DE69108084T2 - Vakuumdruckbehälter und sein Herstellungsverfahren. - Google Patents

Vakuumdruckbehälter und sein Herstellungsverfahren.

Info

Publication number
DE69108084T2
DE69108084T2 DE69108084T DE69108084T DE69108084T2 DE 69108084 T2 DE69108084 T2 DE 69108084T2 DE 69108084 T DE69108084 T DE 69108084T DE 69108084 T DE69108084 T DE 69108084T DE 69108084 T2 DE69108084 T2 DE 69108084T2
Authority
DE
Germany
Prior art keywords
manufacturing process
vacuum pressure
pressure container
container
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69108084T
Other languages
English (en)
Other versions
DE69108084D1 (de
Inventor
Avi Tepman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of DE69108084D1 publication Critical patent/DE69108084D1/de
Application granted granted Critical
Publication of DE69108084T2 publication Critical patent/DE69108084T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J12/00—Pressure vessels in general
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/04—Pressure vessels, e.g. autoclaves
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Drying Of Semiconductors (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Butt Welding And Welding Of Specific Article (AREA)
DE69108084T 1990-04-20 1991-04-09 Vakuumdruckbehälter und sein Herstellungsverfahren. Expired - Fee Related DE69108084T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US51143190A 1990-04-20 1990-04-20

Publications (2)

Publication Number Publication Date
DE69108084D1 DE69108084D1 (de) 1995-04-20
DE69108084T2 true DE69108084T2 (de) 1995-11-23

Family

ID=24034885

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69108084T Expired - Fee Related DE69108084T2 (de) 1990-04-20 1991-04-09 Vakuumdruckbehälter und sein Herstellungsverfahren.

Country Status (4)

Country Link
EP (1) EP0452778B1 (de)
JP (1) JPH04228970A (de)
KR (1) KR100195305B1 (de)
DE (1) DE69108084T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016107985A1 (de) * 2016-04-29 2017-11-02 Von Ardenne Gmbh Vakuumprozesskammer und Verfahren zum Herstellen einer Kammerwand einer Vakuumprozesskammer

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9407482U1 (de) * 1994-05-05 1994-10-06 Leybold Ag Funktionseinrichtung für eine Vakuumanlage für die Behandlung von scheibenförmigen Werkstücken
EP0705642A1 (de) * 1994-10-05 1996-04-10 GRETAG Aktiengesellschaft Vakuumkammersystem
DE10207613C1 (de) * 2002-02-22 2003-04-10 Ems Chemie Ag Druckbehälter mit rohrförmigem Anschluss
JP5580004B2 (ja) 2008-07-14 2014-08-27 キヤノンアネルバ株式会社 真空容器、および真空処理装置
DE102011001723B4 (de) 2011-04-01 2016-06-09 Konecranes Global Corporation Druckfestes Gehäuse, Verfahren zur Herstellung desselben sowie Anordnung desselben mit einem weiteren Gehäuse
CN103050895A (zh) * 2012-12-28 2013-04-17 山东科技大学 一种防爆型电源箱

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR661226A (fr) * 1928-01-19 1929-07-23 Système de construction de boîtes, récipients ou réservoirs pour toutes applications

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016107985A1 (de) * 2016-04-29 2017-11-02 Von Ardenne Gmbh Vakuumprozesskammer und Verfahren zum Herstellen einer Kammerwand einer Vakuumprozesskammer

Also Published As

Publication number Publication date
JPH04228970A (ja) 1992-08-18
KR910019185A (ko) 1991-11-30
EP0452778A3 (en) 1992-01-02
DE69108084D1 (de) 1995-04-20
KR100195305B1 (ko) 1999-06-15
EP0452778A2 (de) 1991-10-23
EP0452778B1 (de) 1995-03-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee