DE68918491T2 - Vorrichtung zum Abschälen von Dünnschichten. - Google Patents

Vorrichtung zum Abschälen von Dünnschichten.

Info

Publication number
DE68918491T2
DE68918491T2 DE68918491T DE68918491T DE68918491T2 DE 68918491 T2 DE68918491 T2 DE 68918491T2 DE 68918491 T DE68918491 T DE 68918491T DE 68918491 T DE68918491 T DE 68918491T DE 68918491 T2 DE68918491 T2 DE 68918491T2
Authority
DE
Germany
Prior art keywords
thin film
base plate
conveyance
conveying
conveyance device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68918491T
Other languages
English (en)
Other versions
DE68918491D1 (de
Inventor
Mitsuhiro Seki
Sigeo Sumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Somar Corp
Original Assignee
Somar Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Somar Corp filed Critical Somar Corp
Application granted granted Critical
Publication of DE68918491D1 publication Critical patent/DE68918491D1/de
Publication of DE68918491T2 publication Critical patent/DE68918491T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/161—Coating processes; Apparatus therefor using a previously coated surface, e.g. by stamping or by transfer lamination
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26F—PERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
    • B26F3/00—Severing by means other than cutting; Apparatus therefor
    • B26F3/004—Severing by means other than cutting; Apparatus therefor by means of a fluid jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C63/00—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
    • B29C63/0004—Component parts, details or accessories; Auxiliary operations
    • B29C63/0013—Removing old coatings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1126—Using direct fluid current against work during delaminating
    • Y10T156/1132—Using vacuum directly against work during delaminating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19—Delaminating means
    • Y10T156/1906—Delaminating means responsive to feed or shape at delamination
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19—Delaminating means
    • Y10T156/1928—Differential fluid pressure delaminating means
    • Y10T156/1944—Vacuum delaminating means [e.g., vacuum chamber, etc.]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Forests & Forestry (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Separation, Sorting, Adjustment, Or Bending Of Sheets To Be Conveyed (AREA)
  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
  • Control And Other Processes For Unpacking Of Materials (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
DE68918491T 1988-04-25 1989-04-25 Vorrichtung zum Abschälen von Dünnschichten. Expired - Fee Related DE68918491T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63101909A JPH01271356A (ja) 1988-04-25 1988-04-25 薄膜剥離装置

Publications (2)

Publication Number Publication Date
DE68918491D1 DE68918491D1 (de) 1994-11-03
DE68918491T2 true DE68918491T2 (de) 1995-05-18

Family

ID=14313038

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68918491T Expired - Fee Related DE68918491T2 (de) 1988-04-25 1989-04-25 Vorrichtung zum Abschälen von Dünnschichten.

Country Status (6)

Country Link
US (1) US5000816A (de)
EP (1) EP0339570B1 (de)
JP (1) JPH01271356A (de)
AT (1) ATE112235T1 (de)
CA (1) CA1311642C (de)
DE (1) DE68918491T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0717309B2 (ja) * 1989-06-04 1995-03-01 ソマール株式会社 薄膜剥離方法
DE69023327T2 (de) * 1990-04-06 1996-06-13 Somar Corp Ablöseentwicklungsverfahren und Vorrichtung zur Durchführung.
EP0597098B1 (de) * 1992-05-29 1998-08-12 Tsukishima Kikai Kabushiki Kaisha Selbsttätige zuführvorrichtung für klebefolien
DE4221703C2 (de) * 1992-07-02 1996-02-22 Emco Maier Gmbh Verfahren und Vorrichtung zum ein- oder beidseitigen Abziehen von Schutzfolien
US5520776A (en) * 1994-05-10 1996-05-28 Polaroid Corporation Method and apparatus for delaminating a laminate
US5658416A (en) * 1994-06-17 1997-08-19 Polaroid Corporation Method and apparatus for peeling a laminate
MY117325A (en) * 1997-08-04 2004-06-30 Matsushita Electric Ind Co Ltd Method of heat treating object and apparatus for the same.
US6500298B1 (en) * 2000-01-14 2002-12-31 Kevin P. Wright Stripping machine and method
KR20080071337A (ko) * 2007-01-30 2008-08-04 삼성전자주식회사 편광판 보호 필름의 제거 장치 및 그 방법
US8802477B2 (en) * 2009-06-09 2014-08-12 International Business Machines Corporation Heterojunction III-V photovoltaic cell fabrication
US8703521B2 (en) 2009-06-09 2014-04-22 International Business Machines Corporation Multijunction photovoltaic cell fabrication
CN115076065A (zh) * 2021-03-15 2022-09-20 富联裕展科技(深圳)有限公司 流体导入装置、抽气装置、揭膜方法及流体导入方法
AR128067A1 (es) * 2021-12-23 2024-03-20 Tessenderlo Group Nv Método de producción de gelatina utilizando un dispositivo de corte

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2790638A (en) * 1952-05-01 1957-04-30 Burroughs Corp Air blast strip feeding means
FR2348131A1 (fr) * 1976-04-13 1977-11-10 Ibm Dispositif de transport d'articles sur support fluide
US4387841A (en) * 1981-03-20 1983-06-14 E. I. Du Pont De Nemours And Company Film diversion apparatus
DE3532553C1 (de) * 1985-09-12 1987-03-12 Loehr & Herrmann Gmbh Verfahren und Vorrichtung zum Abziehen der Schutzfolie von einer mit belichtetem Fotoresist beschichteten Leiterplatte
US4724032A (en) * 1985-10-02 1988-02-09 Thomas Kay Sheet separating machine and method
DE3781908T2 (de) * 1986-02-05 1993-05-13 Somar Corp Folientransportvorrichtung.
JPS62196259A (ja) * 1986-02-24 1987-08-29 Somar Corp 剥離薄膜収納容器付薄膜剥離装置
JPS62293246A (ja) * 1986-06-13 1987-12-19 Asahi Chem Ind Co Ltd カバ−フイルムの剥離方法及びその装置

Also Published As

Publication number Publication date
EP0339570A3 (en) 1990-12-05
CA1311642C (en) 1992-12-22
EP0339570B1 (de) 1994-09-28
JPH01271356A (ja) 1989-10-30
EP0339570A2 (de) 1989-11-02
ATE112235T1 (de) 1994-10-15
US5000816A (en) 1991-03-19
DE68918491D1 (de) 1994-11-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee