03-22 Nippon Sanso Kk 揮発性無機水素化物等を含有するガスの処理方法
US4442077A (en) * 1982-09-27 1984-04-10 Chemical Engineering Technology, Inc. Method of removing hydrides of phosphorus, arsenic, antimony and bismuth from hydrocarbon and non-hydrocarbon streams
CA1216136A (en) * 1983-03-03 1987-01-06 Toshio Aibe Method for removal of poisonous gases
US4743435A (en) * 1985-03-13 1988-05-10 Japan Pionics., Ltd. Method for cleaning exhaust gases
US4593148A (en) * 1985-03-25 1986-06-03 Phillips Petroleum Company Process for removal of arsine impurities from gases containing arsine and hydrogen sulfide
JPS62152515A (ja) * 1985-12-26 1987-07-07 Mitsubishi Gas Chem Co Inc シラン類の除去方法
EP0294142B1 (de) * 1987-06-01 1992-03-25 Japan Pionics., Ltd. Verfahren zum Reinigen von Abgas
DE3869301D1 (de) * 1987-08-31 1992-04-23 Japan Pionics Methode zum reinigen von giftige komponenten enthaltendem gas.
FR2629362B1 (fr) * 1988-03-30 1991-02-01 Air Liquide Procede de destruction d'hydrures contenus dans un gaz residuaire et catalyseur pour sa mise en oeuvre
US5085844A (en) * 1990-11-28 1992-02-04 Phillips Petroleum Company Sorption of trialkyl arsines

Also Published As

Publication number Publication date
EP0474559B1 (de) 1995-04-05
US5182088A (en) 1993-01-26
EP0474559A1 (de) 1992-03-11
DE69108648T2 (de) 1995-10-05
JPH05317715A (ja) 1993-12-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee