DE68908530T2 - Nachladegerät für das Czochralski-Verfahren. - Google Patents
Nachladegerät für das Czochralski-Verfahren.Info
- Publication number
- DE68908530T2 DE68908530T2 DE89311083T DE68908530T DE68908530T2 DE 68908530 T2 DE68908530 T2 DE 68908530T2 DE 89311083 T DE89311083 T DE 89311083T DE 68908530 T DE68908530 T DE 68908530T DE 68908530 T2 DE68908530 T2 DE 68908530T2
- Authority
- DE
- Germany
- Prior art keywords
- reloading device
- czochralski process
- czochralski
- reloading
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1056—Seed pulling including details of precursor replenishment
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63269576A JPH0631193B2 (ja) | 1988-10-27 | 1988-10-27 | リチャージ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68908530D1 DE68908530D1 (de) | 1993-09-23 |
DE68908530T2 true DE68908530T2 (de) | 1994-03-17 |
Family
ID=17474288
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE89311083T Expired - Fee Related DE68908530T2 (de) | 1988-10-27 | 1989-10-27 | Nachladegerät für das Czochralski-Verfahren. |
Country Status (4)
Country | Link |
---|---|
US (1) | US5009864A (de) |
EP (1) | EP0369626B1 (de) |
JP (1) | JPH0631193B2 (de) |
DE (1) | DE68908530T2 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0449260B1 (de) * | 1990-03-30 | 1995-08-30 | Shin-Etsu Handotai Company Limited | Vorrichtung zur Herstellung von Monokristallen nach dem Czochralski-Verfahren |
DE4123337A1 (de) * | 1991-07-15 | 1993-01-21 | Leybold Ag | Vorrichtung zum kristallziehen |
JPH08310892A (ja) * | 1995-05-16 | 1996-11-26 | Komatsu Electron Metals Co Ltd | 半導体単結晶製造における供給素材 |
JP3402040B2 (ja) * | 1995-12-27 | 2003-04-28 | 信越半導体株式会社 | 単結晶保持装置 |
US5958133A (en) * | 1996-01-29 | 1999-09-28 | General Signal Corporation | Material handling system for growing high-purity crystals |
KR970073915A (ko) * | 1996-05-28 | 1997-12-10 | 페. 좀머캄프, 하. 하게도른 | 크리스탈 클램프 |
JP3808135B2 (ja) * | 1996-06-13 | 2006-08-09 | コマツ電子金属株式会社 | 単結晶製造装置 |
JP3478021B2 (ja) * | 1996-09-18 | 2003-12-10 | 信越半導体株式会社 | 結晶保持装置 |
KR19980079892A (ko) * | 1997-03-28 | 1998-11-25 | 모리 레이자로 | 단결정 인상장치 |
DE19754961A1 (de) * | 1997-12-11 | 1999-06-17 | Leybold Systems Gmbh | Vorrichtung zum Halten eines Kristallblockes |
US7418993B2 (en) * | 1998-11-20 | 2008-09-02 | Rolls-Royce Corporation | Method and apparatus for production of a cast component |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2507549A (en) * | 1947-05-21 | 1950-05-16 | Lee F Smith | Servicing device for fluorescent lighting fixtures |
US2975036A (en) * | 1956-10-05 | 1961-03-14 | Motorola Inc | Crystal pulling apparatus |
DE1147366B (de) * | 1959-03-05 | 1963-04-18 | Maschf Augsburg Nuernberg Ag | Kraftschliessende Blockzange fuer Tiefofenkrane |
US3156496A (en) * | 1963-07-09 | 1964-11-10 | Lucien V Davidson | Floating tong |
US3337304A (en) * | 1965-03-15 | 1967-08-22 | Elmat Corp | Crystal growth sampler |
US4659421A (en) * | 1981-10-02 | 1987-04-21 | Energy Materials Corporation | System for growth of single crystal materials with extreme uniformity in their structural and electrical properties |
FR2619800B1 (fr) * | 1987-08-26 | 1989-10-27 | Comptoir Batiment | Palonnier de manutention, en particulier de conteneurs de dechets radio-actifs |
-
1988
- 1988-10-27 JP JP63269576A patent/JPH0631193B2/ja not_active Expired - Lifetime
-
1989
- 1989-10-25 US US07/426,293 patent/US5009864A/en not_active Expired - Fee Related
- 1989-10-27 DE DE89311083T patent/DE68908530T2/de not_active Expired - Fee Related
- 1989-10-27 EP EP89311083A patent/EP0369626B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH02120294A (ja) | 1990-05-08 |
EP0369626B1 (de) | 1993-08-18 |
JPH0631193B2 (ja) | 1994-04-27 |
US5009864A (en) | 1991-04-23 |
EP0369626A1 (de) | 1990-05-23 |
DE68908530D1 (de) | 1993-09-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |