DE69032856D1 - Schwingungsdämpfungssystem - Google Patents

Schwingungsdämpfungssystem

Info

Publication number
DE69032856D1
DE69032856D1 DE69032856T DE69032856T DE69032856D1 DE 69032856 D1 DE69032856 D1 DE 69032856D1 DE 69032856 T DE69032856 T DE 69032856T DE 69032856 T DE69032856 T DE 69032856T DE 69032856 D1 DE69032856 D1 DE 69032856D1
Authority
DE
Germany
Prior art keywords
stiffness
columns
loaded
loads
vibration damping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69032856T
Other languages
English (en)
Other versions
DE69032856T2 (de
Inventor
David L Platus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of DE69032856D1 publication Critical patent/DE69032856D1/de
Publication of DE69032856T2 publication Critical patent/DE69032856T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
    • F16F15/073—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs using only leaf springs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F3/00—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic
    • F16F3/02—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic with springs made of steel or of other material having low internal friction
    • F16F3/026—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic with springs made of steel or of other material having low internal friction to give a zero-spring rate characteristic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2228/00—Functional characteristics, e.g. variability, frequency-dependence
    • F16F2228/06—Stiffness
    • F16F2228/063—Negative stiffness

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Vibration Prevention Devices (AREA)
  • Springs (AREA)
  • Buildings Adapted To Withstand Abnormal External Influences (AREA)
DE69032856T 1989-08-16 1990-08-15 Schwingungsdämpfungssystem Expired - Fee Related DE69032856T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US39509389A 1989-08-16 1989-08-16
PCT/US1990/004608 WO1991002921A1 (en) 1989-08-16 1990-08-15 Vibration isolation system

Publications (2)

Publication Number Publication Date
DE69032856D1 true DE69032856D1 (de) 1999-02-04
DE69032856T2 DE69032856T2 (de) 1999-07-22

Family

ID=23561657

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69032856T Expired - Fee Related DE69032856T2 (de) 1989-08-16 1990-08-15 Schwingungsdämpfungssystem

Country Status (6)

Country Link
EP (1) EP0487637B1 (de)
JP (3) JPH05501441A (de)
AT (1) ATE175015T1 (de)
CA (1) CA2064902C (de)
DE (1) DE69032856T2 (de)
WO (1) WO1991002921A1 (de)

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US5549270A (en) * 1989-08-16 1996-08-27 Minus K Technology, Inc. Vibration isolation system
WO1994013999A1 (en) * 1992-12-04 1994-06-23 Minus K Technology, Inc. Vibration isolation system
US6785217B1 (en) 1998-01-27 2004-08-31 Wistron Corporation Method and device for reducing vibration of a high speed disk drive
DE19812748C1 (de) * 1998-03-24 1999-08-12 Deutsch Zentr Luft & Raumfahrt Aktives Lagerelement für die Schwingungsisolierung, insbesondere für die Körperschallisolierung
JP2006258260A (ja) * 2005-03-18 2006-09-28 Mitsubishi Electric Corp 防振装置
US8061695B2 (en) 2007-06-06 2011-11-22 Honeywell International Inc. Adjustable mounting vibration isolator
JP4967834B2 (ja) * 2007-06-13 2012-07-04 富士電機株式会社 真空防振装置
US8441615B2 (en) * 2008-09-04 2013-05-14 Nikon Corporation System for isolating an exposure apparatus
JP2012503159A (ja) * 2008-09-19 2012-02-02 ユニバーシティ オブ ウルサン ファウンデーション フォー インダストリー コーポレイション 低い固有振動数をもつ振動絶縁システム
DE102011000656B8 (de) 2011-02-11 2013-03-21 Deutsches Zentrum für Luft- und Raumfahrt e.V. Schwingungsfreie Lagerung eines Objekts an einer schwingenden Struktur
DE102011015800A1 (de) 2011-04-01 2012-10-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur mechanischen Schwingungsentkopplung
US9447839B2 (en) 2011-09-15 2016-09-20 Mapper Lithography Ip B.V. Support module for lithography system
LT5883B (lt) 2012-02-23 2012-11-26 Vilniaus Gedimino technikos universitetas Mechaninė kvazinulinio standžio vibroizoliacinė sistema
EP2759736B1 (de) * 2013-01-29 2015-09-16 Integrated Dynamics Engineering GmbH Eine Schraubenfeder umfassender Schwingungsisolator
US9593739B2 (en) 2013-12-06 2017-03-14 Hrl Laboratories, Llc Negative stiffness hydraulic system
EP3077702B1 (de) * 2013-12-06 2019-04-17 HRL Laboratories, LLC Hydrauliksystem mit negativer steifigkeit
US9920793B1 (en) 2013-12-06 2018-03-20 Hrl Laboratories, Llc Negative stiffness system with variable preload adjustment
US9621775B2 (en) 2014-05-06 2017-04-11 Mems Drive, Inc. Electrical bar latching for low stiffness flexure MEMS actuator
KR101953139B1 (ko) * 2014-05-06 2019-02-28 멤스 드라이브, 인크. 저강성 플렉셔
DE112016003748T5 (de) 2015-08-19 2018-05-03 Mitsubishi Electric Corporation Drahtseildefekt-Detektionseinrichtung und Einstell-Lehre
NL2017711A (en) 2015-11-23 2017-06-02 Asml Netherlands Bv Vibration isolation device, lithographic apparatus and method to tune a vibration isolation device
EP3260732B1 (de) * 2016-06-23 2019-03-27 Integrated Dynamics Engineering GmbH Pneumatischer aktor sowie verfahren zum betrieb eines aktiven schwingungsisolationssystem
CN107665848B (zh) * 2016-07-29 2020-08-25 上海微电子装备（集团）股份有限公司 一种解键合调平装置及解键合方法
CN110139996B (zh) * 2017-01-12 2022-04-19 Hrl实验室有限责任公司 可调节负刚度机构
CN110168249B (zh) * 2017-01-12 2021-04-16 Hrl实验室有限责任公司 可调节负刚度系统
JP6742936B2 (ja) * 2017-03-15 2020-08-19 三菱重工エンジン＆ターボチャージャ株式会社 防振架台
US10816056B2 (en) * 2017-11-29 2020-10-27 Raytheon Company Vibration isolation system
CN108458037A (zh) * 2018-02-01 2018-08-28 安徽工程大学 一种柔性薄板主被动混合振动控制器
JP7352272B2 (ja) * 2018-03-08 2023-09-28 公立大学法人北九州市立大学 除振装置
CN108454344B (zh) * 2018-03-30 2021-04-20 江苏大学 一种包含负刚度装置的车辆悬架系统
CN108757803A (zh) * 2018-07-13 2018-11-06 浙江睿思自动化技术有限公司 六自由度准零刚度隔振装置
JP6944145B2 (ja) * 2018-08-10 2021-10-06 国立大学法人 長崎大学 制振装置
SE542637C2 (en) * 2018-09-04 2020-06-23 Saab Ab Sensor fastener arrangement
KR102097941B1 (ko) * 2018-12-12 2020-04-07 한국과학기술원 센서용 진동 저감 장치
DE102019125004A1 (de) * 2019-09-17 2021-03-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Vorrichtung zum unabhängigen, variablen Einstellen der Steifigkeit in mindestens zwei Raumrichtungen
CN111783285B (zh) * 2020-06-16 2022-07-19 南京理工大学 多点支撑结构的载荷传递路径优化方法
CN112081863B (zh) * 2020-08-12 2022-05-31 上海宇航系统工程研究所 一种悬臂梁式主被动一体化正交六自由度隔振装置
CN113639146A (zh) * 2021-07-12 2021-11-12 浙江工业大学 一种半主动控制的准零刚度并联机构隔振装置及控制方法
US20230178952A1 (en) * 2021-12-08 2023-06-08 Eagle Technology, Llc Optical system for use with a vacuum chamber and associated method
CN114274500B (zh) * 2021-12-23 2022-09-30 西安交通大学 一种基于绝对零刚度结构的隔振鞋中底的3d打印制作方法
CN114278703B (zh) * 2021-12-30 2024-03-15 哈尔滨工程大学 一种双几何非线性结构集成的低频准零刚度隔振器
CN114412954B (zh) * 2022-01-12 2022-10-04 华中科技大学 一种移动载体精密仪器隔振系统
CN114934966B (zh) * 2022-04-24 2023-03-10 上海交通大学 带非稳态负刚度吸振器的基座结构
DE102022111155A1 (de) 2022-05-05 2023-11-09 Integrated Dynamics Engineering Gesellschaft mit beschränkter Haftung Schwingungsisolator mit einer Schraubenfeder und einem Aktor

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US1545540A (en) * 1920-12-13 1925-07-14 Wills Childe Harold Motor support
GB394969A (en) * 1931-11-04 1933-07-04 Gen Electric Co Ltd Improvements in or relating to fittings for supporting electric lampholders
US2313893A (en) * 1941-09-19 1943-03-16 Westinghouse Electric & Mfg Co Low frequency resilient mounting
US2572919A (en) * 1943-04-30 1951-10-30 Barr & Stroud Ltd Vibration damping mounting for optical observation instruments
US2932482A (en) * 1958-05-26 1960-04-12 Robinson Aviat Inc Stabilized mounting system
US3028138A (en) * 1958-08-06 1962-04-03 Wells & Company Ltd A Anti-vibration mountings
US3223400A (en) * 1963-10-21 1965-12-14 Deister Machine Company Vibration isolation mount
US3464657A (en) * 1967-08-30 1969-09-02 Us Army Vibration damped platform
US3606704A (en) * 1969-05-02 1971-09-21 Resilient Services Inc Elevated floor structure
US3592422A (en) * 1969-07-29 1971-07-13 Nasa Vibration isolation system using compression springs
US3727865A (en) * 1970-10-09 1973-04-17 Rca Corp Suspension system
US4511115A (en) * 1984-01-27 1985-04-16 Chicago Bridge & Iron Company Passive structure with energy absorbing capacity

Also Published As

Publication number Publication date
EP0487637A1 (de) 1992-06-03
EP0487637B1 (de) 1998-12-23
DE69032856T2 (de) 1999-07-22
CA2064902C (en) 2006-11-21
CA2064902A1 (en) 1991-02-17
JP3614755B2 (ja) 2005-01-26
JP2004316931A (ja) 2004-11-11
JP2000337439A (ja) 2000-12-05
EP0487637A4 (en) 1993-10-27
WO1991002921A1 (en) 1991-03-07
JPH05501441A (ja) 1993-03-18
ATE175015T1 (de) 1999-01-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee