DE69023562T2 - Verfahren zur Herstellung von Feinmustern. - Google Patents
Verfahren zur Herstellung von Feinmustern.Info
- Publication number
- DE69023562T2 DE69023562T2 DE69023562T DE69023562T DE69023562T2 DE 69023562 T2 DE69023562 T2 DE 69023562T2 DE 69023562 T DE69023562 T DE 69023562T DE 69023562 T DE69023562 T DE 69023562T DE 69023562 T2 DE69023562 T2 DE 69023562T2
- Authority
- DE
- Germany
- Prior art keywords
- production
- fine samples
- samples
- fine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M1/00—Inking and printing with a printer's forme
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M3/00—Printing processes to produce particular kinds of printed work, e.g. patterns
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/02—Local etching
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/02—Electroplating of selected surface areas
- C25D5/022—Electroplating of selected surface areas using masking means
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/061—Etching masks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/061—Etching masks
- H05K3/064—Photoresists
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
- H05K2203/0117—Pattern shaped electrode used for patterning, e.g. plating or etching
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0502—Patterning and lithography
- H05K2203/0537—Transfer of pre-fabricated insulating pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0548—Masks
- H05K2203/0551—Exposure mask directly printed on the PCB
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0562—Details of resist
- H05K2203/0585—Second resist used as mask for selective stripping of first resist
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
- H05K2203/0703—Plating
- H05K2203/0726—Electroforming, i.e. electroplating on a metallic carrier thereby forming a self-supporting structure
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/13—Moulding and encapsulation; Deposition techniques; Protective layers
- H05K2203/1333—Deposition techniques, e.g. coating
- H05K2203/135—Electrophoretic deposition of insulating material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
- H05K3/0082—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Electrochemistry (AREA)
- Manufacture Or Reproduction Of Printing Formes (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Printing Methods (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19218089 | 1989-07-25 | ||
JP2102421A JP2966031B2 (ja) | 1989-07-25 | 1990-04-18 | 微細パターンの形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69023562D1 DE69023562D1 (de) | 1995-12-21 |
DE69023562T2 true DE69023562T2 (de) | 1996-08-01 |
Family
ID=26443140
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69023562T Expired - Lifetime DE69023562T2 (de) | 1989-07-25 | 1990-07-17 | Verfahren zur Herstellung von Feinmustern. |
Country Status (4)
Country | Link |
---|---|
US (1) | US5037504A (de) |
EP (1) | EP0410274B1 (de) |
CA (1) | CA2021318C (de) |
DE (1) | DE69023562T2 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2809892B2 (ja) * | 1991-03-20 | 1998-10-15 | 株式会社ジーティシー | 大面積回路基板のレジストパターン形成方法 |
US5209815A (en) * | 1991-06-06 | 1993-05-11 | International Business Machines Corporation | Method for forming patterned films on a substrate |
JPH06222562A (ja) * | 1993-01-28 | 1994-08-12 | Nippon Paint Co Ltd | 電着レジスト膜の乾燥方法 |
US5607533A (en) * | 1994-06-03 | 1997-03-04 | Fuji Photo Film Co., Ltd. | Method for preparation of printing plate by electrophotographic process and apparatus for use therein |
US5775219A (en) * | 1995-12-13 | 1998-07-07 | Kyushu Hitachi Maxell, Ltd. | Squeegee for screen printing |
LU90412B1 (fr) * | 1999-07-02 | 2001-01-03 | Cabinet Erman | Proc-d- d'enduction et produits issus du proc-d- |
FR2807706A1 (fr) * | 2000-04-14 | 2001-10-19 | Eurotechni Office | Procede, dispositif et systeme de marquage par electrochimie |
KR20070029762A (ko) * | 2004-06-30 | 2007-03-14 | 코닌클리케 필립스 일렉트로닉스 엔.브이. | 화학적으로 패터닝된 표면을 구비한 소프트 리소그라피스탬프 |
KR100716304B1 (ko) * | 2005-06-30 | 2007-05-08 | 엘지.필립스 엘시디 주식회사 | 액정 표시 장치용 인쇄판 및 그의 제조 방법 |
US20070178237A1 (en) * | 2005-08-02 | 2007-08-02 | Shin Dong M | Method for patterning coatings |
US20070048448A1 (en) * | 2005-08-17 | 2007-03-01 | Kim Dae H | Patterning method using coatings containing ionic components |
KR100863570B1 (ko) * | 2006-12-19 | 2008-10-15 | 삼성전자주식회사 | 와이어 그리드 편광자의 제조방법 |
US8133375B2 (en) * | 2008-06-02 | 2012-03-13 | Ho E Screw & Hardware Co., Ltd. | Method of surface printing and plating |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2666008A (en) * | 1950-08-03 | 1954-01-12 | Stromberg Carlson Co | Methods and apparatus for making conductive patterns of predetermined configuration |
GB829354A (en) * | 1957-05-02 | 1960-03-02 | Erie Resistor Ltd | Improvements in or relating to electrical circuits |
DE3429865A1 (de) * | 1984-08-14 | 1986-02-27 | Roland Dipl.-Chem. Dr.rer.nat. 5451 Oberhonnefeld-Gierend Milker | Verfahren zur herstellung von gedruckten schaltungen |
GB8614868D0 (en) * | 1986-06-18 | 1986-07-23 | Ciba Geigy Ag | Metallic patterns |
JPS63274194A (ja) * | 1987-05-06 | 1988-11-11 | Toobi:Kk | 金属パタ−ンプリント板とその製造方法 |
GB8801736D0 (en) * | 1988-01-27 | 1988-02-24 | Ciba Geigy Ag | Method of making patterns |
-
1990
- 1990-07-17 CA CA002021318A patent/CA2021318C/en not_active Expired - Lifetime
- 1990-07-17 EP EP90113687A patent/EP0410274B1/de not_active Expired - Lifetime
- 1990-07-17 DE DE69023562T patent/DE69023562T2/de not_active Expired - Lifetime
- 1990-07-18 US US07/553,565 patent/US5037504A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0410274A3 (en) | 1992-06-03 |
EP0410274B1 (de) | 1995-11-15 |
CA2021318C (en) | 2000-04-04 |
US5037504A (en) | 1991-08-06 |
EP0410274A2 (de) | 1991-01-30 |
CA2021318A1 (en) | 1991-01-26 |
DE69023562D1 (de) | 1995-12-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |