DE69031302D1 - Filter für elektromagnetische Strahlung und Herstellungsverfahren - Google Patents

Filter für elektromagnetische Strahlung und Herstellungsverfahren

Info

Publication number
DE69031302D1
DE69031302D1 DE69031302T DE69031302T DE69031302D1 DE 69031302 D1 DE69031302 D1 DE 69031302D1 DE 69031302 T DE69031302 T DE 69031302T DE 69031302 T DE69031302 T DE 69031302T DE 69031302 D1 DE69031302 D1 DE 69031302D1
Authority
DE
Germany
Prior art keywords
electromagnetic radiation
manufacturing processes
radiation filters
filters
processes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69031302T
Other languages
English (en)
Other versions
DE69031302T2 (de
Inventor
Jaroslav Hynecek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of DE69031302D1 publication Critical patent/DE69031302D1/de
Publication of DE69031302T2 publication Critical patent/DE69031302T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Optical Filters (AREA)
DE1990631302 1989-12-22 1990-12-10 Filter für elektromagnetische Strahlung und Herstellungsverfahren Expired - Fee Related DE69031302T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US45488789A 1989-12-22 1989-12-22

Publications (2)

Publication Number Publication Date
DE69031302D1 true DE69031302D1 (de) 1997-09-25
DE69031302T2 DE69031302T2 (de) 1997-12-18

Family

ID=23806475

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1990631302 Expired - Fee Related DE69031302T2 (de) 1989-12-22 1990-12-10 Filter für elektromagnetische Strahlung und Herstellungsverfahren

Country Status (3)

Country Link
EP (1) EP0434273B1 (de)
JP (1) JPH05107408A (de)
DE (1) DE69031302T2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201117480D0 (en) 2011-10-10 2011-11-23 Palikaras George Filter

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4168448A (en) * 1976-10-08 1979-09-18 Eastman Kodak Company Solid-state color imaging device having an integral color filter
US4239842A (en) * 1979-09-13 1980-12-16 Eastman Kodak Company Color filter arrays, color imaging devices and methods of making same
JPS57190912A (en) * 1981-05-20 1982-11-24 Matsushita Electric Ind Co Ltd Production of color filter
US4393121A (en) * 1981-11-23 1983-07-12 Mobil Oil Corporation Polyester coil coating
JPS59113404A (ja) * 1982-12-20 1984-06-30 Sanyo Electric Co Ltd カラ−固体撮像素子用カラ−フイルタの製造方法
JPS59198754A (ja) * 1983-04-26 1984-11-10 Toshiba Corp カラ−用固体撮像デバイス
JPS61267005A (ja) * 1985-05-21 1986-11-26 Mitsubishi Electric Corp 色分解フイルタ及びその製造方法
US4618565A (en) * 1985-06-05 1986-10-21 Rca Corporation Absorptive layer for optical lithography
US4808501A (en) * 1985-10-15 1989-02-28 Polaroid Corporation, Patent Dept. Method for manufacturing an optical filter
JPH01501973A (ja) * 1987-01-12 1989-07-06 ブリューワ　サイエンス　インコーポレイテッド マイクロエレクトロニクス用光フィルタ

Also Published As

Publication number Publication date
EP0434273A3 (de) 1994-03-23
EP0434273A2 (de) 1991-06-26
DE69031302T2 (de) 1997-12-18
EP0434273B1 (de) 1997-08-20
JPH05107408A (ja) 1993-04-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee