DE69106956D1 - Verfahren zur Herstellung eines Polyimids. - Google Patents
Verfahren zur Herstellung eines Polyimids.Info
- Publication number
- DE69106956D1 DE69106956D1 DE69106956T DE69106956T DE69106956D1 DE 69106956 D1 DE69106956 D1 DE 69106956D1 DE 69106956 T DE69106956 T DE 69106956T DE 69106956 T DE69106956 T DE 69106956T DE 69106956 D1 DE69106956 D1 DE 69106956D1
- Authority
- DE
- Germany
- Prior art keywords
- polyimide
- production
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/64—Heating using microwaves
- H05B6/70—Feed lines
- H05B6/705—Feed lines using microwave tuning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
- B01J19/122—Incoherent waves
- B01J19/126—Microwaves
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1003—Preparatory processes
- C08G73/1007—Preparatory processes from tetracarboxylic acids or derivatives and diamines
- C08G73/1025—Preparatory processes from tetracarboxylic acids or derivatives and diamines polymerised by radiations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N22/00—Investigating or analysing materials by the use of microwaves or radio waves, i.e. electromagnetic waves with a wavelength of one millimetre or more
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/64—Heating using microwaves
- H05B6/66—Circuits
- H05B6/68—Circuits for monitoring or control
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00191—Control algorithm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/12—Processes employing electromagnetic waves
- B01J2219/1203—Incoherent waves
- B01J2219/1206—Microwaves
- B01J2219/1209—Features relating to the reactor or vessel
- B01J2219/1212—Arrangements of the reactor or the reactors
- B01J2219/1215—Single reactor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0313—Organic insulating material
- H05K1/032—Organic insulating material consisting of one material
- H05K1/0346—Organic insulating material consisting of one material containing N
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B40/00—Technologies aiming at improving the efficiency of home appliances, e.g. induction cooking or efficient technologies for refrigerators, freezers or dish washers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
- Y10T428/31681—Next to polyester, polyamide or polyimide [e.g., alkyd, glue, or nylon, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31721—Of polyimide
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Electromagnetism (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Health & Medical Sciences (AREA)
- Organic Chemistry (AREA)
- Biochemistry (AREA)
- Medicinal Chemistry (AREA)
- Analytical Chemistry (AREA)
- Toxicology (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Polymers & Plastics (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
- Constitution Of High-Frequency Heating (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/551,716 US5241040A (en) | 1990-07-11 | 1990-07-11 | Microwave processing |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69106956D1 true DE69106956D1 (de) | 1995-03-09 |
DE69106956T2 DE69106956T2 (de) | 1995-08-10 |
Family
ID=24202389
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69106956T Expired - Fee Related DE69106956T2 (de) | 1990-07-11 | 1991-06-11 | Verfahren zur Herstellung eines Polyimids. |
Country Status (4)
Country | Link |
---|---|
US (3) | US5241040A (de) |
EP (1) | EP0465858B1 (de) |
JP (1) | JP2587148B2 (de) |
DE (1) | DE69106956T2 (de) |
Families Citing this family (49)
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---|---|---|---|---|
US6072167A (en) * | 1997-01-06 | 2000-06-06 | International Business Machines Corporation | Enhanced uniformity in a length independent microwave applicator |
US6020580A (en) * | 1997-01-06 | 2000-02-01 | International Business Machines Corporation | Microwave applicator having a mechanical means for tuning |
US5721286A (en) * | 1991-11-14 | 1998-02-24 | Lockheed Martin Energy Systems, Inc. | Method for curing polymers using variable-frequency microwave heating |
US5961871A (en) * | 1991-11-14 | 1999-10-05 | Lockheed Martin Energy Research Corporation | Variable frequency microwave heating apparatus |
US5521360A (en) * | 1994-09-14 | 1996-05-28 | Martin Marietta Energy Systems, Inc. | Apparatus and method for microwave processing of materials |
US5519193A (en) * | 1992-10-27 | 1996-05-21 | International Business Machines Corporation | Method and apparatus for stressing, burning in and reducing leakage current of electronic devices using microwave radiation |
JP2771462B2 (ja) * | 1994-03-15 | 1998-07-02 | 富士通株式会社 | 光磁気記録媒体及び該媒体の使用方法 |
EP0801879B1 (de) * | 1994-03-31 | 2002-06-12 | Lockheed Martin Energy Systems, Inc. | Mikrowellen-heizvorrichtung mit variabler frequenz |
US5750968A (en) * | 1995-06-30 | 1998-05-12 | Lambda Technologies, Inc. | System and apparatus for reducing arcing and localized heating during microwave processing |
US5644837A (en) * | 1995-06-30 | 1997-07-08 | Lambda Technologies, Inc. | Process for assembling electronics using microwave irradiation |
EP0855020A2 (de) * | 1995-10-03 | 1998-07-29 | CEM Corporation | Durch mikroweller unterstützte chemische verfahren |
US5738915A (en) * | 1996-09-19 | 1998-04-14 | Lambda Technologies, Inc. | Curing polymer layers on semiconductor substrates using variable frequency microwave energy |
US5923174A (en) * | 1997-05-30 | 1999-07-13 | Northrop Grumman Corporation | Device for measuring electromagnetic radiation absorption |
DE19723854A1 (de) * | 1997-06-06 | 1998-12-10 | Hoechst Ag | Verfahren zur Herstellung von Lösungen mit Säuregruppen funktionalisierter Polymere durch Mikrowellenbestrahlung |
US6497786B1 (en) | 1997-11-06 | 2002-12-24 | Nike, Inc. | Methods and apparatus for bonding deformable materials having low deformation temperatures |
US6136388A (en) * | 1997-12-01 | 2000-10-24 | Applied Materials, Inc. | Substrate processing chamber with tunable impedance |
US7004107B1 (en) | 1997-12-01 | 2006-02-28 | Applied Materials Inc. | Method and apparatus for monitoring and adjusting chamber impedance |
US6084226A (en) | 1998-04-21 | 2000-07-04 | Cem Corporation | Use of continuously variable power in microwave assisted chemistry |
US6942695B1 (en) | 1999-04-05 | 2005-09-13 | Wessley-Jessen Corporation | Biomedical devices with polyimide coating |
US6515040B1 (en) | 1999-08-20 | 2003-02-04 | The University Of Connecticut | Microwave synthesis of polyamides, polyesters, and polyamideesters |
DE10156615B4 (de) * | 2001-11-17 | 2004-10-07 | Forschungszentrum Karlsruhe Gmbh | Einrichtung zur Erzeugung eines örtlich variierbaren Elektron-Zyklotron-Resonanz-Mikrowellen-Niederdruckplasmas |
