DE68927037D1 - Verfahren und Vorrichtung zur Erzeugung von Plasma - Google Patents

Verfahren und Vorrichtung zur Erzeugung von Plasma

Info

Publication number
DE68927037D1
DE68927037D1 DE68927037T DE68927037T DE68927037D1 DE 68927037 D1 DE68927037 D1 DE 68927037D1 DE 68927037 T DE68927037 T DE 68927037T DE 68927037 T DE68927037 T DE 68927037T DE 68927037 D1 DE68927037 D1 DE 68927037D1
Authority
DE
Germany
Prior art keywords
generating plasma
plasma
generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE68927037T
Other languages
English (en)
Inventor
Daniel Richard Marantz
Herbert Herman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of DE68927037D1 publication Critical patent/DE68927037D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/44—Plasma torches using an arc using more than one torch
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/42—Plasma torches using an arc with provisions for introducing materials into the plasma, e.g. powder, liquid

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Nozzles (AREA)
DE68927037T 1988-11-04 1989-11-01 Verfahren und Vorrichtung zur Erzeugung von Plasma Expired - Lifetime DE68927037D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/267,145 US4982067A (en) 1988-11-04 1988-11-04 Plasma generating apparatus and method

Publications (1)

Publication Number Publication Date
DE68927037D1 true DE68927037D1 (de) 1996-10-02

Family

ID=23017511

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68927037T Expired - Lifetime DE68927037D1 (de) 1988-11-04 1989-11-01 Verfahren und Vorrichtung zur Erzeugung von Plasma

Country Status (5)

Country Link
US (1) US4982067A (de)
EP (1) EP0368547B1 (de)
JP (1) JPH07107876B2 (de)
CA (1) CA1326886C (de)
DE (1) DE68927037D1 (de)

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US6962025B1 (en) 2001-05-29 2005-11-08 H.B. Fuller Licensing & Financing, Inc. Metal plasma surface-modified thermal barrier channel
DE10140298B4 (de) * 2001-08-16 2005-02-24 Mtu Aero Engines Gmbh Verfahren zum Plasmaschweißen
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DE10323014B4 (de) * 2003-04-23 2007-11-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Düse für Plasmabrenner
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JP4449645B2 (ja) * 2004-08-18 2010-04-14 島津工業有限会社 プラズマ溶射装置
FR2877015B1 (fr) * 2004-10-21 2007-10-26 Commissariat Energie Atomique Revetement nanostructure et procede de revetement.
JP4604153B2 (ja) * 2005-02-18 2010-12-22 国立大学法人東京海洋大学 防食性に優れた機能性被覆の形成法
EP1880034B1 (de) * 2005-05-02 2016-11-02 National Research Council Of Canada Verfahren und vorrichtung zur zufuhr einer feine teilchen enthaltenden flüssigen suspension für ein system zum thermischen spritzen und daraus gebildete beschichtungen
CA2581806C (en) * 2006-03-08 2012-06-26 Tekna Plasma Systems Inc. Plasma synthesis of nanopowders
FR2900351B1 (fr) * 2006-04-26 2008-06-13 Commissariat Energie Atomique Procede de preparation d'une couche nanoporeuse de nanoparticules et couche ainsi obtenue
DE102006044906A1 (de) * 2006-09-22 2008-04-17 Thermico Gmbh & Co. Kg Plasmabrenner
US7671294B2 (en) * 2006-11-28 2010-03-02 Vladimir Belashchenko Plasma apparatus and system
DE102007010996A1 (de) * 2007-03-05 2008-09-11 Arcoron Gmbh Plasmadüse
US7411353B1 (en) * 2007-05-11 2008-08-12 Rutberg Alexander P Alternating current multi-phase plasma gas generator with annular electrodes
DE102007041329B4 (de) 2007-08-31 2016-06-30 Thermico Gmbh & Co. Kg Plasmabrenner mit axialer Pulvereindüsung
US8590804B2 (en) * 2007-10-24 2013-11-26 Sulzer Metco (Us) Inc. Two stage kinetic energy spray device
US7836843B2 (en) * 2007-10-24 2010-11-23 Sulzer Metco (Us), Inc. Apparatus and method of improving mixing of axial injection in thermal spray guns
US8849585B2 (en) * 2008-06-26 2014-09-30 Lam Research Corporation Methods for automatically characterizing a plasma
US8780522B2 (en) * 2008-07-07 2014-07-15 Lam Research Corporation Capacitively-coupled electrostatic (CCE) probe arrangement for detecting dechucking in a plasma processing chamber and methods thereof
US8179152B2 (en) * 2008-07-07 2012-05-15 Lam Research Corporation Passive capacitively-coupled electrostatic (CCE) probe arrangement for detecting plasma instabilities in a plasma processing chamber
WO2010005929A2 (en) 2008-07-07 2010-01-14 Lam Research Corporation Passive capacitively-coupled electrostatic (cce) probe arrangement for detecting in-situ arcing events in a plasma processing chamber
TWI467623B (zh) 2008-07-07 2015-01-01 Lam Res Corp 於電漿處理系統之處理腔室內識別一穩定電漿的方法及裝置、及其電腦可讀儲存媒體
WO2010005932A2 (en) * 2008-07-07 2010-01-14 Lam Research Corporation Plasma-facing probe arrangement including vacuum gap for use in a plasma processing chamber
CN102084472B (zh) * 2008-07-07 2013-07-03 朗姆研究公司 用于表征等离子体处理室内的膜的射频偏置电容耦合静电(rfb-cce)探针装置
US9997325B2 (en) * 2008-07-17 2018-06-12 Verity Instruments, Inc. Electron beam exciter for use in chemical analysis in processing systems
US20100175926A1 (en) * 2009-01-15 2010-07-15 Baker Hughes Incorporated Roller cones having non-integral cutting structures, drill bits including such cones, and methods of forming same
JP5414571B2 (ja) * 2010-02-27 2014-02-12 日鐵住金溶接工業株式会社 移行式プラズマトーチ組体，プラズマ溶接装置およびプラズマ溶接方法
US8492979B2 (en) * 2010-03-25 2013-07-23 General Electric Company Plasma generation apparatus
TW202418889A (zh) * 2011-10-05 2024-05-01 美商應用材料股份有限公司 包括對稱電漿處理腔室的電漿處理設備與用於此設備的蓋組件
US11432393B2 (en) 2013-11-13 2022-08-30 Hypertherm, Inc. Cost effective cartridge for a plasma arc torch
US9981335B2 (en) 2013-11-13 2018-05-29 Hypertherm, Inc. Consumable cartridge for a plasma arc cutting system
US11684995B2 (en) 2013-11-13 2023-06-27 Hypertherm, Inc. Cost effective cartridge for a plasma arc torch
US10456855B2 (en) 2013-11-13 2019-10-29 Hypertherm, Inc. Consumable cartridge for a plasma arc cutting system
US11278983B2 (en) 2013-11-13 2022-03-22 Hypertherm, Inc. Consumable cartridge for a plasma arc cutting system
EP3958654A1 (de) 2014-08-12 2022-02-23 Hypertherm, Inc. Kostengünstige kartusche für einen plasmalichtbogenbrenner
RU2018107295A (ru) 2015-08-04 2019-09-05 Гипертерм, Инк. Картридж для плазменной горелки с жидкостным охлаждением
CN109175639A (zh) * 2018-10-30 2019-01-11 首都航天机械有限公司 一种同轴送丝双等离子弧增材制造装置
CN109041396A (zh) * 2018-10-30 2018-12-18 广东省新材料研究所 一种双阴极轴向送料等离子喷枪
US11654483B2 (en) * 2020-04-07 2023-05-23 General Electric Company Method for forming high quality powder for an additive manufacturing process

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USRE32908E (en) * 1984-09-27 1989-04-18 Regents Of The University Of Minnesota Method of utilizing a plasma column
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Also Published As

Publication number Publication date
JPH07107876B2 (ja) 1995-11-15
JPH02236999A (ja) 1990-09-19
EP0368547B1 (de) 1996-08-28
US4982067A (en) 1991-01-01
CA1326886C (en) 1994-02-08
EP0368547A1 (de) 1990-05-16

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Legal Events

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8332 No legal effect for de