ATE112235T1 - Vorrichtung zum abschälen von dünnschichten. - Google Patents

Vorrichtung zum abschälen von dünnschichten.

Info

Publication number
ATE112235T1
ATE112235T1 AT89107467T AT89107467T ATE112235T1 AT E112235 T1 ATE112235 T1 AT E112235T1 AT 89107467 T AT89107467 T AT 89107467T AT 89107467 T AT89107467 T AT 89107467T AT E112235 T1 ATE112235 T1 AT E112235T1
Authority
AT
Austria
Prior art keywords
thin film
base plate
conveyance
conveying
conveyance device
Prior art date
Application number
AT89107467T
Other languages
English (en)
Inventor
Mitsuhiro Seki
Sigeo Sumi
Original Assignee
Somar Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Somar Corp filed Critical Somar Corp
Application granted granted Critical
Publication of ATE112235T1 publication Critical patent/ATE112235T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/161—Coating processes; Apparatus therefor using a previously coated surface, e.g. by stamping or by transfer lamination
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26F—PERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
    • B26F3/00—Severing by means other than cutting; Apparatus therefor
    • B26F3/004—Severing by means other than cutting; Apparatus therefor by means of a fluid jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C63/00—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
    • B29C63/0004—Component parts, details or accessories; Auxiliary operations
    • B29C63/0013—Removing old coatings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1126—Using direct fluid current against work during delaminating
    • Y10T156/1132—Using vacuum directly against work during delaminating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19—Delaminating means
    • Y10T156/1906—Delaminating means responsive to feed or shape at delamination
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19—Delaminating means
    • Y10T156/1928—Differential fluid pressure delaminating means
    • Y10T156/1944—Vacuum delaminating means [e.g., vacuum chamber, etc.]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Forests & Forestry (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Separation, Sorting, Adjustment, Or Bending Of Sheets To Be Conveyed (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Control And Other Processes For Unpacking Of Materials (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
AT89107467T 1988-04-25 1989-04-25 Vorrichtung zum abschälen von dünnschichten. ATE112235T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63101909A JPH01271356A (ja) 1988-04-25 1988-04-25 薄膜剥離装置

Publications (1)

Publication Number Publication Date
ATE112235T1 true ATE112235T1 (de) 1994-10-15

Family

ID=14313038

Family Applications (1)

Application Number Title Priority Date Filing Date
AT89107467T ATE112235T1 (de) 1988-04-25 1989-04-25 Vorrichtung zum abschälen von dünnschichten.

Country Status (6)

Country Link
US (1) US5000816A (de)
EP (1) EP0339570B1 (de)
JP (1) JPH01271356A (de)
AT (1) ATE112235T1 (de)
CA (1) CA1311642C (de)
DE (1) DE68918491T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0717309B2 (ja) * 1989-06-04 1995-03-01 ソマール株式会社 薄膜剥離方法
EP0452552B1 (de) * 1990-04-06 1995-11-02 Somar Corporation Ablöseentwicklungsverfahren und Vorrichtung zur Durchführung
DE69226642T2 (de) * 1992-05-29 1999-01-07 Sekisui Kagaku Kogyo K.K., Osaka Selbsttätige zuführvorrichtung für klebefolien
DE4221703C2 (de) * 1992-07-02 1996-02-22 Emco Maier Gmbh Verfahren und Vorrichtung zum ein- oder beidseitigen Abziehen von Schutzfolien
US5520776A (en) * 1994-05-10 1996-05-28 Polaroid Corporation Method and apparatus for delaminating a laminate
US5658416A (en) * 1994-06-17 1997-08-19 Polaroid Corporation Method and apparatus for peeling a laminate
SG73538A1 (en) * 1997-08-04 2000-06-20 Matsushita Electric Industrial Co Ltd Method of heat treating object and apparatus for the same
US6500298B1 (en) * 2000-01-14 2002-12-31 Kevin P. Wright Stripping machine and method
KR20080071337A (ko) * 2007-01-30 2008-08-04 삼성전자주식회사 편광판 보호 필름의 제거 장치 및 그 방법
US8802477B2 (en) 2009-06-09 2014-08-12 International Business Machines Corporation Heterojunction III-V photovoltaic cell fabrication
US8703521B2 (en) 2009-06-09 2014-04-22 International Business Machines Corporation Multijunction photovoltaic cell fabrication
CN115076065B (zh) * 2021-03-15 2025-05-06 富联裕展科技(深圳)有限公司 流体导入装置、抽气装置、揭膜方法及流体导入方法
CN113415015A (zh) * 2021-06-03 2021-09-21 长兴华维中星新材料有限公司 一种自动上下料的石墨散热膜压延装置
US20250049068A1 (en) * 2021-12-23 2025-02-13 Tessenderlo Group Nv Method of producing gelatine using cutting device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2790638A (en) * 1952-05-01 1957-04-30 Burroughs Corp Air blast strip feeding means
FR2348131A1 (fr) * 1976-04-13 1977-11-10 Ibm Dispositif de transport d'articles sur support fluide
US4387841A (en) * 1981-03-20 1983-06-14 E. I. Du Pont De Nemours And Company Film diversion apparatus
DE3532553C1 (de) * 1985-09-12 1987-03-12 Loehr & Herrmann Gmbh Verfahren und Vorrichtung zum Abziehen der Schutzfolie von einer mit belichtetem Fotoresist beschichteten Leiterplatte
US4724032A (en) * 1985-10-02 1988-02-09 Thomas Kay Sheet separating machine and method
JPS62196259A (ja) * 1986-02-24 1987-08-29 Somar Corp 剥離薄膜収納容器付薄膜剥離装置
DE3781908T2 (de) * 1986-02-05 1993-05-13 Somar Corp Folientransportvorrichtung.

Also Published As

Publication number Publication date
CA1311642C (en) 1992-12-22
DE68918491T2 (de) 1995-05-18
EP0339570A2 (de) 1989-11-02
JPH01271356A (ja) 1989-10-30
DE68918491D1 (de) 1994-11-03
EP0339570A3 (en) 1990-12-05
US5000816A (en) 1991-03-19
EP0339570B1 (de) 1994-09-28

Similar Documents

Publication Publication Date Title
ATE112235T1 (de) Vorrichtung zum abschälen von dünnschichten.
ATE117499T1 (de) Vorrichtung zum abschälen eines films.
ATE62441T1 (de) Vorrichtung zum abziehen der schutzfolie von einer mit belichtetem fotoresist beschichteten leiterplatte.
ATE75696T1 (de) Vorrichtung zum steuern des transportweges von gegenstaenden.
ATE131777T1 (de) Vorrichtung zum verbinden von dünnen filmen
ATE139004T1 (de) Vorrichtung zum fördern von isolierglasscheiben
ATE197435T1 (de) Verfahren und vorrichtung zum drehen von rotationssymmetrischen behältern, wie flaschen, während des transports unter staudruck
EP0360269A3 (de) Verfahren und Apparat zum Aufbringen eines dünnen Films
ATE20872T1 (de) Vorrichtung und verfahren zum aufeinanderfolgenden foerdern einzelner biegsamer gegenstaende.
ATA80188A (de) Vorrichtung zum ansetzen von distanzmitteln
KR910019855A (ko) 박판의 공급장치
FR2621568B1 (fr) Dispositif de transport pour des plaques, notamment des plaques de circuits imprimes
ATE119127T1 (de) Vorrichtung zum wenden von kleingut, insbesondere paketen auf einem transportband.
EP0101278A3 (de) Vorrichtung und Verfahren zum Etikettieren
EP0320868A3 (de) Vorrichtung zur Entfernung einer dünnen Folie
ATE127865T1 (de) Vorrichtung zum auf- und/oder abtragen von überzügen bei werkstücken.
ATE60733T1 (de) Verfahren und vorrichtung mit ein- und ausgangsbehandlungskammern zum laminieren unter reduziertem druck.
DE69423982D1 (de) Vorrichtung und verfahren zur positionierung von glasplatten
ATE48109T1 (de) Einrichtung zum stempeln von flachen gegenstaenden.
ATE74305T1 (de) Vorrichtung und verfahren zum schneiden von kautschukmaterial.
EP0189897A3 (en) Method and device for modifying the velocity of overlapping streams of paper products
DE69600508D1 (de) Vorrichtung zum Handhaben von metallisierten, verbrauchten Bahnen in einer Maschine zum Übertragen von metallisierten Bildern auf flache Gegenstände
JPS62293246A (ja) カバ−フイルムの剥離方法及びその装置
KR900002854A (ko) 기판표면에 얇은 유체막을 코우팅하는 방법과 장치
DE3650182D1 (de) Vorrichtung zum Abschälen eines Films.

Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee