DE69030365T2 - Verfahren zur Herstellung eines supraleitfähigen Mikrowellenbauelements - Google Patents
Verfahren zur Herstellung eines supraleitfähigen MikrowellenbauelementsInfo
- Publication number
- DE69030365T2 DE69030365T2 DE69030365T DE69030365T DE69030365T2 DE 69030365 T2 DE69030365 T2 DE 69030365T2 DE 69030365 T DE69030365 T DE 69030365T DE 69030365 T DE69030365 T DE 69030365T DE 69030365 T2 DE69030365 T2 DE 69030365T2
- Authority
- DE
- Germany
- Prior art keywords
- producing
- microwave component
- superconducting microwave
- superconducting
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0296—Processes for depositing or forming superconductor layers
- H10N60/0408—Processes for depositing or forming superconductor layers by sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/20—Permanent superconducting devices
- H10N60/203—Permanent superconducting devices comprising high-Tc ceramic materials
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1334032A JPH03194979A (ja) | 1989-12-22 | 1989-12-22 | マイクロ波共振器 |
JP2000876A JPH03205904A (ja) | 1990-01-06 | 1990-01-06 | マイクロ波遅延線 |
JP2306733A JPH04178004A (ja) | 1990-11-13 | 1990-11-13 | 超電導マイクロ波部品用基板の作製方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69030365D1 DE69030365D1 (de) | 1997-05-07 |
DE69030365T2 true DE69030365T2 (de) | 1997-10-23 |
Family
ID=27274653
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69030365T Expired - Fee Related DE69030365T2 (de) | 1989-12-22 | 1990-12-24 | Verfahren zur Herstellung eines supraleitfähigen Mikrowellenbauelements |
Country Status (5)
Country | Link |
---|---|
US (1) | US6057271A (de) |
EP (1) | EP0435765B1 (de) |
AU (1) | AU625016B2 (de) |
CA (1) | CA2033137C (de) |
DE (1) | DE69030365T2 (de) |
Families Citing this family (50)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6026311A (en) * | 1993-05-28 | 2000-02-15 | Superconductor Technologies, Inc. | High temperature superconducting structures and methods for high Q, reduced intermodulation resonators and filters |
US7231238B2 (en) * | 1989-01-13 | 2007-06-12 | Superconductor Technologies, Inc. | High temperature spiral snake superconducting resonator having wider runs with higher current density |
KR100235799B1 (ko) * | 1990-05-30 | 1999-12-15 | 구라우치 노리타카 | 산화물 초전도체를 이용한 초전도 접합형성방법 |
DE69131793T2 (de) * | 1990-08-08 | 2000-04-27 | Sumitomo Electric Industries | Substrat für supraleitende Einrichtungen |
JP2567517B2 (ja) * | 1990-10-29 | 1996-12-25 | 住友電気工業株式会社 | 超電導マイクロ波部品 |
WO1992010857A1 (en) * | 1990-12-07 | 1992-06-25 | E.I. Du Pont De Nemours And Company | Process for depositing high temperature superconducting oxide thin films |
US5439877A (en) * | 1990-12-07 | 1995-08-08 | E. I. Du Pont De Nemours And Company | Process for depositing high temperature superconducting oxide thin films |
US5150088A (en) * | 1991-03-27 | 1992-09-22 | Hughes Aircraft Company | Stripline shielding techniques in low temperature co-fired ceramic |
JPH04342487A (ja) * | 1991-05-20 | 1992-11-27 | Sumitomo Electric Ind Ltd | 超電導マイクロ波部品用基板の作製方法 |
EP0584410A1 (de) * | 1991-07-05 | 1994-03-02 | Conductus, Inc. | Supraleitende elektronische Strukturen und Verfahren zu ihrer Herstellung |
CA2073272C (en) * | 1991-07-08 | 1997-04-01 | Kenjiro Higaki | Microwave resonator of compound oxide superconductor material |
US6156707A (en) * | 1992-05-20 | 2000-12-05 | Sumitomo Electric Industries, Ltd. | Method of manufacturing superconducting microwave component substrate |
US6021337A (en) * | 1996-05-29 | 2000-02-01 | Illinois Superconductor Corporation | Stripline resonator using high-temperature superconductor components |
US7554829B2 (en) | 1999-07-30 | 2009-06-30 | Micron Technology, Inc. | Transmission lines for CMOS integrated circuits |
US6844203B2 (en) * | 2001-08-30 | 2005-01-18 | Micron Technology, Inc. | Gate oxides, and methods of forming |
US8026161B2 (en) | 2001-08-30 | 2011-09-27 | Micron Technology, Inc. | Highly reliable amorphous high-K gate oxide ZrO2 |
US6953730B2 (en) | 2001-12-20 | 2005-10-11 | Micron Technology, Inc. | Low-temperature grown high quality ultra-thin CoTiO3 gate dielectrics |
US6767795B2 (en) | 2002-01-17 | 2004-07-27 | Micron Technology, Inc. | Highly reliable amorphous high-k gate dielectric ZrOXNY |
US6893984B2 (en) * | 2002-02-20 | 2005-05-17 | Micron Technology Inc. | Evaporated LaA1O3 films for gate dielectrics |
US6812100B2 (en) * | 2002-03-13 | 2004-11-02 | Micron Technology, Inc. | Evaporation of Y-Si-O films for medium-k dielectrics |
US7045430B2 (en) | 2002-05-02 | 2006-05-16 | Micron Technology Inc. | Atomic layer-deposited LaAlO3 films for gate dielectrics |
US7160577B2 (en) | 2002-05-02 | 2007-01-09 | Micron Technology, Inc. | Methods for atomic-layer deposition of aluminum oxides in integrated circuits |
US20030222732A1 (en) * | 2002-05-29 | 2003-12-04 | Superconductor Technologies, Inc. | Narrow-band filters with zig-zag hairpin resonator |
US7135421B2 (en) | 2002-06-05 | 2006-11-14 | Micron Technology, Inc. | Atomic layer-deposited hafnium aluminum oxide |
US7205218B2 (en) * | 2002-06-05 | 2007-04-17 | Micron Technology, Inc. | Method including forming gate dielectrics having multiple lanthanide oxide layers |
US6804136B2 (en) | 2002-06-21 | 2004-10-12 | Micron Technology, Inc. | Write once read only memory employing charge trapping in insulators |
US7193893B2 (en) * | 2002-06-21 | 2007-03-20 | Micron Technology, Inc. | Write once read only memory employing floating gates |
US7221017B2 (en) | 2002-07-08 | 2007-05-22 | Micron Technology, Inc. | Memory utilizing oxide-conductor nanolaminates |
US7221586B2 (en) | 2002-07-08 | 2007-05-22 | Micron Technology, Inc. | Memory utilizing oxide nanolaminates |
US6921702B2 (en) * | 2002-07-30 | 2005-07-26 | Micron Technology Inc. | Atomic layer deposited nanolaminates of HfO2/ZrO2 films as gate dielectrics |
US6884739B2 (en) | 2002-08-15 | 2005-04-26 | Micron Technology Inc. | Lanthanide doped TiOx dielectric films by plasma oxidation |
US6790791B2 (en) * | 2002-08-15 | 2004-09-14 | Micron Technology, Inc. | Lanthanide doped TiOx dielectric films |
US20040036129A1 (en) * | 2002-08-22 | 2004-02-26 | Micron Technology, Inc. | Atomic layer deposition of CMOS gates with variable work functions |
US6967154B2 (en) | 2002-08-26 | 2005-11-22 | Micron Technology, Inc. | Enhanced atomic layer deposition |
US7199023B2 (en) | 2002-08-28 | 2007-04-03 | Micron Technology, Inc. | Atomic layer deposited HfSiON dielectric films wherein each precursor is independendently pulsed |
US6958302B2 (en) * | 2002-12-04 | 2005-10-25 | Micron Technology, Inc. | Atomic layer deposited Zr-Sn-Ti-O films using TiI4 |
US7101813B2 (en) | 2002-12-04 | 2006-09-05 | Micron Technology Inc. | Atomic layer deposited Zr-Sn-Ti-O films |
US7220665B2 (en) * | 2003-08-05 | 2007-05-22 | Micron Technology, Inc. | H2 plasma treatment |
US20050233477A1 (en) * | 2004-03-05 | 2005-10-20 | Tokyo Electron Limited | Substrate processing apparatus, substrate processing method, and program for implementing the method |
US9260780B2 (en) * | 2004-03-26 | 2016-02-16 | Tohoku Seiki Industries, Ltd. | Process for forming thin film and system for forming thin film |
US7558608B2 (en) * | 2004-09-29 | 2009-07-07 | Fujitsu Limited | Superconducting device, fabrication method thereof, and filter adjusting method |
US7687409B2 (en) | 2005-03-29 | 2010-03-30 | Micron Technology, Inc. | Atomic layer deposited titanium silicon oxide films |
US7662729B2 (en) | 2005-04-28 | 2010-02-16 | Micron Technology, Inc. | Atomic layer deposition of a ruthenium layer to a lanthanide oxide dielectric layer |
US7927948B2 (en) | 2005-07-20 | 2011-04-19 | Micron Technology, Inc. | Devices with nanocrystals and methods of formation |
US7709402B2 (en) | 2006-02-16 | 2010-05-04 | Micron Technology, Inc. | Conductive layers for hafnium silicon oxynitride films |
US7563730B2 (en) | 2006-08-31 | 2009-07-21 | Micron Technology, Inc. | Hafnium lanthanide oxynitride films |
US7759237B2 (en) * | 2007-06-28 | 2010-07-20 | Micron Technology, Inc. | Method of forming lutetium and lanthanum dielectric structures |
CN104157947A (zh) * | 2014-08-06 | 2014-11-19 | 武汉中元通信股份有限公司 | V波段大功率宽带3dB正交耦合器带状三维版图拓扑架构 |
US11947256B2 (en) * | 2017-08-03 | 2024-04-02 | Asml Netherlands B.V. | Simultaneous double-side coating of multilayer graphene pellicle by local thermal processing |
CN113312783B (zh) * | 2021-06-09 | 2022-07-01 | 广东电网有限责任公司 | 一种超导直流电缆建模方法及系统 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4962086A (en) * | 1988-06-08 | 1990-10-09 | International Business Machines Corporation | High Tc superconductor - gallate crystal structures |
US4962316A (en) * | 1989-07-31 | 1990-10-09 | Santa Barbara Research Center | Frequency domain integrating resonant superconducting transmission line detector |
-
1990
- 1990-12-24 CA CA002033137A patent/CA2033137C/en not_active Expired - Fee Related
- 1990-12-24 DE DE69030365T patent/DE69030365T2/de not_active Expired - Fee Related
- 1990-12-24 EP EP90403754A patent/EP0435765B1/de not_active Expired - Lifetime
- 1990-12-24 AU AU68453/90A patent/AU625016B2/en not_active Ceased
-
1995
- 1995-06-07 US US08/484,093 patent/US6057271A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0435765A2 (de) | 1991-07-03 |
AU625016B2 (en) | 1992-06-25 |
US6057271A (en) | 2000-05-02 |
DE69030365D1 (de) | 1997-05-07 |
EP0435765B1 (de) | 1997-04-02 |
AU6845390A (en) | 1991-06-27 |
CA2033137A1 (en) | 1991-06-23 |
EP0435765A3 (en) | 1991-09-18 |
CA2033137C (en) | 1995-07-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |