DE69014845D1 - Verfahren und Vorrichtung zur Beschichtung von Empfängersubstraten in einer geschlossenen planetaren Anordnung. - Google Patents

Verfahren und Vorrichtung zur Beschichtung von Empfängersubstraten in einer geschlossenen planetaren Anordnung.

Info

Publication number
DE69014845D1
DE69014845D1 DE69014845T DE69014845T DE69014845D1 DE 69014845 D1 DE69014845 D1 DE 69014845D1 DE 69014845 T DE69014845 T DE 69014845T DE 69014845 T DE69014845 T DE 69014845T DE 69014845 D1 DE69014845 D1 DE 69014845D1
Authority
DE
Germany
Prior art keywords
planetary arrangement
receiver substrates
closed planetary
coating
coating receiver
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69014845T
Other languages
English (en)
Other versions
DE69014845T2 (de
Inventor
Mark Petropoulos
Stuart B Berger
John M Hammond
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Application granted granted Critical
Publication of DE69014845D1 publication Critical patent/DE69014845D1/de
Publication of DE69014845T2 publication Critical patent/DE69014845T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0221—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
    • B05B13/0242—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts the objects being individually presented to the spray heads by a rotating element, e.g. turntable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B3/00—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements
    • B05B3/02—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements with rotating elements
    • B05B3/10—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements with rotating elements discharging over substantially the whole periphery of the rotating member, i.e. the spraying being effected by centrifugal forces
    • B05B3/1064—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements with rotating elements discharging over substantially the whole periphery of the rotating member, i.e. the spraying being effected by centrifugal forces the liquid or other fluent material to be sprayed being axially supplied to the rotating member through a hollow rotating shaft
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/14—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation involving heating or cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B15/00—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67236—Apparatus for manufacturing or treating in a plurality of work-stations the substrates being processed being not semiconductor wafers, e.g. leadframes or chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B3/00—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements
    • B05B3/001—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements incorporating means for heating or cooling, e.g. the material to be sprayed

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Spray Control Apparatus (AREA)
DE69014845T 1989-12-27 1990-12-20 Verfahren und Vorrichtung zur Beschichtung von Empfängersubstraten in einer geschlossenen planetaren Anordnung. Expired - Fee Related DE69014845T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US07/457,926 US5090350A (en) 1989-12-27 1989-12-27 Method and apparatus for cleaning, coating and curing receptor substrates in an enclosed planetary array
US07/457,494 US5037676A (en) 1989-12-27 1989-12-27 Method and apparatus for cleaning, coating and curing receptor substrates in an enclosed planetary array
US07/457,958 US5079854A (en) 1989-12-27 1989-12-27 Method and apparatus for cleaning, coating and curing receptor substrates in an enclosed planetary array

Publications (2)

Publication Number Publication Date
DE69014845D1 true DE69014845D1 (de) 1995-01-19
DE69014845T2 DE69014845T2 (de) 1995-07-13

Family

ID=41718705

Family Applications (3)

Application Number Title Priority Date Filing Date
DE69014845T Expired - Fee Related DE69014845T2 (de) 1989-12-27 1990-12-20 Verfahren und Vorrichtung zur Beschichtung von Empfängersubstraten in einer geschlossenen planetaren Anordnung.
DE69011068T Expired - Fee Related DE69011068T2 (de) 1989-12-27 1990-12-20 Verfahren und Vorrichtung zur Reinigung, Beschichtung und Aushärtung von Empfängersubstraten in einer geschlossenen planetären Anordnung.
DE69026694T Expired - Fee Related DE69026694T2 (de) 1989-12-27 1990-12-20 Verfahren und Vorrichtung zur Aushärtung von Substraten in einer geschlossenen planetarischen Anordnung

Family Applications After (2)

Application Number Title Priority Date Filing Date
DE69011068T Expired - Fee Related DE69011068T2 (de) 1989-12-27 1990-12-20 Verfahren und Vorrichtung zur Reinigung, Beschichtung und Aushärtung von Empfängersubstraten in einer geschlossenen planetären Anordnung.
DE69026694T Expired - Fee Related DE69026694T2 (de) 1989-12-27 1990-12-20 Verfahren und Vorrichtung zur Aushärtung von Substraten in einer geschlossenen planetarischen Anordnung

Country Status (5)

Country Link
US (4) US5037676A (de)
EP (3) EP0435568B1 (de)
JP (3) JP2523220B2 (de)
BR (3) BR9006552A (de)
DE (3) DE69014845T2 (de)

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Also Published As

Publication number Publication date
BR9006551A (pt) 1991-10-01
EP0435568A2 (de) 1991-07-03
US5037676A (en) 1991-08-06
EP0435577B1 (de) 1994-12-07
EP0435567A2 (de) 1991-07-03
DE69014845T2 (de) 1995-07-13
EP0435577A2 (de) 1991-07-03
EP0435577A3 (en) 1992-02-05
US5090350A (en) 1992-02-25
JP2515431B2 (ja) 1996-07-10
US5248529A (en) 1993-09-28
EP0435568B1 (de) 1994-07-27
BR9006553A (pt) 1991-10-01
DE69011068T2 (de) 1995-01-26
JPH03200259A (ja) 1991-09-02
DE69026694D1 (de) 1996-05-30
DE69026694T2 (de) 1996-11-21
EP0435568A3 (en) 1992-02-26
JP2523220B2 (ja) 1996-08-07
US5079854A (en) 1992-01-14
EP0435567B1 (de) 1996-04-24
JP2523221B2 (ja) 1996-08-07
EP0435567A3 (en) 1992-01-22
JPH03271747A (ja) 1991-12-03
JPH03212647A (ja) 1991-09-18
BR9006552A (pt) 1991-10-01
DE69011068D1 (de) 1994-09-01

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