EP0861575B1 - Vierdüsen-plasmaerzeugungsvorrichtung zur erzeugung eines aktivierter strahles - Google Patents

Vierdüsen-plasmaerzeugungsvorrichtung zur erzeugung eines aktivierter strahles Download PDF

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Publication number
EP0861575B1
EP0861575B1 EP96934313A EP96934313A EP0861575B1 EP 0861575 B1 EP0861575 B1 EP 0861575B1 EP 96934313 A EP96934313 A EP 96934313A EP 96934313 A EP96934313 A EP 96934313A EP 0861575 B1 EP0861575 B1 EP 0861575B1
Authority
EP
European Patent Office
Prior art keywords
plasma
diaphragm
electrode chambers
enclosure
generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP96934313A
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English (en)
French (fr)
Other versions
EP0861575A1 (de
Inventor
Pavel Koulik
Evgenia Zorina
Stanislav Begounov
Vladimir Enguelcht
Rudolph Konavko
Anatolii Saitshenko
Mikhail Samsonov
Ioulia Tsvetkova
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TePla AG
Original Assignee
IST Instant Surface Tech SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IST Instant Surface Tech SA filed Critical IST Instant Surface Tech SA
Publication of EP0861575A1 publication Critical patent/EP0861575A1/de
Application granted granted Critical
Publication of EP0861575B1 publication Critical patent/EP0861575B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/44—Plasma torches using an arc using more than one torch

Definitions

  • the invention relates to a plasma generator with four nozzles for the formation of an activated jet, according to the preamble of claim 1.
  • This generator can be used in particular in surface treatment process (sterilization, cleaning, stripping, modification, deposit of recovery and films), of dispersed materials and monoliths, as well as for obtaining chemicals in electronics, automotive, food, medicine, chemistry, manufacture of machines and tools, etc.
  • the object of the invention is to propose a generator for plasma with four nozzles to obtain a gas jet activated of controllable composition, stable form, long resource for continuous work and optimal action on objects to be treated.
  • the invention relates to a plasma generator with four nozzles comprising two chambers with anode electrodes and two cathode electrode chambers, connected to sources of direct current and generating four plasma jets, the shape and trajectory are created using a system of external magnetic fields, so that the jets plasma form a single plasma flow with an area lowered temperature control unit in which is introduced the chemical component and / or the materials to treat, the electrode chambers of this generator being arranged in an enclosure into which a gas is introduced, this enclosure being composed of a concave flange to which are fixed the electrode chambers and a first flat diaphragm, water-cooled and provided with an orifice circular central arranged at the junction of the jets of plasma from the electrode chambers and crossed by the current.
  • the generator comprises, in downstream of the first diaphragm, a second diaphragm, cooled to water, whose orifice with a variable diameter, less than that of the plasma flow, this diaphragm being fixed to the enclosure through a circular wall, allowing the evacuation of part of the plasma and gases introduced into the enclosure.
  • the solution proposed by the present invention consists in modify the four nozzle plasma generator of art anterior, so as to create an activated composition flow controlled and effective action on the treated surface, while increasing the lifetime of the generator. Is equivalent to eliminate the disadvantages of the known four-nozzle generator described above, i.e. to suppress the flows of convection and reduce the radiation flux acting on the electrode chambers, their fasteners and while intensifying the action on the surface treated activated components of the flow created by the generator, reducing the amount of plasma reaching the surface to be treated.
  • the four nozzle generators shown in the Figures 1 and 2 include, like the known prototype described above, four electrode chambers 1, a system magnetic for shape and trajectory control plasma jets 7, a tube for the introduction of chemical components and / or products to be activated in the plasma funnel.
  • the new element of the construction of the generator is the enclosure, ventilated by a gas introduced by the nozzles 9, to which the chambers are fixed electrodes 1.
  • the enclosure consists of a cooled concave flange 2 with water and the water-cooled diaphragm system.
  • Figures 1a and 1b illustrate the case where the diaphragm includes a diaphragm in the form of a flange annular cooled 5, whose internal diameter is such that it allows the passage of the plasma flow inside which the products to be activated are introduced via the nozzle 3, and the peripheral flow of gas introduced into the enclosure by the nozzles 9.
  • This gas stabilizes the plasma flow and prevents formation of vortices and their contact with the electrodes, their fixing and supply parts.
  • the accompanying flow of gas, passing peripherally through the orifice of the diaphragm 5 stabilizes plasma flow, decreases mixing plasma with surrounding gases, decreases the transfer of radical heat of the plasma flow, which lengthens the jet resulting from plasma.
  • the diaphragm 5 whose opening 8 is relatively small, greatly reduces radiation from plasma 6 directed towards the electrode chambers.
  • Figures 2a and 2b illustrate the case where the diaphragms includes, in addition to diaphragm 5 whose functions are exposed above, a diaphragm 10 cooled with water, adjustable hole, the diameter of which is smaller than that of the plasma flow and which only allows the flow of gas activated.
  • the diaphragm 10 is fixed to the enclosure by through a circular wall 11.
  • the gas from nozzles (9) as well as the activating plasma are evacuated by through orifices 12.
  • This diaphragm eliminates peripheral plasma gases and accompanying gases which are an obstacle to the diffusion of activated particles towards the surface to be treated.
  • the diaphragm 10 also makes it possible to obtain a uniform distribution of temperature and composition of the activated stream from the proposed generator.

Claims (2)

  1. Ein Vierdüsen-Plasmagenerator der zwei Kammern mit Anodenelektroden (1) und zwei Kammern mit Kathodenelektroden (1) aufweist, welche mit Gleichstromquellen verbunden sind und vier Plasmastrahlen (4) erzeugen, deren Form und Bahn mit Hilfe eines äusseren Magnetfeldsystemes (7) in solcher Weise bestimmt werden, dass die Plasmastrahlen einen einzigen Plasmastrom (6) mit einer zentralen Zone mit verringerter Temperatur bilden, in welche die chemische Komponente und/oder das zu behandelnde Material eingeführt werden, dadurch gekennzeichnet, dass die Elektrodenkammern in einer Hülle angeordnet sind, in welche ein Gas eingeführt wird, wobei diese Hülle aus einem konkaven Flansch (2), an welchen die Elektrodenkammern befestigt sind, und aus einer ersten flachen wassergekühlten Blende (5), die eine zentrale kreisrunde Öffnung (8) an der Zusammenflussstelle der von den Elektrodenkammern stamenden Plasmastrahlen aufweist, durch welche der Strom fliesst, besteht.
  2. Generator gemäss Anspruch 1, dadurch gekennzeichnet, dass er, Stromabwärts der ersten Blende, eine zweite wassergekühlte Blende (10) aufweist, deren Öffnung einen veränderbaren Durchmesser hat, welcher kleiner als der des Plasmastromes ist, wobei diese Blende an der Hülle über eine kreisrunde Wandung (11) befestigt ist, und den Ablass eines Teiles des Plasmas und der in die Hülle eingeführten Gase erlaubt.
EP96934313A 1995-11-13 1996-11-12 Vierdüsen-plasmaerzeugungsvorrichtung zur erzeugung eines aktivierter strahles Expired - Lifetime EP0861575B1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
CH320895 1995-11-13
CH3208/95 1995-11-13
CH320895 1995-11-13
PCT/CH1996/000401 WO1997018692A1 (fr) 1995-11-13 1996-11-12 Generateur de plasma a quatre buses pour la formation d'un jet active

Publications (2)

Publication Number Publication Date
EP0861575A1 EP0861575A1 (de) 1998-09-02
EP0861575B1 true EP0861575B1 (de) 2000-07-05

Family

ID=4251004

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96934313A Expired - Lifetime EP0861575B1 (de) 1995-11-13 1996-11-12 Vierdüsen-plasmaerzeugungsvorrichtung zur erzeugung eines aktivierter strahles

Country Status (5)

Country Link
US (1) US6278241B1 (de)
EP (1) EP0861575B1 (de)
DE (1) DE69609191T2 (de)
ES (1) ES2150693T3 (de)
WO (1) WO1997018692A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6287687B1 (en) 1998-05-08 2001-09-11 Asten, Inc. Structures and components thereof having a desired surface characteristic together with methods and apparatuses for producing the same
US6146462A (en) * 1998-05-08 2000-11-14 Astenjohnson, Inc. Structures and components thereof having a desired surface characteristic together with methods and apparatuses for producing the same
JP2004514054A (ja) * 2000-11-10 2004-05-13 アピト　コープ．エス．アー． シート導電材を処理するための空中プラズマ方式およびその装置
KR100464856B1 (ko) * 2002-11-07 2005-01-05 삼성전자주식회사 표면 식각 방법 및 실리콘 기판 이면 식각 방법.
SG114754A1 (en) * 2004-02-25 2005-09-28 Kulicke & Soffa Investments Laser cleaning system for a wire bonding machine
JP4449645B2 (ja) * 2004-08-18 2010-04-14 島津工業有限会社 プラズマ溶射装置
FR2879933B1 (fr) * 2004-12-28 2007-03-30 Satelec Soc Dispositif de sterilisation par plasma gazeux forme a partir d'un melange d'azote et d'hydrogene
US20060219754A1 (en) * 2005-03-31 2006-10-05 Horst Clauberg Bonding wire cleaning unit and method of wire bonding using same
US9472382B2 (en) * 2007-04-23 2016-10-18 Plasmology4, Inc. Cold plasma annular array methods and apparatus
GB0902784D0 (en) * 2009-02-19 2009-04-08 Gasplas As Plasma reactor
DE102009045200B4 (de) * 2009-09-30 2021-02-11 Inter-Consult Gmbh Verfahren und Vorrichtung zum Bearbeiten von Bauteilen elektrischer Maschinen
US8330069B2 (en) 2010-09-16 2012-12-11 General Electric Company Apparatus and system for arc elmination and method of assembly
US9036309B2 (en) 2010-09-16 2015-05-19 General Electric Company Electrode and plasma gun configuration for use with a circuit protection device
FR3074048A1 (fr) * 2017-10-23 2019-05-31 Societe Pour La Conception Des Applications Des Techniques Electroniques Dispositif de sterilisation d’un objet avec deflecteur de flux

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4982067A (en) * 1988-11-04 1991-01-01 Marantz Daniel Richard Plasma generating apparatus and method
GB2271124B (en) 1990-12-26 1995-09-27 Opa Method and apparatus for plasma treatment of a material
WO1992012610A1 (en) * 1990-12-26 1992-07-23 Inzhenerny Tsentr ''plazmodinamika'' Device for plasma-arc processing of material
JP3166226B2 (ja) 1991-07-10 2001-05-14 住友電気工業株式会社 ダイヤモンドの製造法及び製造装置
KR20000016138A (ko) * 1996-05-31 2000-03-25 피터 무몰라 플라즈마 제트 발생 및 편향 장치

Also Published As

Publication number Publication date
ES2150693T3 (es) 2000-12-01
DE69609191T2 (de) 2001-03-22
US6278241B1 (en) 2001-08-21
EP0861575A1 (de) 1998-09-02
WO1997018692A1 (fr) 1997-05-22
DE69609191D1 (de) 2000-08-10

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