DE68907800T2 - Sensoren mit vibrierenden Elementen zum Detektieren von elektromagnetischen Parametern. - Google Patents
Sensoren mit vibrierenden Elementen zum Detektieren von elektromagnetischen Parametern.Info
- Publication number
- DE68907800T2 DE68907800T2 DE89401466T DE68907800T DE68907800T2 DE 68907800 T2 DE68907800 T2 DE 68907800T2 DE 89401466 T DE89401466 T DE 89401466T DE 68907800 T DE68907800 T DE 68907800T DE 68907800 T2 DE68907800 T2 DE 68907800T2
- Authority
- DE
- Germany
- Prior art keywords
- resonator
- parameter
- sensors
- detection
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001514 detection method Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
- G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
- G01R15/24—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using light-modulating devices
- G01R15/248—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using light-modulating devices using a constant light source and electro-mechanically driven deflectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
- G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
- G01L1/167—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators optical excitation or measuring of vibrations
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Optical Transform (AREA)
- Measuring Magnetic Variables (AREA)
- Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
- Burglar Alarm Systems (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/201,599 US4897541A (en) | 1984-05-18 | 1988-06-02 | Sensors for detecting electromagnetic parameters utilizing resonating elements |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68907800D1 DE68907800D1 (de) | 1993-09-02 |
DE68907800T2 true DE68907800T2 (de) | 1994-02-10 |
Family
ID=22746493
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE89401466T Expired - Fee Related DE68907800T2 (de) | 1988-06-02 | 1989-05-30 | Sensoren mit vibrierenden Elementen zum Detektieren von elektromagnetischen Parametern. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4897541A (de) |
EP (1) | EP0345142B1 (de) |
JP (1) | JPH01314918A (de) |
AT (1) | ATE92179T1 (de) |
DE (1) | DE68907800T2 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102012200556A1 (de) * | 2012-01-16 | 2013-07-18 | Siemens Aktiengesellschaft | Anordnung und Verfahren zur potentialgetrennten Strommessung an einem elektrischen Leiter |
DE102020124516A1 (de) | 2020-09-21 | 2022-03-24 | Turck Duotec GmbH | Sensor mit Lichtleiteranschluss |
Families Citing this family (50)
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US5411709A (en) * | 1991-03-25 | 1995-05-02 | Fuji Xerox Co., Ltd. | Gas detector |
US5119679A (en) * | 1991-04-05 | 1992-06-09 | The Boeing Company | Optically powered and linked pressure transducer |
DE4408127A1 (de) * | 1994-03-10 | 1995-09-14 | Siemens Ag | Streckenneutraler optischer Spannungssensor |
GB9405265D0 (en) * | 1994-03-17 | 1994-04-27 | Lucas Ind Plc | Magnetic field sensor |
US6114795A (en) * | 1997-06-24 | 2000-09-05 | Tdk Corporation | Piezoelectric component and manufacturing method thereof |
US6379623B1 (en) * | 1999-07-12 | 2002-04-30 | Robert Mays, Jr. | System for using luminescent piezoelectric to detect biological and/or chemical agents |
US20060210440A1 (en) * | 1999-11-17 | 2006-09-21 | General Electric Company | Opto-acoustic sensor system and associated method |
US7082267B1 (en) | 2000-08-25 | 2006-07-25 | R& Dm Foundation | Shared multi-channel parallel optical interface |
US7099590B2 (en) | 2000-08-25 | 2006-08-29 | R&Dm Foundation | Filtering technique for free space interconnects |
US6853812B2 (en) | 2001-05-09 | 2005-02-08 | Robert Mays, Jr. | Polarized-holographic filtering providing improved extinction ratio |
US20020191598A1 (en) * | 2001-06-19 | 2002-12-19 | Robert Mays | Network switch employing free-space optical switching technique |
US20020191254A1 (en) * | 2001-06-19 | 2002-12-19 | Robert Mays | Network routing employing free-space optical broadcasting |
US6647030B1 (en) * | 2001-06-27 | 2003-11-11 | Nortel Networks Limited | Tuning of optical fiber components |
US20060198760A1 (en) * | 2001-08-02 | 2006-09-07 | General Electric Company | Opto-acoustic sensor device and associated method |
EP1520159B1 (de) * | 2002-07-01 | 2017-10-25 | Smart Autonomous Solutions Inc. | Messen einer dehnung in einer struktur ( brücke ) mit einem ( temperaturkompensierten ) elektromagnetischen resonator ( mikrowellenhohlraum ) |
US7236252B1 (en) * | 2004-08-05 | 2007-06-26 | The United States Of America As Repersented By The Secretary Of The Navy | System and apparatus for measuring displacements in electro-active materials |
US7209240B1 (en) * | 2004-08-05 | 2007-04-24 | The United States Of America As Represented By The Secretary Of The Navy | System and apparatus for measuring displacements in electro-active materials |
US7222534B2 (en) * | 2005-03-31 | 2007-05-29 | Pgs Americas, Inc. | Optical accelerometer, optical inclinometer and seismic sensor system using such accelerometer and inclinometer |
US20060289724A1 (en) * | 2005-06-20 | 2006-12-28 | Skinner Neal G | Fiber optic sensor capable of using optical power to sense a parameter |
CA2559694C (en) * | 2005-09-23 | 2015-11-10 | University Of Manitoba | A sensing system based on multiple resonant electromagnetic cavities |
US20070171958A1 (en) * | 2006-01-23 | 2007-07-26 | Anh Hoang | Electrical device measurement probes |
GB2447595B (en) * | 2006-01-31 | 2011-02-23 | Endeavour Instr Pty Ltd | A photoelastic modulator |
US8102532B2 (en) * | 2008-01-02 | 2012-01-24 | William Marsh Rice University | Resonant optothermoacoustic detection of optical absorption |
US8616054B2 (en) * | 2008-08-06 | 2013-12-31 | Quartz Seismic Sensors, Inc. | High-resolution digital seismic and gravity sensor and method |
US7961313B2 (en) * | 2008-08-11 | 2011-06-14 | Ut-Battelle, Llc | Photoacoustic point spectroscopy |
US8194246B2 (en) * | 2008-08-11 | 2012-06-05 | UT-Battellle, LLC | Photoacoustic microcantilevers |
US7924423B2 (en) * | 2008-08-11 | 2011-04-12 | Ut-Battelle, Llc | Reverse photoacoustic standoff spectroscopy |
US8610549B2 (en) * | 2009-10-16 | 2013-12-17 | Immersion Corporation | Systems and methods for providing haptic feedback at multiple resonance frequencies |
US8448261B2 (en) | 2010-03-17 | 2013-05-21 | University Of Tennessee Research Foundation | Mode synthesizing atomic force microscopy and mode-synthesizing sensing |
US20110231966A1 (en) * | 2010-03-17 | 2011-09-22 | Ali Passian | Scanning probe microscopy with spectroscopic molecular recognition |
US8080796B1 (en) | 2010-06-30 | 2011-12-20 | Ut-Battelle, Llc | Standoff spectroscopy using a conditioned target |
GB2495056B (en) * | 2010-07-21 | 2017-01-18 | Baker Hughes Inc | Fluid properties measurement device |
WO2013026006A2 (en) * | 2011-08-17 | 2013-02-21 | Public Service Solutions, Inc | Passive detectors for imaging systems |
US9772305B2 (en) * | 2011-09-15 | 2017-09-26 | Arizona Board Of Regents On Behalf Of Arizona State University | System and method for small molecule detection |
FR2980572B1 (fr) * | 2011-09-28 | 2014-07-04 | Commissariat Energie Atomique | Dispositif de detection massique de particules en milieu fluide et procede de mise en œuvre |
JPWO2016043084A1 (ja) | 2014-09-18 | 2017-07-27 | 旭硝子株式会社 | 発光素子および発電素子 |
JP6390353B2 (ja) * | 2014-11-05 | 2018-09-19 | 富士通株式会社 | 水晶振動子の特性測定方法 |
US10062831B2 (en) * | 2015-08-05 | 2018-08-28 | The Boeing Company | Structural health management apparatus and system |
WO2019217507A1 (en) * | 2018-05-11 | 2019-11-14 | Carrier Corporation | Photoacoustic detection system |
US11079227B2 (en) | 2019-04-01 | 2021-08-03 | Honeywell International Inc. | Accelerometer system enclosing gas |
US11119116B2 (en) | 2019-04-01 | 2021-09-14 | Honeywell International Inc. | Accelerometer for determining an acceleration based on modulated optical signals |
US10956768B2 (en) | 2019-04-22 | 2021-03-23 | Honeywell International Inc. | Feedback cooling and detection for optomechanical devices |
US10705112B1 (en) | 2019-04-22 | 2020-07-07 | Honeywell International Inc. | Noise rejection for optomechanical devices |
US11408911B2 (en) | 2019-07-17 | 2022-08-09 | Honeywell International Inc. | Optomechanical structure with corrugated edge |
US11119114B2 (en) | 2019-07-17 | 2021-09-14 | Honeywell International Inc. | Anchor structure for securing optomechanical structure |
US11372019B2 (en) | 2019-08-13 | 2022-06-28 | Honeywell International Inc. | Optomechanical resonator stabilization for optomechanical devices |
US11150264B2 (en) | 2019-08-13 | 2021-10-19 | Honeywell International Inc. | Feedthrough rejection for optomechanical devices using elements |
US11408912B2 (en) | 2019-08-13 | 2022-08-09 | Honeywell International Inc. | Feedthrough rejection for optomechanical devices |
Family Cites Families (51)
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US3238789A (en) * | 1961-07-14 | 1966-03-08 | Litton Systems Inc | Vibrating bar transducer |
US3249105A (en) * | 1963-04-19 | 1966-05-03 | American Optical Corp | Devices for measuring blood pressure |
US3561253A (en) * | 1969-03-26 | 1971-02-09 | Thermo Systems Inc | Apparatus and method of measurement of particulate mass |
US3580082A (en) * | 1969-11-07 | 1971-05-25 | Bendix Corp | Pressure transducer |
US3715911A (en) * | 1970-05-11 | 1973-02-13 | Susquehanna Corp | Apparatus for sensing air-borne particulate matter |
US3683213A (en) * | 1971-03-09 | 1972-08-08 | Statek Corp | Microresonator of tuning fork configuration |
US3808557A (en) * | 1971-05-21 | 1974-04-30 | V Smiley | High-sensitivity laser acoustic detector |
US3766616A (en) * | 1972-03-22 | 1973-10-23 | Statek Corp | Microresonator packaging and tuning |
JPS49131088A (de) * | 1973-04-16 | 1974-12-16 | Suwa Seikosha Kk | |
US4111036A (en) * | 1974-07-29 | 1978-09-05 | The Board Of Regents For Education Of The State Of Rhode Island | Piezoelectric probe for detection and measurement of gaseous pollutants |
US3950987A (en) * | 1975-05-13 | 1976-04-20 | Isaak Isaevich Slezinger | Piezo-optic measuring transducer and accelerometer, pressure gauge, dynamometer, and thermometer based thereon |
US4160600A (en) * | 1976-09-23 | 1979-07-10 | Smiths Industries Limited | Pressure-responsive apparatus |
US4193010A (en) * | 1976-12-09 | 1980-03-11 | Essex Transducers Corporation | Sensor device using piezoelectric coating subjected to bending |
SE411955B (sv) * | 1978-06-02 | 1980-02-11 | Asea Ab | Fiberoptiskt metdon med hogst tva fibrer |
SE415397B (sv) * | 1978-06-02 | 1980-09-29 | Asea Ab | Fiberoptiskt metdon |
SE413555B (sv) * | 1978-09-15 | 1980-06-02 | Asea Ab | Fiberoptiskt metdon |
SE414672B (sv) * | 1978-11-16 | 1980-08-11 | Asea Ab | Fiberoptiskt don for metning av fysikaliska storheter sasom kraft, tojning, tryck, acceleration och temperatur |
US4215570A (en) * | 1979-04-20 | 1980-08-05 | The United States Of America As Represented By The United States Department Of Energy | Miniature quartz resonator force transducer |
US4210029A (en) * | 1979-05-04 | 1980-07-01 | Lad Research Industries, Inc. | Differential fiber optic differential pressure sensor |
FR2460582A1 (fr) * | 1979-06-29 | 1981-01-23 | Thomson Csf | Hydrophone a fibre optique monomode fonctionnant par effet elasto-optique |
CH625372A5 (de) * | 1979-07-06 | 1981-09-15 | Ebauchesfabrik Eta Ag | |
FR2464595A1 (fr) * | 1979-08-31 | 1981-03-06 | Ebauches Sa | Procede de detection d'asymetrie de resonateurs a cristal piezoelectrique en forme de diapason et resonateurs pour sa mise en oeuvre |
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DE2937484A1 (de) * | 1979-09-17 | 1981-05-14 | Siemens AG, 1000 Berlin und 8000 München | Optische vorrichtung zum messen von druckdifferenzen mittels lichtintensitaetsaenderung |
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US4547729A (en) * | 1979-10-10 | 1985-10-15 | Asea Aktiebolag | Optical fiber measuring devices |
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DE3002620C2 (de) * | 1980-01-25 | 1984-09-20 | Krautkrämer GmbH, 5000 Köln | Verfahren zum berührungslosen optischen Empfang von Ultraschallwellen |
FR2477803A1 (fr) * | 1980-03-04 | 1981-09-11 | Suwa Seikosha Kk | Resonateur a quartz du type diapason a couplage de modes |
FR2483076A1 (fr) * | 1980-05-23 | 1981-11-27 | Quartz & Electronique | Sonde de temperature utilisant une lame de quartz |
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US4353259A (en) * | 1980-10-15 | 1982-10-12 | Calspan Corporation | Fiber optic acceleration sensor |
US4372173A (en) * | 1980-10-20 | 1983-02-08 | Quartex, Inc. | Resonator force transducer |
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US4379226A (en) * | 1981-02-02 | 1983-04-05 | Siemens Corporation | Method and sensor device for measuring a physical parameter utilizing an oscillatory, light modulation element |
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JPS5819527A (ja) * | 1981-07-28 | 1983-02-04 | Shimadzu Corp | 光圧力センサ |
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JPS60207012A (ja) * | 1984-03-31 | 1985-10-18 | Sumitomo Electric Ind Ltd | 光応用振動センサ |
EP0181397A1 (de) * | 1984-05-07 | 1986-05-21 | The Foxboro Company | Verbesserter sensor mit lichtwellenleitern zum fernmessen |
US4678905A (en) * | 1984-05-18 | 1987-07-07 | Luxtron Corporation | Optical sensors for detecting physical parameters utilizing vibrating piezoelectric elements |
US4678904A (en) * | 1984-07-06 | 1987-07-07 | Technology Dynamics, Inc. | Optical measuring device using a spectral modulation sensor having an optically resonant structure |
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US4733561A (en) * | 1986-07-21 | 1988-03-29 | The Foxboro Company | Self-oscillating, optical resonant sensor |
GB2194049B (en) * | 1986-08-15 | 1990-04-25 | Gen Electric Plc | A sensor |
-
1988
- 1988-06-02 US US07/201,599 patent/US4897541A/en not_active Expired - Lifetime
- 1988-12-29 JP JP63332692A patent/JPH01314918A/ja active Pending
-
1989
- 1989-05-30 DE DE89401466T patent/DE68907800T2/de not_active Expired - Fee Related
- 1989-05-30 EP EP89401466A patent/EP0345142B1/de not_active Expired - Lifetime
- 1989-05-30 AT AT89401466T patent/ATE92179T1/de active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102012200556A1 (de) * | 2012-01-16 | 2013-07-18 | Siemens Aktiengesellschaft | Anordnung und Verfahren zur potentialgetrennten Strommessung an einem elektrischen Leiter |
DE102020124516A1 (de) | 2020-09-21 | 2022-03-24 | Turck Duotec GmbH | Sensor mit Lichtleiteranschluss |
Also Published As
Publication number | Publication date |
---|---|
EP0345142A2 (de) | 1989-12-06 |
EP0345142B1 (de) | 1993-07-28 |
EP0345142A3 (en) | 1990-12-27 |
ATE92179T1 (de) | 1993-08-15 |
JPH01314918A (ja) | 1989-12-20 |
US4897541A (en) | 1990-01-30 |
DE68907800D1 (de) | 1993-09-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Free format text: HOFFMANN, E., DIPL.-ING., PAT.-ANW., 82166 GRAEFELFING |
|
8339 | Ceased/non-payment of the annual fee |