DE69103679T2 - Vorrichtung zum Transport von Einkristallstäben. - Google Patents

Vorrichtung zum Transport von Einkristallstäben.

Info

Publication number
DE69103679T2
DE69103679T2 DE69103679T DE69103679T DE69103679T2 DE 69103679 T2 DE69103679 T2 DE 69103679T2 DE 69103679 T DE69103679 T DE 69103679T DE 69103679 T DE69103679 T DE 69103679T DE 69103679 T2 DE69103679 T2 DE 69103679T2
Authority
DE
Germany
Prior art keywords
single crystal
crystal rods
transporting single
transporting
rods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69103679T
Other languages
English (en)
Other versions
DE69103679D1 (de
Inventor
Hiroyuki Ibe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Application granted granted Critical
Publication of DE69103679D1 publication Critical patent/DE69103679D1/de
Publication of DE69103679T2 publication Critical patent/DE69103679T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Manipulator (AREA)
DE69103679T 1990-05-28 1991-05-25 Vorrichtung zum Transport von Einkristallstäben. Expired - Fee Related DE69103679T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2138902A JP2605164B2 (ja) 1990-05-28 1990-05-28 単結晶棒搬出装置及びその搬送方法

Publications (2)

Publication Number Publication Date
DE69103679D1 DE69103679D1 (de) 1994-10-06
DE69103679T2 true DE69103679T2 (de) 1995-01-19

Family

ID=15232801

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69103679T Expired - Fee Related DE69103679T2 (de) 1990-05-28 1991-05-25 Vorrichtung zum Transport von Einkristallstäben.

Country Status (4)

Country Link
US (1) US5176490A (de)
EP (1) EP0460477B1 (de)
JP (1) JP2605164B2 (de)
DE (1) DE69103679T2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5641354A (en) * 1995-07-10 1997-06-24 Seh America, Inc. Puller cell
DE19538857A1 (de) * 1995-10-19 1997-04-24 Leybold Ag Verfahren und Vorrichtung zum Ziehen von Einkristallen aus einer in einem Tiegel befindlichen Schmelze
DE19613282A1 (de) * 1996-04-03 1997-10-09 Leybold Ag Vorrichtung zum Ziehen von Einkristallen
KR970073915A (ko) * 1996-05-28 1997-12-10 페. 좀머캄프, 하. 하게도른 크리스탈 클램프
DE19709212A1 (de) * 1997-03-06 1998-09-10 Leybold Ag Vorrichtung zur Handhabung schwerer Bauteile einer in einem Traggestell abgestützten Kristallziehmaschine nach dem Czochralski-Verfahren
JPH11129184A (ja) 1997-09-01 1999-05-18 Dainippon Screen Mfg Co Ltd 基板処理装置および基板搬入搬出装置
JP3962684B2 (ja) * 2000-11-06 2007-08-22 サムヤン コーポレイション 改善された水分吸収能および接着性を有する経皮投与剤
JP4984175B2 (ja) * 2008-12-05 2012-07-25 株式会社ダイフク 単結晶棒育成設備

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3280991A (en) * 1964-04-28 1966-10-25 Programmed & Remote Syst Corp Position control manipulator
JPS5142567B2 (de) * 1971-05-15 1976-11-16
US4005782A (en) * 1974-03-04 1977-02-01 Engineered Metal Products Company, Inc. Picker
US3951271A (en) * 1974-05-03 1976-04-20 Mette Klaus Hermann Robot control device
US4132318A (en) * 1976-12-30 1979-01-02 International Business Machines Corporation Asymmetric six-degree-of-freedom force-transducer system for a computer-controlled manipulator system
US4410494A (en) * 1981-04-13 1983-10-18 Siltec Corporation Apparatus for controlling flow of molten material between crystal growth furnaces and a replenishment crucible
US4350560A (en) * 1981-08-07 1982-09-21 Ferrofluidics Corporation Apparatus for and method of handling crystals from crystal-growing furnaces
GB2116871B (en) * 1982-03-16 1985-11-13 Vnii Monokristallov Apparatus for growing single crystals from a melt using the czochralski method
JPS6041038A (ja) * 1983-08-17 1985-03-04 Ricoh Co Ltd 二成分型ジアゾ複写材料
US4523972A (en) * 1983-11-28 1985-06-18 At&T Technologies, Inc. Method of and apparatus for handling crystal ingots
JPS60186385A (ja) * 1984-01-30 1985-09-21 不二輸送機工業株式会社 ロボツトハンドの微少移動装置
GB2198413B (en) * 1986-11-20 1990-01-17 Shimizu Construction Co Ltd Transporting robot for semiconductor wafers
JP2519459B2 (ja) * 1987-06-23 1996-07-31 東芝セラミックス株式会社 単結晶引上装置
SU1491698A1 (ru) * 1987-11-24 1989-07-07 Всесоюзный заочный машиностроительный институт Уравновешенный манипул тор
SU1495125A1 (ru) * 1987-12-16 1989-07-23 Фрунзенский политехнический институт Рука манипул тора
JP2683675B2 (ja) * 1989-01-26 1997-12-03 東京エレクトロン株式会社 搬送装置

Also Published As

Publication number Publication date
EP0460477B1 (de) 1994-08-31
EP0460477A1 (de) 1991-12-11
US5176490A (en) 1993-01-05
JPH0431400A (ja) 1992-02-03
DE69103679D1 (de) 1994-10-06
JP2605164B2 (ja) 1997-04-30

Similar Documents

Publication Publication Date Title
DE59204370D1 (de) Vorrichtung zum transport von stoffen.
DE3881548D1 (de) Vorrichtung zum transport von entwicklerpulver.
DE69206582T2 (de) Vorrichtung zum Positionieren von Behältern.
AT364503B (de) Vorrichtung zum transport von betonfertigteilen
DE3671309D1 (de) Vorrichtung zum transportieren von dokumenten.
DE3864809D1 (de) Vorrichtung zum transport von vorgarnspulen.
DE69116074T2 (de) System zum Transportieren/Sortieren von Einzelblättern
DE3764634D1 (de) Vorrichtung zum transport und zum aufstauen von paletten.
DE69309545T2 (de) Vorrichtung zum Wäschetransport
DE3872158T2 (de) Vorrichtung zum transportieren von boegen.
DE69103679D1 (de) Vorrichtung zum Transport von Einkristallstäben.
DE69513488T2 (de) Gerät zum transport von separaten teilen
DE3866329D1 (de) Vorrichtung zum transportieren von dokumenten.
DE69114817T2 (de) Vorrichtung zum speichern und fördern von gestapelten teilen.
DE3886985D1 (de) Vorrichtung zum Transport von teiltemperiertem, streifenförmigem Testgut.
DE69121031T2 (de) Einrichtung zum Fördern von Flachgut
DE59108253D1 (de) Einrichtung zum Transport von Stückgütern
DE68917395T2 (de) Vorrichtung zum Transportieren von Aufzeichnungsträgern.
DE59102634D1 (de) Vorrichtung zum Dosieren von Schüttgut.
DE59501286D1 (de) Vorrichtung zum transport von flachen sendungen
AT385966B (de) Vorrichtung zum transport von guetern
DE3669789D1 (de) Vorrichtung zum transport von magnetischem entwickler.
DE9406152U1 (de) Vorrichtung zum Transport von Gegenständen
DE406121T1 (de) Vorrichtung zum unterstuetzen und zum transport von glasplatten.
DE29503545U1 (de) Vorrichtung zum Transport von Gegenständen

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee