DE69012850D1 - Steueranordnung zum Läppen von magnetischen Wandlern. - Google Patents

Steueranordnung zum Läppen von magnetischen Wandlern.

Info

Publication number
DE69012850D1
DE69012850D1 DE69012850T DE69012850T DE69012850D1 DE 69012850 D1 DE69012850 D1 DE 69012850D1 DE 69012850 T DE69012850 T DE 69012850T DE 69012850 T DE69012850 T DE 69012850T DE 69012850 D1 DE69012850 D1 DE 69012850D1
Authority
DE
Germany
Prior art keywords
control arrangement
magnetic transducers
lapping magnetic
lapping
transducers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69012850T
Other languages
English (en)
Other versions
DE69012850T2 (de
Inventor
Mike Yu-Chieh Chang
Mark Anthony Church
Michael Paul Salo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE69012850D1 publication Critical patent/DE69012850D1/de
Application granted granted Critical
Publication of DE69012850T2 publication Critical patent/DE69012850T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/013—Devices or means for detecting lapping completion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/048—Lapping machines or devices; Accessories designed for working plane surfaces of sliders and magnetic heads of hard disc drives or the like
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G11B5/3166—Testing or indicating in relation thereto, e.g. before the fabrication is completed
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/455—Arrangements for functional testing of heads; Measuring arrangements for heads

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Heads (AREA)
DE69012850T 1989-02-13 1990-02-07 Steueranordnung zum Läppen von magnetischen Wandlern. Expired - Lifetime DE69012850T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/310,410 US4912883A (en) 1989-02-13 1989-02-13 Lapping control system for magnetic transducers

Publications (2)

Publication Number Publication Date
DE69012850D1 true DE69012850D1 (de) 1994-11-03
DE69012850T2 DE69012850T2 (de) 1995-03-30

Family

ID=23202372

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69012850T Expired - Lifetime DE69012850T2 (de) 1989-02-13 1990-02-07 Steueranordnung zum Läppen von magnetischen Wandlern.

Country Status (4)

Country Link
US (1) US4912883A (de)
EP (1) EP0383738B1 (de)
JP (1) JPH0619814B2 (de)
DE (1) DE69012850T2 (de)

Families Citing this family (54)

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US5214589A (en) * 1991-03-22 1993-05-25 Read-Rite Corp. Throat height control during lapping of magnetic heads
US5203119A (en) * 1991-03-22 1993-04-20 Read-Rite Corporation Automated system for lapping air bearing surface of magnetic heads
US5217819A (en) * 1991-05-08 1993-06-08 U.S. Philips Corporation Method of manufacturing a thin-film magnetic head and magnetic head
US5266769A (en) * 1992-02-25 1993-11-30 International Business Machines Corporation Process for independent control of crown and camber for magnetic head slider
US5265378A (en) * 1992-07-10 1993-11-30 Lsi Logic Corporation Detecting the endpoint of chem-mech polishing and resulting semiconductor device
US5361547A (en) * 1992-08-28 1994-11-08 International Business Machines Corporation Ultimate inductive head integrated lapping system
US5386666A (en) * 1993-02-11 1995-02-07 Read-Rite Corporation Automated system for controlling taper length during the lapping of air bearing surface of magnetic heads
US5643060A (en) * 1993-08-25 1997-07-01 Micron Technology, Inc. System for real-time control of semiconductor wafer polishing including heater
US5658183A (en) * 1993-08-25 1997-08-19 Micron Technology, Inc. System for real-time control of semiconductor wafer polishing including optical monitoring
US5486129A (en) * 1993-08-25 1996-01-23 Micron Technology, Inc. System and method for real-time control of semiconductor a wafer polishing, and a polishing head
US5700180A (en) 1993-08-25 1997-12-23 Micron Technology, Inc. System for real-time control of semiconductor wafer polishing
JP3311116B2 (ja) * 1993-10-28 2002-08-05 株式会社東芝 半導体製造装置
US5406694A (en) * 1993-11-24 1995-04-18 Rocky Mountain Magnetics, Inc. Scalable method of fabricating thin-film sliders
JP2846235B2 (ja) * 1994-02-17 1999-01-13 ティーディーケイ株式会社 ヘッドピース集合体加工用治具及び薄膜磁気ヘッドの製造方法
EP0687525A1 (de) 1994-06-13 1995-12-20 Read-Rite Corporation Lappsystem zur automatisierten Oberflächenformgebung
US5603156A (en) * 1994-12-16 1997-02-18 International Business Machines Corporation Lapping process for minimizing shorts and element recession at magnetic head air bearing surface
US5735036A (en) * 1994-12-16 1998-04-07 International Business Machines Corporation Lapping process for minimizing shorts and element recession at magnetic head air bearing surface
US5749769A (en) * 1994-12-16 1998-05-12 International Business Machines Corporation Lapping process using micro-advancement for optimizing flatness of a magnetic head air bearing surface
US5620356A (en) * 1995-01-27 1997-04-15 Lackey; Stanley Row tool balance and bow correction apparatus
IL113829A (en) 1995-05-23 2000-12-06 Nova Measuring Instr Ltd Apparatus for optical inspection of wafers during polishing
US20070123151A1 (en) * 1995-05-23 2007-05-31 Nova Measuring Instruments Ltd Apparatus for optical inspection of wafers during polishing
US7169015B2 (en) * 1995-05-23 2007-01-30 Nova Measuring Instruments Ltd. Apparatus for optical inspection of wafers during processing
US5632669A (en) * 1995-05-26 1997-05-27 Censtor Corporation Interactive method for lapping transducers
US5772493A (en) * 1995-07-31 1998-06-30 Read-Rite Corporation Method and apparatus for controlling the lapping of magnetic heads
DE69626801D1 (de) * 1995-12-27 2003-04-24 Koninkl Philips Electronics Nv Herstellungsverfahren eines dünnfilmmagnetkopfes und mit diesem verfahren hergestellter magnetkopf
US5722155A (en) * 1996-01-11 1998-03-03 Seagate Technology, Inc. Machining guide method for magnetic recording reproduce heads
US6047224A (en) * 1996-04-10 2000-04-04 Seagate Techology, Inc. Machining guide for magnetic recording reproduce heads
US5755612A (en) * 1996-10-28 1998-05-26 Seagate Technology, Inc. Small foot machining guide for recording heads
GB2333055B (en) * 1996-10-29 2001-05-02 Seagate Technology Improved ELG wiring configuration
US5951371A (en) * 1996-11-04 1999-09-14 Seagate Technology, Inc. Multi-point bending of bars during fabrication of magnetic recording heads
WO1998019828A1 (en) * 1996-11-04 1998-05-14 Seagate Technology, Inc. Multi-point bending of bars during fabrication of magnetic recording heads
USRE38340E1 (en) * 1996-11-04 2003-12-02 Seagate Technology Llc Multi-point bending of bars during fabrication of magnetic recording heads
US6475064B2 (en) 1996-12-13 2002-11-05 Seagate Technology Llc Multipoint bending apparatus for lapping heads of a data storage device
US6287170B1 (en) * 1996-12-13 2001-09-11 Seagate Technology Llc Multipoint bending apparatus for lapping heads of a data storage device
US5991698A (en) * 1997-01-29 1999-11-23 Seagate Technology, Inc. Electrical lap guide data acquisition unit and measurement scheme
JP3403605B2 (ja) * 1997-04-08 2003-05-06 富士通株式会社 部材接着方法及び部材接着装置
JPH10289413A (ja) * 1997-04-10 1998-10-27 Fujitsu Ltd 磁気ヘッドの製造方法
US5967878A (en) * 1997-04-25 1999-10-19 International Business Machines Corporation Lapping method and system for compensating for substrate bow
US6027397A (en) * 1997-04-25 2000-02-22 International Business Machines Corporation Dual element lapping guide system
US5876264A (en) * 1997-04-25 1999-03-02 International Business Machines Corporation Deposition process windage calibration
US5997381A (en) * 1997-09-29 1999-12-07 Storage Technology Corporation Lapping sensor for thin film recording elements and method for manufacturing same
US6045431A (en) * 1997-12-23 2000-04-04 Speedfam Corporation Manufacture of thin-film magnetic heads
US6321440B1 (en) * 1998-11-10 2001-11-27 International Business Machines Corporation Method for adjusting curvature of magnetic read/write head sliders
US6428715B1 (en) 1998-12-22 2002-08-06 International Business Machines Corporation Method for producing sliders
US6663817B1 (en) 1999-03-26 2003-12-16 Hitachi Global Storage Technologies Netherlands, B.V. Method for manufacture of sliders
US6364743B1 (en) * 1999-06-11 2002-04-02 Seagate Technology Llc Composite lapping monitor resistor
JP3469522B2 (ja) * 2000-01-13 2003-11-25 Ｔｄｋ株式会社 薄膜磁気ヘッド用素材加工装置および方法
US6483298B2 (en) 2000-06-02 2002-11-19 Seagate Technology Llc Test simulation of a read/write head
US6710295B1 (en) * 2000-06-15 2004-03-23 Hitachi Global Storage Technologies Netherlands, B.V. Slider curvature modification by substrate melting effect produced with a pulsed laser beam
US6633459B2 (en) 2000-06-20 2003-10-14 Seagate Technology Llc Functional recording-head on-slider lap monitor
JP2002260203A (ja) * 2001-03-02 2002-09-13 Tdk Corp 薄膜磁気ヘッドの製造方法、及びウエハ構造
US6857937B2 (en) * 2002-05-30 2005-02-22 Komag, Inc. Lapping a head while powered up to eliminate expansion of the head due to heating
US6758722B2 (en) * 2002-07-12 2004-07-06 Sae Magentics, (H.K.) Ltd. Dual-purpose lapping guide for the production of magneto-resistive heads
US7108578B2 (en) * 2004-11-12 2006-09-19 Hitachi Global Storage Technologies Netherlands B.V. System and method for manufacturing magnetic heads

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5229607B2 (de) * 1972-01-01 1977-08-03
US3821815A (en) * 1972-10-11 1974-06-28 Ibm Apparatus for batch fabricating magnetic film heads and method therefor
SU717722A1 (ru) * 1974-03-22 1980-02-25 Предприятие П/Я Г-4129 Устройство дл управлени электроприводом шлифовально-полировального станка
DE3112991C2 (de) * 1981-04-01 1985-12-12 Hoesch Ag, 4600 Dortmund Rundschleifmaschine zum kontrollierten Abschleifen von Rissen an Walzen
JPS58186559A (ja) * 1982-04-24 1983-10-31 Sumitomo Special Metals Co Ltd 精密寸法測定装置
US4511942A (en) * 1982-05-07 1985-04-16 Computer & Communications Technology Corp. Automatic throat height control for film heads
US4477968A (en) * 1982-09-30 1984-10-23 Magnetic Peripherals Inc. Method for using a machining sensor
US4559743A (en) * 1982-09-30 1985-12-24 Magnetic Peripherals, Inc. Method for calibrating a machining sensor
JPS61214953A (ja) * 1985-03-15 1986-09-24 Dai Showa Seiki Kk 工具とワ−クの接触検知装置
FR2582956B1 (fr) * 1985-06-10 1987-07-31 Lorraine Carbone Support de membrane minerale pour techniques separatives et procedes de fabrication de ce support
US4689877A (en) * 1985-08-29 1987-09-01 International Business Machines Corp. Method and apparatus for controlling the throat height of batch fabricated thin film magnetic transducers

Also Published As

Publication number Publication date
EP0383738A1 (de) 1990-08-22
EP0383738B1 (de) 1994-09-28
JPH02240813A (ja) 1990-09-25
DE69012850T2 (de) 1995-03-30
JPH0619814B2 (ja) 1994-03-16
US4912883A (en) 1990-04-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8330 Complete renunciation