DE69026212T2 - Wechselstromvorrichtung zum Prüfen eines IC-Testgerätes - Google Patents

Wechselstromvorrichtung zum Prüfen eines IC-Testgerätes

Info

Publication number
DE69026212T2
DE69026212T2 DE69026212T DE69026212T DE69026212T2 DE 69026212 T2 DE69026212 T2 DE 69026212T2 DE 69026212 T DE69026212 T DE 69026212T DE 69026212 T DE69026212 T DE 69026212T DE 69026212 T2 DE69026212 T2 DE 69026212T2
Authority
DE
Germany
Prior art keywords
tester
testing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69026212T
Other languages
English (en)
Other versions
DE69026212D1 (de
Inventor
Masahisa Hirai
Shigemi Komagata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Application granted granted Critical
Publication of DE69026212D1 publication Critical patent/DE69026212D1/de
Publication of DE69026212T2 publication Critical patent/DE69026212T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31905—Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31908—Tester set-up, e.g. configuring the tester to the device under test [DUT], down loading test patterns
    • G01R31/3191—Calibration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
DE69026212T 1989-12-06 1990-12-04 Wechselstromvorrichtung zum Prüfen eines IC-Testgerätes Expired - Fee Related DE69026212T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1316806A JPH03176678A (ja) 1989-12-06 1989-12-06 Ｉｃテスタのａｃ評価方法

Publications (2)

Publication Number Publication Date
DE69026212D1 DE69026212D1 (de) 1996-05-02
DE69026212T2 true DE69026212T2 (de) 1996-09-12

Family

ID=18081130

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69026212T Expired - Fee Related DE69026212T2 (de) 1989-12-06 1990-12-04 Wechselstromvorrichtung zum Prüfen eines IC-Testgerätes

Country Status (5)

Country Link
US (1) US5059893A (de)
EP (1) EP0431560B1 (de)
JP (1) JPH03176678A (de)
KR (1) KR940002724B1 (de)
DE (1) DE69026212T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5459738A (en) * 1994-01-26 1995-10-17 Watari; Hiromichi Apparatus and method for digital circuit testing
US6976234B2 (en) * 2003-01-13 2005-12-13 Credence Systems Corporation Apparatus and method for measuring characteristics of dynamic electrical signals in integrated circuits
US7552028B2 (en) * 2006-12-01 2009-06-23 Advantest Corporation Recording medium, test apparatus and diagnostic method
JP2009103469A (ja) * 2007-10-19 2009-05-14 Advantest Corp 試験装置、スキュー測定装置、デバイスおよびボード
AT506815B1 (de) * 2008-05-28 2009-12-15 Mohaupt Peter Dipl Ing Vlf-prüfgenerator
JP2010117349A (ja) * 2008-10-16 2010-05-27 Advantest Corp 試験装置、パフォーマンスボード、および、キャリブレーション用ボード
EP2248780A1 (de) 2009-05-06 2010-11-10 BK Giulini GmbH Abbinde- und Enthärtungsbeschleuniger
CN103472424B (zh) * 2013-08-26 2016-01-20 云南电力试验研究院（集团）有限公司电力研究院 基于模拟电压信号注入的不同类型局放检测仪主机性能测试方法
US10551470B2 (en) * 2017-09-22 2020-02-04 Rohde & Schwarz Gmbh & Co. Kg Calibration apparatus, calibration system and method for calibrating at least one of the signal generator and a signal analyzer

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4541065A (en) * 1982-09-14 1985-09-10 John Fluke Mfg. Co., Inc. Direct volts calibrator
US4637020A (en) * 1983-08-01 1987-01-13 Fairchild Semiconductor Corporation Method and apparatus for monitoring automated testing of electronic circuits
JPS60263807A (ja) * 1984-06-12 1985-12-27 Dainippon Screen Mfg Co Ltd プリント配線板のパタ−ン欠陥検査装置
JPH0697256B2 (ja) * 1986-04-14 1994-11-30 株式会社アドバンテスト Ａｃレベル校正装置
US4989155A (en) * 1986-08-14 1991-01-29 Gte Valenite Corporation Intelligent power monitor
GB2199711B (en) * 1987-01-08 1990-10-24 Schlumberger Electronics Converter calibration
JPS646777A (en) * 1987-06-29 1989-01-11 Advantest Corp Head for linear lsi test system
US4829236A (en) * 1987-10-30 1989-05-09 Teradyne, Inc. Digital-to-analog calibration system
US4947355A (en) * 1988-05-05 1990-08-07 John Fluke Mfg. Co., Inc. Modular electronic instrument system having automated calibration capability

Also Published As

Publication number Publication date
KR910012748A (ko) 1991-08-08
KR940002724B1 (ko) 1994-03-31
US5059893A (en) 1991-10-22
EP0431560A3 (en) 1992-01-02
DE69026212D1 (de) 1996-05-02
JPH03176678A (ja) 1991-07-31
EP0431560B1 (de) 1996-03-27
EP0431560A2 (de) 1991-06-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee