DE68922459T2 - Copolymere aus 4-Hydroxystyren und alkylsubstituiertem 4-Hydroxystyren. - Google Patents
Copolymere aus 4-Hydroxystyren und alkylsubstituiertem 4-Hydroxystyren.Info
- Publication number
- DE68922459T2 DE68922459T2 DE68922459T DE68922459T DE68922459T2 DE 68922459 T2 DE68922459 T2 DE 68922459T2 DE 68922459 T DE68922459 T DE 68922459T DE 68922459 T DE68922459 T DE 68922459T DE 68922459 T2 DE68922459 T2 DE 68922459T2
- Authority
- DE
- Germany
- Prior art keywords
- hydroxystyrene
- alkyl
- substituted
- copolymers
- monomer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F212/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring
- C08F212/02—Monomers containing only one unsaturated aliphatic radical
- C08F212/04—Monomers containing only one unsaturated aliphatic radical containing one ring
- C08F212/14—Monomers containing only one unsaturated aliphatic radical containing one ring substituted by heteroatoms or groups containing heteroatoms
- C08F212/22—Oxygen
- C08F212/24—Phenols or alcohols
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F8/00—Chemical modification by after-treatment
- C08F8/12—Hydrolysis
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Emergency Medicine (AREA)
- General Chemical & Material Sciences (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Materials For Photolithography (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US26084188A | 1988-10-21 | 1988-10-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68922459D1 DE68922459D1 (de) | 1995-06-08 |
DE68922459T2 true DE68922459T2 (de) | 1995-11-09 |
Family
ID=22990841
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68922459T Expired - Fee Related DE68922459T2 (de) | 1988-10-21 | 1989-10-20 | Copolymere aus 4-Hydroxystyren und alkylsubstituiertem 4-Hydroxystyren. |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP0365340B1 (de) |
JP (2) | JP2524228B2 (de) |
AT (1) | ATE122061T1 (de) |
CA (1) | CA2000710A1 (de) |
DE (1) | DE68922459T2 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR950004908B1 (ko) * | 1992-09-09 | 1995-05-15 | 삼성전자주식회사 | 포토 레지스트 조성물 및 이를 이용한 패턴형성방법 |
WO1995010073A1 (en) * | 1993-10-04 | 1995-04-13 | Hoechst Celanese Corporation | Novolak/polyhydroxystyrene copolymer and photoresist compositions |
ES2533713T3 (es) * | 2009-07-01 | 2015-04-14 | Bridgestone Corporation | Procedimiento para producir un interpolímero funcionalizado con hidroxiarilo por polimerización iniciada por radicales libres |
JP7215005B2 (ja) * | 2018-07-23 | 2023-01-31 | 日本ゼオン株式会社 | 重合体及びその製造方法、ポジ型レジスト組成物、並びにレジストパターン形成方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB948961A (en) * | 1960-01-22 | 1964-02-05 | Nat Res Dev | Polymers derived from polyvinyl phenol |
GB1509354A (en) * | 1976-04-24 | 1978-05-04 | Maruzen Oil Co Ltd | Process for purifying halogenated alkenyl-phenol polymers |
JPS6059259B2 (ja) * | 1977-07-11 | 1985-12-24 | 丸善石油株式会社 | 安定化された合成樹脂組成物 |
GB2000785B (en) * | 1977-07-04 | 1982-01-27 | Maruzen Oil Co Ltd | Stabilized polymer composition |
JPS5414451A (en) * | 1977-07-04 | 1979-02-02 | Cosmo Co Ltd | Stabilized synthetic resin composition |
JPS5631405A (en) * | 1979-08-22 | 1981-03-30 | Asahi Glass Co Ltd | Selective perameable membrane |
EP0260104A3 (de) * | 1986-09-09 | 1989-03-15 | Celanese Corporation | Verfahren zur Herstellung von Polyvinylphenol durch gleichzeitige Methanolyse und Polymerisation von 4-Acetoxystyren |
EP0361907A3 (de) * | 1988-09-29 | 1991-05-02 | Hoechst Celanese Corporation | Photolack-Zusammensetzung mit Bildumkehr für tiefes UV |
-
1989
- 1989-10-13 CA CA002000710A patent/CA2000710A1/en not_active Abandoned
- 1989-10-20 DE DE68922459T patent/DE68922459T2/de not_active Expired - Fee Related
- 1989-10-20 JP JP1271941A patent/JP2524228B2/ja not_active Expired - Fee Related
- 1989-10-20 AT AT89310793T patent/ATE122061T1/de not_active IP Right Cessation
- 1989-10-20 EP EP89310793A patent/EP0365340B1/de not_active Expired - Lifetime
-
1994
- 1994-07-18 JP JP6194485A patent/JPH0770241A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0365340A3 (de) | 1991-05-29 |
JPH0770241A (ja) | 1995-03-14 |
JP2524228B2 (ja) | 1996-08-14 |
ATE122061T1 (de) | 1995-05-15 |
CA2000710A1 (en) | 1990-04-21 |
EP0365340B1 (de) | 1995-05-03 |
EP0365340A2 (de) | 1990-04-25 |
JPH02166105A (ja) | 1990-06-26 |
DE68922459D1 (de) | 1995-06-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: CLARIANT FINANCE (BVI) LTD., ROAD TOWN, TORTOLA, V |
|
8328 | Change in the person/name/address of the agent |
Free format text: SPOTT WEINMILLER & PARTNER, 80336 MUENCHEN |
|
8339 | Ceased/non-payment of the annual fee |