US7569497B2 (en) * | 2002-07-30 | 2009-08-04 | Tokyo Electron Limited | Method and apparatus for forming insulating layer |
EP2469337B1 (de) | 2004-05-07 | 2014-01-22 | Hitachi Chemical DuPont MicroSystems Ltd. | Positive lichtempfindliche Harzzusammensetzung, Verfahren zum Bilden eines Musters und elektronische Komponente |
US7547647B2 (en) * | 2004-07-06 | 2009-06-16 | Hewlett-Packard Development Company, L.P. | Method of making a structure |
JP5121115B2 (ja) * | 2004-07-13 | 2013-01-16 | 日立化成デュポンマイクロシステムズ株式会社 | 硬化膜の製造方法、および電子デバイスの製造方法 |
JP4529566B2 (ja) * | 2004-07-13 | 2010-08-25 | 日立化成デュポンマイクロシステムズ株式会社 | マイクロ波硬化用ポジ型感光性樹脂組成物を用いたパターンの製造方法 |
US20060141138A1 (en) * | 2004-12-29 | 2006-06-29 | 3M Innovative Properties Company | Microwave annealing of membranes for use in fuel cell assemblies |
JP2006225591A (ja) * | 2005-02-21 | 2006-08-31 | Asahi Kasei Chemicals Corp | ポリアミド樹脂の製造方法 |
US8871422B2 (en) | 2005-09-22 | 2014-10-28 | Hitachi Chemical Dupont Microsystems Ltd. | Negative-type photosensitive resin composition, pattern forming method and electronic parts |
US8569093B2 (en) | 2006-03-15 | 2013-10-29 | Micron Technology, Inc. | Microelectronic devices and methods for manufacturing microelectronic devices |
US7615866B2 (en) * | 2006-05-23 | 2009-11-10 | Freescale Semiconductor, Inc. | Contact surrounded by passivation and polymide and method therefor |
JP5434588B2 (ja) | 2007-03-12 | 2014-03-05 | 日立化成デュポンマイクロシステムズ株式会社 | 感光性樹脂組成物、該樹脂組成物を用いたパターン硬化膜の製造方法及び電子部品 |
TWI439811B (zh) | 2007-10-29 | 2014-06-01 | Hitachi Chem Dupont Microsys | 正型感光性樹脂組成物、圖案的製造方法以及電子零件 |
US20090211522A1 (en) * | 2008-02-21 | 2009-08-27 | Gm Global Technology Operations, Inc. | Use of Variable Frequency Microwaves to Control the Teflon Profile of Gas Diffusion Media |
JP4911116B2 (ja) * | 2008-05-22 | 2012-04-04 | 日立化成デュポンマイクロシステムズ株式会社 | 半導体装置及びその製造方法、感光性樹脂組成物並びに電子部品 |
WO2014006510A2 (en) | 2012-07-02 | 2014-01-09 | Goji Ltd. | Rf energy application based on electromagnetic feedback |
US9781778B2 (en) | 2013-03-15 | 2017-10-03 | Nike, Inc. | Customized microwaving energy distribution utilizing slotted wave guides |
US9277787B2 (en) | 2013-03-15 | 2016-03-08 | Nike, Inc. | Microwave bonding of EVA and rubber items |
US9955536B2 (en) | 2013-03-15 | 2018-04-24 | Nike, Inc. | Customized microwave energy distribution utilizing slotted cage |
US20140263290A1 (en) * | 2013-03-15 | 2014-09-18 | Nike, Inc. | Microwave Treatment Of Materials |
US10224258B2 (en) * | 2013-03-22 | 2019-03-05 | Applied Materials, Inc. | Method of curing thermoplastics with microwave energy |
JP2015182017A (ja) * | 2014-03-25 | 2015-10-22 | 日本化学機械製造株式会社 | 低エネルギー電磁波反応装置 |
AT517146A2 (de) | 2015-05-13 | 2016-11-15 | Technische Universität Wien | Verfahren zur Herstellung von kristallinen Polyimiden |
KR102271573B1 (ko) * | 2015-06-11 | 2021-06-30 | 연세대학교 원주산학협력단 | 마이크로파를 이용한 폴리이미드 필름 제조방법 |
US20170365490A1 (en) * | 2016-06-19 | 2017-12-21 | Applied Materials, Inc. | Methods for polymer coefficient of thermal expansion (cte) tuning by microwave curing |
CN106832279A (zh) * | 2017-02-21 | 2017-06-13 | 北京化工大学 | 一种利用微波辅助亚胺化制备聚酰亚胺薄膜或纤维的方法 |
ES2696227B2 (es) * | 2018-07-10 | 2019-06-12 | Centro De Investig Energeticas Medioambientales Y Tecnologicas Ciemat | Fuente de iones interna para ciclotrones de baja erosion |
EP4369863A3 (de) * | 2018-07-31 | 2024-08-07 | Panasonic Intellectual Property Management Co., Ltd. | Hochfrequenzheizvorrichtung |
KR102230494B1 (ko) * | 2019-09-11 | 2021-03-19 | 연세대학교 원주산학협력단 | 마이크로파를 이용한 폴리이미드 필름의 제조방법 |
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US3414498A (en) * | 1963-04-09 | 1968-12-03 | Toyo Rayon Co Ltd | Cross-linking of polymeric substances with acetylene and ionizing radiation |
GB1106185A (en) * | 1964-05-29 | 1968-03-13 | Nils Bertil Agdur | Device for measuring a property of a material |
US3845018A (en) * | 1973-04-03 | 1974-10-29 | Hughes Aircraft Co | Acetylene substituted polyamide oligomers |
US3879349A (en) * | 1973-11-12 | 1975-04-22 | Hughes Aircraft Co | Homopolymerization of acetylene substituted polyimide polymers |
US3864309A (en) * | 1973-11-16 | 1975-02-04 | Hughes Aircraft Co | Copolymer of polyimide oligomers and terephthalonitrile n,n-dioxide and their methods of preparation |
US4319000A (en) * | 1975-05-27 | 1982-03-09 | International Harvester Company | Closed cell polyimides |
US4108836A (en) * | 1977-03-03 | 1978-08-22 | Hughes Aircraft Company | Process for synthesizing acetylene-substituted polyimides and polyimides thereof |
US4255313A (en) * | 1979-04-20 | 1981-03-10 | Gulf Oil Corporation | Novel end-capped polyimide oligomers |
US4299750A (en) * | 1979-05-03 | 1981-11-10 | Gulf Oil Corporation | Novel partially acetylene end-capped polyimide oligomers |
US4242437A (en) * | 1979-05-11 | 1980-12-30 | Minnesota Mining And Manufacturing Company | Photosensitized polyamic acids curable by exposure to actinic radiation |
EP0019391B1 (de) * | 1979-05-12 | 1982-10-06 | Fujitsu Limited | Verfahren zur Herstellung einer elektronischen Vorrichtung mit Vielschicht-Verdrahtungsstruktur |
US4316843A (en) * | 1980-01-25 | 1982-02-23 | Plastics Engineering Company | Polyimide derivatives having terminal unsaturated amides |
JPS56159087A (en) * | 1980-05-13 | 1981-12-08 | Matsushita Electric Ind Co Ltd | High frequency heater |
US4305796A (en) * | 1980-09-12 | 1981-12-15 | International Harvester Company | Methods of preparing polyimides and artifacts composed thereof |
US4439381A (en) * | 1980-09-12 | 1984-03-27 | I M L Corporation | Methods of preparing polyimides and artifacts composed thereof |
US4361453A (en) * | 1980-09-12 | 1982-11-30 | International Harvester Company | Methods of preparing polyimides and artifacts composed thereof |
US4363883A (en) * | 1980-09-12 | 1982-12-14 | International Harvester Company | Structural materials and components |
US4315076A (en) * | 1980-09-12 | 1982-02-09 | International Harvester Company | Polyimides |
US4363690A (en) * | 1980-09-12 | 1982-12-14 | International Harvester Company | Structural materials and components |
US4367296A (en) * | 1980-09-12 | 1983-01-04 | International Harvester Company | Structural materials and components |
US4315080A (en) * | 1981-04-14 | 1982-02-09 | International Harvester Company | Polyimides |
US4346182A (en) * | 1981-04-14 | 1982-08-24 | International Harvester Company | Polyimides |
US4315077A (en) * | 1981-04-14 | 1982-02-09 | International Harvester Company | Polyimides |
EP0048119A3 (de) * | 1980-09-12 | 1982-08-11 | I M L Corporation | Verfahren zur Herstellung von Polyimiden und daraus bestehende Gegenstände |
US4360604A (en) * | 1981-04-10 | 1982-11-23 | International Harvester Co. | Polyimide foams |
US4355120A (en) * | 1981-04-10 | 1982-10-19 | International Harvester Co. | Polyimide foams |
US4566804A (en) * | 1982-12-16 | 1986-01-28 | Cem Corporation | Apparatuses, processes and articles for controllably heating and drying materials by microwave radiation |
US4681996A (en) * | 1982-12-16 | 1987-07-21 | Cem Corporation | Analytical process in which materials to be analyzed are directly and indirectly heated and dried by microwave radiation |
US4585668A (en) * | 1983-02-28 | 1986-04-29 | Michigan State University | Method for treating a surface with a microwave or UHF plasma and improved apparatus |
FR2552613A1 (fr) * | 1983-09-28 | 1985-03-29 | Thourel Leo | Dispositif de chauffage par micro-ondes |
US4654223A (en) * | 1983-11-30 | 1987-03-31 | International Business Machines Corporation | Method for forming a film of dielectric material on an electric component |
US4656050A (en) * | 1983-11-30 | 1987-04-07 | International Business Machines Corporation | Method of producing electronic components utilizing cured vinyl and/or acetylene terminated copolymers |
US4749621A (en) * | 1983-11-30 | 1988-06-07 | International Business Machines Corporation | Electronic components comprising polyimide-filled isolation structures |
US4871619A (en) * | 1983-11-30 | 1989-10-03 | International Business Machines Corporation | Electronic components comprising polymide dielectric layers |
JPS6161519A (ja) * | 1984-09-03 | 1986-03-29 | Matsushita Electric Ind Co Ltd | アナログスイツチ回路 |
US4606650A (en) * | 1984-11-26 | 1986-08-19 | Domtar Inc. | Microwave, a closed vessel and methods of determining volatile material content |
US4556682A (en) * | 1985-02-25 | 1985-12-03 | John Gagliani | Polyimide compositions and foams and methods of making same |
JPS6279374A (ja) * | 1985-10-02 | 1987-04-11 | Hitachi Ltd | 絶縁体薄膜検査装置 |
US4681654A (en) * | 1986-05-21 | 1987-07-21 | International Business Machines Corporation | Flexible film semiconductor chip carrier |
US4767902A (en) * | 1986-09-24 | 1988-08-30 | Questech Inc. | Method and apparatus for the microwave joining of ceramic items |
FR2619217B1 (fr) * | 1987-08-04 | 1989-11-10 | Aerospatiale | Dispositif de mesure en continu du taux d'impregnation par une substance de fibres conductrices ou non d'electricite. |
US4792772A (en) * | 1987-08-24 | 1988-12-20 | Michigan State University | Microwave apparatus |
US4822537A (en) * | 1988-06-20 | 1989-04-18 | Ethyl Corporation | Production of foamed polymer structures |
-
1990
- 1990-07-11 US US07/551,716 patent/US5241040A/en not_active Expired - Lifetime
-
1991
- 1991-04-18 JP JP3144260A patent/JP2587148B2/ja not_active Expired - Lifetime
- 1991-06-11 EP EP91109594A patent/EP0465858B1/de not_active Expired - Lifetime
- 1991-06-11 DE DE69106956T patent/DE69106956T2/de not_active Expired - Fee Related
- 1991-11-27 US US07/799,378 patent/US5317081A/en not_active Expired - Fee Related
-
1993
- 1993-06-16 US US08/078,732 patent/US5340914A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5340914A (en) | 1994-08-23 |
US5317081A (en) | 1994-05-31 |
US5241040A (en) | 1993-08-31 |
EP0465858B1 (de) | 1995-01-25 |
EP0465858A1 (de) | 1992-01-15 |
JPH04305148A (ja) | 1992-10-28 |
DE69106956T2 (de) | 1995-08-10 |
JP2587148B2 (ja) | 1997-03-05 |
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