DE68917130T2 - Supraleitfähige dünnfilmherstellung. - Google Patents
Supraleitfähige dünnfilmherstellung.Info
- Publication number
- DE68917130T2 DE68917130T2 DE68917130T DE68917130T DE68917130T2 DE 68917130 T2 DE68917130 T2 DE 68917130T2 DE 68917130 T DE68917130 T DE 68917130T DE 68917130 T DE68917130 T DE 68917130T DE 68917130 T2 DE68917130 T2 DE 68917130T2
- Authority
- DE
- Germany
- Prior art keywords
- super
- thin film
- conductive thin
- film production
- production
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/087—Oxides of copper or solid solutions thereof
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
- H10N60/0408—Processes for depositing or forming copper oxide superconductor layers by sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
- H10N60/0576—Processes for depositing or forming copper oxide superconductor layers characterised by the substrate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/922—Static electricity metal bleed-off metallic stock
- Y10S428/9265—Special properties
- Y10S428/93—Electric superconducting
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/80—Material per se process of making same
- Y10S505/812—Stock
- Y10S505/813—Wire, tape, or film
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/80—Material per se process of making same
- Y10S505/815—Process of making per se
- Y10S505/816—Sputtering, including coating, forming, or etching
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Physical Vapour Deposition (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/161,012 US4929595A (en) | 1988-02-26 | 1988-02-26 | Superconducting thin film fabrication |
PCT/US1989/000645 WO1989008335A1 (en) | 1988-02-26 | 1989-02-23 | Superconducting thin film fabrication |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68917130D1 DE68917130D1 (de) | 1994-09-01 |
DE68917130T2 true DE68917130T2 (de) | 1994-11-10 |
Family
ID=22579435
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68917130T Expired - Fee Related DE68917130T2 (de) | 1988-02-26 | 1989-02-23 | Supraleitfähige dünnfilmherstellung. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4929595A (de) |
EP (1) | EP0407458B1 (de) |
JP (1) | JPH03504713A (de) |
AU (1) | AU3425989A (de) |
DE (1) | DE68917130T2 (de) |
WO (1) | WO1989008335A1 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5278137A (en) * | 1988-06-06 | 1994-01-11 | Nippon Steel Corporation | YBa2 Cu3 O7-y type oxide superconductive material containing dispersed Y2 BaCuO5 phase and having high critical current density |
JP2911186B2 (ja) * | 1989-07-10 | 1999-06-23 | 科学技術振興事業団 | 複合酸化物薄膜 |
JPH03150218A (ja) * | 1989-11-07 | 1991-06-26 | Sumitomo Electric Ind Ltd | 超電導薄膜の作製方法 |
US5196400A (en) * | 1990-08-17 | 1993-03-23 | At&T Bell Laboratories | High temperature superconductor deposition by sputtering |
CA2053549A1 (en) * | 1990-11-15 | 1992-05-16 | John A. Agostinelli | Construction of high temperature josephson junction device |
US5162294A (en) * | 1991-02-28 | 1992-11-10 | Westinghouse Electric Corp. | Buffer layer for copper oxide based superconductor growth on sapphire |
US5126318A (en) * | 1991-03-13 | 1992-06-30 | Westinghouse Electric Corp. | Sputtering method for forming superconductive films using water vapor addition |
US5747427A (en) * | 1991-11-15 | 1998-05-05 | Hokkaido Electric Power Co., Inc. | Process for forming a semiconductive thin film containing a junction |
JP2698254B2 (ja) * | 1991-11-15 | 1998-01-19 | 財団法人国際超電導産業技術研究センター | 酸化物薄膜の成膜方法 |
WO1993016495A1 (en) * | 1992-02-14 | 1993-08-19 | Hydro-Quebec | Fabrication of superconductor-metal alloy composites |
FR2702216B1 (fr) | 1993-03-03 | 1995-05-24 | Rhone Poulenc Chimie | Nouveaux pigments minéraux colorés à base de terres rares, procédé de synthèse et utilisations. |
USH1399H (en) * | 1993-07-06 | 1995-01-03 | The United States Of America As Represented By The Secretary Of The Air Force | Process for transforming pure Y2 BaCuO5 into a superconducting matrix of YBa2 Cu3 O7-x with fine and homogeneously dispersed Y2 BaCuO5 inclusions |
US6872300B1 (en) | 2002-03-29 | 2005-03-29 | Uop Llc | Reforming catalyst with chelated promotor |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1329952C (en) * | 1987-04-27 | 1994-05-31 | Yoshihiko Imanaka | Multi-layer superconducting circuit substrate and process for manufacturing same |
US5079222A (en) * | 1987-08-31 | 1992-01-07 | Semiconductor Energy Laboratory Co., Ltd. | Superconducting ceramic circuits and manufacturing method for the same |
-
1988
- 1988-02-26 US US07/161,012 patent/US4929595A/en not_active Expired - Fee Related
-
1989
- 1989-02-23 EP EP89904891A patent/EP0407458B1/de not_active Expired - Lifetime
- 1989-02-23 DE DE68917130T patent/DE68917130T2/de not_active Expired - Fee Related
- 1989-02-23 AU AU34259/89A patent/AU3425989A/en not_active Abandoned
- 1989-02-23 JP JP1504662A patent/JPH03504713A/ja active Pending
- 1989-02-23 WO PCT/US1989/000645 patent/WO1989008335A1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
EP0407458A1 (de) | 1991-01-16 |
AU3425989A (en) | 1989-09-22 |
EP0407458B1 (de) | 1994-07-27 |
EP0407458A4 (en) | 1991-03-20 |
US4929595A (en) | 1990-05-29 |
DE68917130D1 (de) | 1994-09-01 |
JPH03504713A (ja) | 1991-10-17 |
WO1989008335A1 (en) | 1989-09-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |