DE68928288T2 - Belichtungssystem - Google Patents

Belichtungssystem

Info

Publication number
DE68928288T2
DE68928288T2 DE1989628288 DE68928288T DE68928288T2 DE 68928288 T2 DE68928288 T2 DE 68928288T2 DE 1989628288 DE1989628288 DE 1989628288 DE 68928288 T DE68928288 T DE 68928288T DE 68928288 T2 DE68928288 T2 DE 68928288T2
Authority
DE
Germany
Prior art keywords
exposure system
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1989628288
Other languages
English (en)
Other versions
DE68928288D1 (de
Inventor
Eigo Kawakami
Minoru Yoshii
Shunichi Uzawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE68928288D1 publication Critical patent/DE68928288D1/de
Application granted granted Critical
Publication of DE68928288T2 publication Critical patent/DE68928288T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
DE1989628288 1988-05-10 1989-05-09 Belichtungssystem Expired - Fee Related DE68928288T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63111457A JP2799570B2 (ja) 1988-05-10 1988-05-10 露光装置

Publications (2)

Publication Number Publication Date
DE68928288D1 DE68928288D1 (de) 1997-10-09
DE68928288T2 true DE68928288T2 (de) 1998-01-22

Family

ID=14561716

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1989628288 Expired - Fee Related DE68928288T2 (de) 1988-05-10 1989-05-09 Belichtungssystem

Country Status (3)

Country Link
EP (1) EP0341983B1 (de)
JP (1) JP2799570B2 (de)
DE (1) DE68928288T2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69128207T2 (de) * 1990-03-13 1998-04-16 Canon Kk Belichtungsanordnung mittels Synchrotronstrahlung
US5195113A (en) * 1990-09-28 1993-03-16 Kabushiki Kaisha Toshiba X-ray exposure apparatus and method of positioning the same

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1037606B (it) * 1974-06-06 1979-11-20 Ibm Apparecchiatura ottica perfezionata utile per la fabbricazione di circuiti integrati
JPS5818922A (ja) * 1981-07-27 1983-02-03 Toshiba Corp 半導体装置
JPS61276222A (ja) * 1985-05-30 1986-12-06 Nec Corp Ｘ線露光アライメント方法
US4724466A (en) * 1986-01-17 1988-02-09 Matsushita Electric Industrial Co., Ltd. Exposure apparatus

Also Published As

Publication number Publication date
JP2799570B2 (ja) 1998-09-17
EP0341983A3 (de) 1990-06-13
DE68928288D1 (de) 1997-10-09
JPH01282817A (ja) 1989-11-14
EP0341983B1 (de) 1997-09-03
EP0341983A2 (de) 1989-11-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee