DE69609191T2 - Vierdüsen-plasmaerzeugungsvorrichtung zur erzeugung eines aktivierter strahles - Google Patents

Vierdüsen-plasmaerzeugungsvorrichtung zur erzeugung eines aktivierter strahles

Info

Publication number
DE69609191T2
DE69609191T2 DE69609191T DE69609191T DE69609191T2 DE 69609191 T2 DE69609191 T2 DE 69609191T2 DE 69609191 T DE69609191 T DE 69609191T DE 69609191 T DE69609191 T DE 69609191T DE 69609191 T2 DE69609191 T2 DE 69609191T2
Authority
DE
Germany
Prior art keywords
generating
production device
plasma production
nozzle plasma
activated jet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69609191T
Other languages
English (en)
Other versions
DE69609191D1 (de
Inventor
Pavel Koulik
Evgenia Zorina
Stanislav Begounov
Vladimir Enguelcht
Rudolph Konavko
Anatolii Saitshenko
Mikhail Samsonov
Ioulia Tsvetkova
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tepla Ag 85551 Kirchheim De
Original Assignee
IST Instant Surface Tech SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IST Instant Surface Tech SA filed Critical IST Instant Surface Tech SA
Application granted granted Critical
Publication of DE69609191D1 publication Critical patent/DE69609191D1/de
Publication of DE69609191T2 publication Critical patent/DE69609191T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/44—Plasma torches using an arc using more than one torch

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Nozzles (AREA)
  • Water Treatment By Electricity Or Magnetism (AREA)
DE69609191T 1995-11-13 1996-11-12 Vierdüsen-plasmaerzeugungsvorrichtung zur erzeugung eines aktivierter strahles Expired - Fee Related DE69609191T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH320895 1995-11-13
PCT/CH1996/000401 WO1997018692A1 (fr) 1995-11-13 1996-11-12 Generateur de plasma a quatre buses pour la formation d'un jet active

Publications (2)

Publication Number Publication Date
DE69609191D1 DE69609191D1 (de) 2000-08-10
DE69609191T2 true DE69609191T2 (de) 2001-03-22

Family

ID=4251004

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69609191T Expired - Fee Related DE69609191T2 (de) 1995-11-13 1996-11-12 Vierdüsen-plasmaerzeugungsvorrichtung zur erzeugung eines aktivierter strahles

Country Status (5)

Country Link
US (1) US6278241B1 (de)
EP (1) EP0861575B1 (de)
DE (1) DE69609191T2 (de)
ES (1) ES2150693T3 (de)
WO (1) WO1997018692A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009045200A1 (de) * 2009-09-30 2011-04-21 Inter-Consult Gmbh Verfahren und Vorrichtung zum Bearbeiten von Bauteilen elektrischer Maschinen

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6287687B1 (en) 1998-05-08 2001-09-11 Asten, Inc. Structures and components thereof having a desired surface characteristic together with methods and apparatuses for producing the same
US6146462A (en) * 1998-05-08 2000-11-14 Astenjohnson, Inc. Structures and components thereof having a desired surface characteristic together with methods and apparatuses for producing the same
CN1265684C (zh) * 2000-11-10 2006-07-19 Apit股份有限公司 用空气等离子对导电性材料进行处理的方法及装置
KR100464856B1 (ko) * 2002-11-07 2005-01-05 삼성전자주식회사 표면 식각 방법 및 실리콘 기판 이면 식각 방법.
SG114754A1 (en) * 2004-02-25 2005-09-28 Kulicke & Soffa Investments Laser cleaning system for a wire bonding machine
JP4449645B2 (ja) * 2004-08-18 2010-04-14 島津工業有限会社 プラズマ溶射装置
FR2879933B1 (fr) * 2004-12-28 2007-03-30 Satelec Soc Dispositif de sterilisation par plasma gazeux forme a partir d'un melange d'azote et d'hydrogene
US20060219754A1 (en) * 2005-03-31 2006-10-05 Horst Clauberg Bonding wire cleaning unit and method of wire bonding using same
US9472382B2 (en) * 2007-04-23 2016-10-18 Plasmology4, Inc. Cold plasma annular array methods and apparatus
GB0902784D0 (en) * 2009-02-19 2009-04-08 Gasplas As Plasma reactor
US9036309B2 (en) 2010-09-16 2015-05-19 General Electric Company Electrode and plasma gun configuration for use with a circuit protection device
US8330069B2 (en) 2010-09-16 2012-12-11 General Electric Company Apparatus and system for arc elmination and method of assembly
FR3074048A1 (fr) * 2017-10-23 2019-05-31 Societe Pour La Conception Des Applications Des Techniques Electroniques Dispositif de sterilisation d’un objet avec deflecteur de flux

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4982067A (en) * 1988-11-04 1991-01-01 Marantz Daniel Richard Plasma generating apparatus and method
GB2271124B (en) * 1990-12-26 1995-09-27 Opa Method and apparatus for plasma treatment of a material
WO1992012610A1 (en) * 1990-12-26 1992-07-23 Inzhenerny Tsentr ''plazmodinamika'' Device for plasma-arc processing of material
JP3166226B2 (ja) * 1991-07-10 2001-05-14 住友電気工業株式会社 ダイヤモンドの製造法及び製造装置
WO1997046056A1 (en) * 1996-05-31 1997-12-04 Ipec Precision, Inc. Apparatus for generating and deflecting a plasma jet

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009045200A1 (de) * 2009-09-30 2011-04-21 Inter-Consult Gmbh Verfahren und Vorrichtung zum Bearbeiten von Bauteilen elektrischer Maschinen
DE102009045200B4 (de) * 2009-09-30 2021-02-11 Inter-Consult Gmbh Verfahren und Vorrichtung zum Bearbeiten von Bauteilen elektrischer Maschinen

Also Published As

Publication number Publication date
EP0861575A1 (de) 1998-09-02
EP0861575B1 (de) 2000-07-05
DE69609191D1 (de) 2000-08-10
ES2150693T3 (es) 2000-12-01
WO1997018692A1 (fr) 1997-05-22
US6278241B1 (en) 2001-08-21

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: TEPLA AG, 85551 KIRCHHEIM, DE

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee