FR2348131A1 - Dispositif de transport d'articles sur support fluide - Google Patents

Dispositif de transport d'articles sur support fluide

Info

Publication number
FR2348131A1
FR2348131A1 FR7705181A FR7705181A FR2348131A1 FR 2348131 A1 FR2348131 A1 FR 2348131A1 FR 7705181 A FR7705181 A FR 7705181A FR 7705181 A FR7705181 A FR 7705181A FR 2348131 A1 FR2348131 A1 FR 2348131A1
Authority
FR
France
Prior art keywords
track
earthed
fluid bearing
metal surface
enclosed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7705181A
Other languages
English (en)
Other versions
FR2348131B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2348131A1 publication Critical patent/FR2348131A1/fr
Application granted granted Critical
Publication of FR2348131B1 publication Critical patent/FR2348131B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
FR7705181A 1976-04-13 1977-02-18 Dispositif de transport d'articles sur support fluide Granted FR2348131A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US67660076A 1976-04-13 1976-04-13

Publications (2)

Publication Number Publication Date
FR2348131A1 true FR2348131A1 (fr) 1977-11-10
FR2348131B1 FR2348131B1 (fr) 1978-11-03

Family

ID=24715162

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7705181A Granted FR2348131A1 (fr) 1976-04-13 1977-02-18 Dispositif de transport d'articles sur support fluide

Country Status (3)

Country Link
US (1) UST966009I4 (fr)
JP (1) JPS52124679A (fr)
FR (1) FR2348131A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8706380U1 (fr) * 1987-05-05 1988-06-09 Frank, Gabriele, 6333 Braunfels, De
EP0525312A1 (fr) * 1991-07-30 1993-02-03 Corning Incorporated Fabrication perfectionnée d'éléments en céramique extrudés
CN111439588A (zh) * 2019-01-16 2020-07-24 上海襄万机电科技有限公司 一种无接触的物料传送装置

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01271356A (ja) * 1988-04-25 1989-10-30 Somar Corp 薄膜剥離装置
JP2532541Y2 (ja) * 1992-05-06 1997-04-16 東洋製罐株式会社 物品搬送装置
JP4105778B2 (ja) * 1997-04-24 2008-06-25 株式会社渡辺商行 気流搬送装置
US6398464B1 (en) 1999-12-27 2002-06-04 Kabushiki Kaisha Watanabe Shoko Air stream transfer apparatus
JP4396847B2 (ja) * 2004-12-22 2010-01-13 Ｓｍｃ株式会社 除電装置付きエア浮上装置及び該浮上装置における除電方法
US8248725B2 (en) * 2007-10-09 2012-08-21 Hitachi Global Storage Technologies, Netherlands B.V. System and method to electrically ground fluid dynamic bearings
CN103381965B (zh) * 2013-07-02 2016-02-03 深圳市华星光电技术有限公司 一种液晶面板的气浮式导向轮传送装置
JP6090013B2 (ja) * 2013-07-02 2017-03-08 トヨタ自動車株式会社 搬送システム
US10332770B2 (en) * 2014-09-24 2019-06-25 Sandisk Technologies Llc Wafer transfer system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8706380U1 (fr) * 1987-05-05 1988-06-09 Frank, Gabriele, 6333 Braunfels, De
EP0525312A1 (fr) * 1991-07-30 1993-02-03 Corning Incorporated Fabrication perfectionnée d'éléments en céramique extrudés
CN111439588A (zh) * 2019-01-16 2020-07-24 上海襄万机电科技有限公司 一种无接触的物料传送装置

Also Published As

Publication number Publication date
JPS52124679A (en) 1977-10-19
UST966009I4 (en) 1978-01-03
FR2348131B1 (fr) 1978-11-03

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Legal Events

Date Code Title Description
ST Notification of lapse