DE68927315D1 - Schutzlack-Zusammensetzung - Google Patents

Schutzlack-Zusammensetzung

Info

Publication number
DE68927315D1
DE68927315D1 DE68927315T DE68927315T DE68927315D1 DE 68927315 D1 DE68927315 D1 DE 68927315D1 DE 68927315 T DE68927315 T DE 68927315T DE 68927315 T DE68927315 T DE 68927315T DE 68927315 D1 DE68927315 D1 DE 68927315D1
Authority
DE
Germany
Prior art keywords
protective lacquer
lacquer composition
composition
protective
lacquer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68927315T
Other languages
English (en)
Other versions
DE68927315T2 (de
Inventor
Yasunori Uetani
Makoto Hanabata
Hirotoshi Nakanishi
Koji Kuwana
Fumio Oi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Chemical Co Ltd
Original Assignee
Sumitomo Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Chemical Co Ltd filed Critical Sumitomo Chemical Co Ltd
Publication of DE68927315D1 publication Critical patent/DE68927315D1/de
Application granted granted Critical
Publication of DE68927315T2 publication Critical patent/DE68927315T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C1/00—Photosensitive materials
    • G03C1/72—Photosensitive compositions not covered by the groups G03C1/005 - G03C1/705
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/0226—Quinonediazides characterised by the non-macromolecular additives

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Phenolic Resins Or Amino Resins (AREA)
DE68927315T 1988-07-20 1989-07-20 Schutzlack-Zusammensetzung Expired - Fee Related DE68927315T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63182434A JP2636348B2 (ja) 1988-07-20 1988-07-20 ポジ型レジスト用組成物

Publications (2)

Publication Number Publication Date
DE68927315D1 true DE68927315D1 (de) 1996-11-14
DE68927315T2 DE68927315T2 (de) 1997-02-20

Family

ID=16118201

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68927315T Expired - Fee Related DE68927315T2 (de) 1988-07-20 1989-07-20 Schutzlack-Zusammensetzung

Country Status (6)

Country Link
US (1) US5124228A (de)
EP (1) EP0351849B1 (de)
JP (1) JP2636348B2 (de)
KR (1) KR0131761B1 (de)
CA (1) CA1337627C (de)
DE (1) DE68927315T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2715480B2 (ja) * 1988-10-13 1998-02-18 住友化学工業株式会社 ポジ型レジスト用組成物
JP2700918B2 (ja) * 1989-04-26 1998-01-21 富士写真フイルム株式会社 ポジ型フオトレジスト組成物
US5322757A (en) * 1989-09-08 1994-06-21 Ocg Microelectronic Materials, Inc. Positive photoresists comprising a novolak resin made from 2,3-dimethyl phenol,2,3,5-trimethylphenol and aldehyde with no meta-cresol present
EP0525185B1 (de) * 1991-01-11 1997-07-16 Sumitomo Chemical Company Limited Positivresistzusammensetzung
DE4209343A1 (de) * 1992-03-23 1993-09-30 Hoechst Ag 1,2-Naphthochinon-2-diazid-sulfonsäureester, damit hergestelltes strahlungsempfindliches Gemisch und strahlungsempfindliches Aufzeichnungsmaterial
US6280910B1 (en) 1992-11-23 2001-08-28 Pioneer Electronic Corporation Photoresist for optical disc and method of preparing optical disc utilizing photoresist
US5592143A (en) * 1994-07-25 1997-01-07 Romney; Julie B. Pulsed-tone timing exercise method
EP0695740B1 (de) 1994-08-05 2000-11-22 Sumitomo Chemical Company Limited Sulfonsäurechinondiazidester und diese enthaltende positiv-arbeitende Fotolackzusammensetzungen
KR100354730B1 (ko) * 1994-09-12 2003-10-17 지멘스 악티엔게젤샤프트 구조를형성하는포토리소그래피방법
EP0797792B1 (de) * 1994-09-12 1998-11-18 Siemens Aktiengesellschaft Photolithographische strukturerzeugung
US5619663A (en) * 1994-09-16 1997-04-08 Philips Electronics North America Corp. Computer instruction prefetch system
KR20060090519A (ko) * 2005-02-07 2006-08-11 삼성전자주식회사 포토레지스트 조성물, 상기 포토레지스트 조성물을 이용한층상 부재 형성 방법 및 박막 트랜지스터 표시판의 제조방법

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3100077A1 (de) * 1981-01-03 1982-08-05 Hoechst Ag, 6000 Frankfurt Lichtempfindliches gemisch, das einen naphthochinondiazidsulfonsaeureester enthaelt, und verfahren zur herstellung des naphthochinondiazidsulfonsaeureesters
JPS58150948A (ja) * 1982-03-03 1983-09-07 Dainippon Ink & Chem Inc 感光性組成物
US4526856A (en) * 1983-05-23 1985-07-02 Allied Corporation Low striation positive diazoketone resist composition with cyclic ketone(s) and aliphatic alcohol as solvents
JPS60121445A (ja) * 1983-12-06 1985-06-28 Japan Synthetic Rubber Co Ltd 集積回路作製用ポジ型感光性樹脂組成物
US4626492A (en) * 1985-06-04 1986-12-02 Olin Hunt Specialty Products, Inc. Positive-working o-quinone diazide photoresist composition containing a dye and a trihydroxybenzophenone compound
JPH0654381B2 (ja) * 1985-12-24 1994-07-20 日本合成ゴム株式会社 集積回路作製用ポジ型レジスト
JPS62153950A (ja) * 1985-12-27 1987-07-08 Japan Synthetic Rubber Co Ltd ポジ型感放射線性樹脂組成物
JP2568827B2 (ja) * 1986-10-29 1997-01-08 富士写真フイルム株式会社 ポジ型フオトレジスト組成物
JP2590342B2 (ja) * 1986-11-08 1997-03-12 住友化学工業株式会社 ポジ型フォトレジスト用ノボラック樹脂及びそれを含有するポジ型フォトレジスト組成物
JP2558716B2 (ja) * 1987-07-10 1996-11-27 東洋合成工業株式会社 ポジ型ホトレジスト組成物
US4837121A (en) * 1987-11-23 1989-06-06 Olin Hunt Specialty Products Inc. Thermally stable light-sensitive compositions with o-quinone diazide and phenolic resin
JP2569650B2 (ja) * 1987-12-15 1997-01-08 日本合成ゴム株式会社 感放射線性樹脂組成物

Also Published As

Publication number Publication date
JP2636348B2 (ja) 1997-07-30
KR0131761B1 (ko) 1998-04-13
US5124228A (en) 1992-06-23
JPH0232352A (ja) 1990-02-02
EP0351849A2 (de) 1990-01-24
EP0351849A3 (de) 1991-04-03
KR900002125A (ko) 1990-02-28
EP0351849B1 (de) 1996-10-09
DE68927315T2 (de) 1997-02-20
CA1337627C (en) 1995-11-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee