DE69015406T2 - Vorrichtung zur Erfassung von Mikroverschiebungen, Piezo-Stellantrieb unter Verwendung der Vorrichtung und Abtastmikroskop unter Verwendung des Piezo-Stellantriebes. - Google Patents
Vorrichtung zur Erfassung von Mikroverschiebungen, Piezo-Stellantrieb unter Verwendung der Vorrichtung und Abtastmikroskop unter Verwendung des Piezo-Stellantriebes.Info
- Publication number
- DE69015406T2 DE69015406T2 DE69015406T DE69015406T DE69015406T2 DE 69015406 T2 DE69015406 T2 DE 69015406T2 DE 69015406 T DE69015406 T DE 69015406T DE 69015406 T DE69015406 T DE 69015406T DE 69015406 T2 DE69015406 T2 DE 69015406T2
- Authority
- DE
- Germany
- Prior art keywords
- piezo actuator
- scanning microscope
- detecting micro
- micro displacements
- displacements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000006073 displacement reaction Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q20/00—Monitoring the movement or position of the probe
- G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/28—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/02—Probe holders
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/861—Scanning tunneling probe
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/872—Positioner
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8873189 | 1989-04-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69015406D1 DE69015406D1 (de) | 1995-02-09 |
DE69015406T2 true DE69015406T2 (de) | 1995-08-03 |
Family
ID=13951063
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69015406T Expired - Fee Related DE69015406T2 (de) | 1989-04-07 | 1990-04-06 | Vorrichtung zur Erfassung von Mikroverschiebungen, Piezo-Stellantrieb unter Verwendung der Vorrichtung und Abtastmikroskop unter Verwendung des Piezo-Stellantriebes. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4987303A (de) |
EP (1) | EP0391429B1 (de) |
JP (1) | JPH0348102A (de) |
DE (1) | DE69015406T2 (de) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0646913B1 (de) * | 1987-08-25 | 1999-01-13 | Canon Kabushiki Kaisha | Tunnelstromkodierer |
JP2834173B2 (ja) * | 1989-02-17 | 1998-12-09 | 株式会社日立製作所 | 走査型トンネル音響顕微鏡 |
JPH04263142A (ja) * | 1990-02-08 | 1992-09-18 | Canon Inc | プローブユニット、これを用いた情報処理装置及び情報処理方法 |
US5092163A (en) * | 1990-06-27 | 1992-03-03 | Young Russell D | Precision small scale force sensor |
JP2945090B2 (ja) * | 1990-07-09 | 1999-09-06 | キヤノン株式会社 | エンコーダ |
US5193383A (en) * | 1990-07-11 | 1993-03-16 | The United States Of America As Represented By The Secretary Of The Navy | Mechanical and surface force nanoprobe |
JPH0758193B2 (ja) * | 1990-09-14 | 1995-06-21 | 三菱電機株式会社 | 原子間力顕微鏡の微動走査機構 |
US5193384A (en) * | 1990-09-26 | 1993-03-16 | The Charles Stark Draper Laboratory, Inc. | Edge detecting system and method |
US5186041A (en) * | 1990-11-28 | 1993-02-16 | International Business Machines Corporation | Microprobe-based CD measurement tool |
US5103094A (en) * | 1991-05-02 | 1992-04-07 | Wyko Corporation | Compact temperature-compensated tube-type scanning probe with large scan range |
US5173605A (en) * | 1991-05-02 | 1992-12-22 | Wyko Corporation | Compact temperature-compensated tube-type scanning probe with large scan range and independent x, y, and z control |
US5319960A (en) * | 1992-03-06 | 1994-06-14 | Topometrix | Scanning force microscope |
US5179499A (en) * | 1992-04-14 | 1993-01-12 | Cornell Research Foundation, Inc. | Multi-dimensional precision micro-actuator |
US5394757A (en) * | 1992-06-25 | 1995-03-07 | Thiokol Corporation | Multiple stylus probe attachment and methods |
US5260572A (en) * | 1992-08-13 | 1993-11-09 | Wyko Corporation | Scanning probe microscope including height plus deflection method and apparatus to achieve both high resolution and high speed scanning |
JPH07140503A (ja) * | 1993-11-16 | 1995-06-02 | Hitachi Ltd | 微小変位発生装置 |
US5481189A (en) * | 1994-02-07 | 1996-01-02 | The United States Of America As Represented By The Secretary Of The Navy | Electron tunneling magnetic field sensor with constant tunneling current maintained between tunneling tip and rotatable magnet |
US5723981A (en) * | 1994-08-29 | 1998-03-03 | Imec Vzw | Method for measuring the electrical potential in a semiconductor element |
US6091248A (en) * | 1994-08-29 | 2000-07-18 | Imec Vzw | Method for measuring the electrical potential in a semiconductor element |
US5550483A (en) * | 1994-11-18 | 1996-08-27 | International Business Machines | High speed test probe positioning system |
US5773824A (en) * | 1997-04-23 | 1998-06-30 | International Business Machines Corporation | Method for improving measurement accuracy using active lateral scanning control of a probe |
US5801381A (en) * | 1997-05-21 | 1998-09-01 | International Business Machines Corporation | Method for protecting a probe tip using active lateral scanning control |
DE19923462C1 (de) * | 1999-04-20 | 2000-11-16 | Physik Instr Pi Gmbh & Co | Positioniervorrichtung |
JP2003092061A (ja) * | 2001-09-17 | 2003-03-28 | Canon Inc | 電圧印加装置、電子源の製造装置及び製造方法 |
US7180662B2 (en) * | 2004-04-12 | 2007-02-20 | Applied Scientific Instrumentation Inc. | Stage assembly and method for optical microscope including Z-axis stage and piezoelectric actuator for rectilinear translation of Z stage |
US7111504B2 (en) * | 2004-09-30 | 2006-09-26 | Lucent Technologies Inc. | Atomic force microscope |
US8544324B2 (en) * | 2007-08-24 | 2013-10-01 | Pilsne Research Co., L.L.C. | Quantum tunnelling sensor device and method |
US9068952B2 (en) * | 2009-09-02 | 2015-06-30 | Kla-Tencor Corporation | Method and apparatus for producing and measuring dynamically focussed, steered, and shaped oblique laser illumination for spinning wafer inspection system |
WO2013148204A1 (en) * | 2012-03-27 | 2013-10-03 | Syed Amanulla Syed Asif | Microscope objective mechanical testing instrument |
US11506877B2 (en) | 2016-11-10 | 2022-11-22 | The Trustees Of Columbia University In The City Of New York | Imaging instrument having objective axis and light sheet or light beam projector axis intersecting at less than 90 degrees |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2715830A (en) * | 1952-07-12 | 1955-08-23 | Gen Motors Corp | Specimen for calibrating surface roughness measuring apparatus |
US4560924A (en) * | 1983-07-22 | 1985-12-24 | Magnetic Peripherals Inc. | Flatness measuring apparatus |
US4724318A (en) * | 1985-11-26 | 1988-02-09 | International Business Machines Corporation | Atomic force microscope and method for imaging surfaces with atomic resolution |
US4798989A (en) * | 1986-09-26 | 1989-01-17 | Research Development Corporation | Scanning tunneling microscope installed in electron microscope |
JPS63304103A (ja) * | 1987-06-05 | 1988-12-12 | Hitachi Ltd | 走査表面顕微鏡 |
EP0309236B1 (de) * | 1987-09-24 | 1994-07-06 | Canon Kabushiki Kaisha | Mikrosonde, deren Herstellung und elektronisches Gerät, das diese Mikrosonde gebraucht |
-
1990
- 1990-04-04 US US07/504,538 patent/US4987303A/en not_active Expired - Fee Related
- 1990-04-06 JP JP2090458A patent/JPH0348102A/ja active Pending
- 1990-04-06 DE DE69015406T patent/DE69015406T2/de not_active Expired - Fee Related
- 1990-04-06 EP EP90106621A patent/EP0391429B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69015406D1 (de) | 1995-02-09 |
US4987303A (en) | 1991-01-22 |
EP0391429A3 (de) | 1992-07-01 |
EP0391429A2 (de) | 1990-10-10 |
JPH0348102A (ja) | 1991-03-01 |
EP0391429B1 (de) | 1994-12-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |