DE69008654T2 - Linearmotor sowie mit mindestens einem Linearmotor versehene Positionierungsvorrichtung. - Google Patents

Linearmotor sowie mit mindestens einem Linearmotor versehene Positionierungsvorrichtung.

Info

Publication number
DE69008654T2
DE69008654T2 DE69008654T DE69008654T DE69008654T2 DE 69008654 T2 DE69008654 T2 DE 69008654T2 DE 69008654 T DE69008654 T DE 69008654T DE 69008654 T DE69008654 T DE 69008654T DE 69008654 T2 DE69008654 T2 DE 69008654T2
Authority
DE
Germany
Prior art keywords
linear motor
positioning device
device provided
linear
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69008654T
Other languages
English (en)
Other versions
DE69008654D1 (de
Inventor
Engelen Gerard Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML Netherlands BV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of DE69008654D1 publication Critical patent/DE69008654D1/de
Publication of DE69008654T2 publication Critical patent/DE69008654T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)
  • Iron Core Of Rotating Electric Machines (AREA)
DE69008654T 1989-10-05 1990-10-01 Linearmotor sowie mit mindestens einem Linearmotor versehene Positionierungsvorrichtung. Expired - Fee Related DE69008654T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8902473A NL8902473A (nl) 1989-10-05 1989-10-05 Lineaire motor, alsmede positioneerinrichting voorzien van ten minste een lineaire motor.

Publications (2)

Publication Number Publication Date
DE69008654D1 DE69008654D1 (de) 1994-06-09
DE69008654T2 true DE69008654T2 (de) 1994-10-27

Family

ID=19855401

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69008654T Expired - Fee Related DE69008654T2 (de) 1989-10-05 1990-10-01 Linearmotor sowie mit mindestens einem Linearmotor versehene Positionierungsvorrichtung.

Country Status (7)

Country Link
US (1) US5179305A (de)
EP (1) EP0421529B1 (de)
JP (1) JP2960768B2 (de)
KR (1) KR100205487B1 (de)
DE (1) DE69008654T2 (de)
NL (1) NL8902473A (de)
RU (1) RU2037944C1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2716884B2 (ja) * 1991-07-12 1998-02-18 住友重機械工業株式会社 平面モータ装置
DE4436865A1 (de) * 1994-10-17 1996-08-08 Pasim Mikrosystemtechnik Gmbh Modularer Planarläufer und Verfahren zu seiner Herstellung
US5777402A (en) * 1996-06-24 1998-07-07 Anorad Corporation Two-axis motor with high density magnetic platen
JPH09322518A (ja) * 1996-05-28 1997-12-12 Mitsubishi Electric Corp 永久磁石使用同期形リニアモータ
US6003230A (en) * 1997-10-03 1999-12-21 Massachusetts Institute Of Technology Magnetic positioner having a single moving part
US6097114A (en) * 1998-08-17 2000-08-01 Nikon Corporation Compact planar motor having multiple degrees of freedom
US6445093B1 (en) 2000-06-26 2002-09-03 Nikon Corporation Planar motor with linear coil arrays
US6452292B1 (en) 2000-06-26 2002-09-17 Nikon Corporation Planar motor with linear coil arrays
US20040155534A1 (en) * 2003-02-07 2004-08-12 Engwall Mats Anders Structure integrating gas support bearing and a planar electromagnetic drive and levitation system
US7902703B2 (en) * 2004-07-21 2011-03-08 Ucer Mustafa O Apparatus and method for producing mechanical work
US7564153B2 (en) * 2004-07-21 2009-07-21 Ucer Mustafa O Apparatus and method for producing mechanical work
KR102266562B1 (ko) * 2019-08-22 2021-06-18 알엠에스테크놀러지(주) 차폐식 영구자석 어레이를 이용한 수평형 가진기

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3456136A (en) * 1966-09-26 1969-07-15 North American Rockwell Linear electric motor
US3787716A (en) * 1972-02-16 1974-01-22 Aerospace Corp Linear pulsed d.c. motor and controls therefor
CS207821B1 (en) * 1978-03-11 1981-08-31 Josef Senk Appliance for transport of the weft insertors,mainly for the multished looms
DE2916584A1 (de) * 1979-04-24 1980-11-27 Batyrev Linearer gleichstrommotor
US4870306A (en) * 1981-10-08 1989-09-26 Polaroid Corporation Method and apparatus for precisely moving a motor armature
JPS58173843A (ja) * 1982-04-07 1983-10-12 Telmec Co Ltd 平面駆動装置
US4456934A (en) * 1982-05-10 1984-06-26 Kollmorgen Technologies Corporation Linear positioning system
US4485339A (en) * 1983-06-10 1984-11-27 The Perkin-Elmer Corporation Electro-magnetic alignment device
US4506204A (en) * 1983-06-10 1985-03-19 The Perkin-Elmer Corporation Electro-magnetic apparatus
US4509002A (en) * 1983-12-20 1985-04-02 International Business Machines Corporation Precision X-Y positioner
JPS61161952A (ja) * 1985-01-09 1986-07-22 Yaskawa Electric Mfg Co Ltd ３相リニア誘導子形モ−タ
US4654571A (en) * 1985-09-16 1987-03-31 Hinds Walter E Single plane orthogonally movable drive system
NL8601095A (nl) * 1986-04-29 1987-11-16 Philips Nv Positioneerinrichting.
US4908533A (en) * 1988-01-15 1990-03-13 Shinko Electric Co., Ltd. Transporting apparatus

Also Published As

Publication number Publication date
NL8902473A (nl) 1991-05-01
EP0421529A1 (de) 1991-04-10
EP0421529B1 (de) 1994-05-04
US5179305A (en) 1993-01-12
JP2960768B2 (ja) 1999-10-12
JPH03135360A (ja) 1991-06-10
KR910008917A (ko) 1991-05-31
KR100205487B1 (ko) 1999-07-01
DE69008654D1 (de) 1994-06-09
RU2037944C1 (ru) 1995-06-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PHILIPS ELECTRONICS N.V., EINDHOVEN, NL

8327 Change in the person/name/address of the patent owner

Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, N

8320 Willingness to grant licences declared (paragraph 23)
8327 Change in the person/name/address of the patent owner

Owner name: ASML NETHERLANDS B.V., VELDHOVEN, NL

8328 Change in the person/name/address of the agent

Representative=s name: WUESTHOFF & WUESTHOFF PATENT- UND RECHTSANWAELTE, 8

8339 Ceased/non-payment of the annual fee