ATE343119T1 - Resonierender sensor - Google Patents

Resonierender sensor

Info

Publication number
ATE343119T1
ATE343119T1 AT99967043T AT99967043T ATE343119T1 AT E343119 T1 ATE343119 T1 AT E343119T1 AT 99967043 T AT99967043 T AT 99967043T AT 99967043 T AT99967043 T AT 99967043T AT E343119 T1 ATE343119 T1 AT E343119T1
Authority
AT
Austria
Prior art keywords
resonant sensor
diaphragm
shift
pressure
microbeam
Prior art date
Application number
AT99967043T
Other languages
English (en)
Inventor
Goeran Stemme
Edvard Kaelvesten
Original Assignee
Radi Medical Systems
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Radi Medical Systems filed Critical Radi Medical Systems
Application granted granted Critical
Publication of ATE343119T1 publication Critical patent/ATE343119T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0016—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0016—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a diaphragm
    • G01L9/0017—Optical excitation or measuring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Glass Compositions (AREA)
  • Valve Device For Special Equipments (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
AT99967043T 1998-12-23 1999-12-22 Resonierender sensor ATE343119T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/219,794 US6182513B1 (en) 1998-12-23 1998-12-23 Resonant sensor and method of making a pressure sensor comprising a resonant beam structure

Publications (1)

Publication Number Publication Date
ATE343119T1 true ATE343119T1 (de) 2006-11-15

Family

ID=22820814

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99967043T ATE343119T1 (de) 1998-12-23 1999-12-22 Resonierender sensor

Country Status (5)

Country Link
US (3) US6182513B1 (de)
EP (1) EP1155297B1 (de)
AT (1) ATE343119T1 (de)
DE (1) DE69933703T2 (de)
WO (1) WO2000039550A1 (de)

Families Citing this family (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7514917B2 (en) * 2003-09-19 2009-04-07 Automotive Systems Laboratory, Inc. Magnetic crash sensor
EP1136036B1 (de) * 2000-03-21 2003-02-19 Radi Medical Systems Ab Auf Resonanz basierendes Druckwandlersystem
US6714102B2 (en) * 2001-03-01 2004-03-30 Agilent Technologies, Inc. Method of fabricating thin film bulk acoustic resonator (FBAR) and FBAR structure embodying the method
FR2824636B1 (fr) * 2001-05-10 2003-09-05 Schlumberger Services Petrol Capteur de pression microelectronique a resonateur supportant des pressions elevees
US6585660B2 (en) 2001-05-18 2003-07-01 Jomed Inc. Signal conditioning device for interfacing intravascular sensors having varying operational characteristics to a physiology monitor
WO2002101347A1 (en) * 2001-06-08 2002-12-19 Radi Medical Systems Ab Miniaturized pressure sensor
JP2003083829A (ja) * 2001-09-12 2003-03-19 Toyo Commun Equip Co Ltd 圧力センサ
TW520341B (en) * 2001-11-20 2003-02-11 Ind Tech Res Inst A method for manufacturing a chamber of the thin film bulk acoustic wave resonator (FBAR)
US6894787B2 (en) * 2001-12-21 2005-05-17 Honeywell International Inc. Optical pressure sensor
US6710355B2 (en) * 2002-02-07 2004-03-23 Honeywell International Inc. Optically powered resonant integrated microstructure pressure sensor
US6663570B2 (en) * 2002-02-27 2003-12-16 Volcano Therapeutics, Inc. Connector for interfacing intravascular sensors to a physiology monitor
US7134994B2 (en) * 2002-05-20 2006-11-14 Volcano Corporation Multipurpose host system for invasive cardiovascular diagnostic measurement acquisition and display
DE10241066A1 (de) * 2002-09-05 2004-03-18 Robert Bosch Gmbh Halbleiterbauelement und Verfahren
US7495302B2 (en) * 2004-03-03 2009-02-24 Robert Bosch Gmbh Micromechanical component having a diaphragm
US7263894B2 (en) 2004-06-07 2007-09-04 Radi Medical Systems Ab Sensor and guide wire assembly
JP2006029984A (ja) * 2004-07-16 2006-02-02 Yokogawa Electric Corp 振動式圧力センサ
US20060116602A1 (en) * 2004-12-01 2006-06-01 Alden Dana A Medical sensing device and system
US7499604B1 (en) * 2004-12-12 2009-03-03 Burns David W Optically coupled resonant pressure sensor and process
US20070236213A1 (en) * 2006-03-30 2007-10-11 Paden Bradley E Telemetry method and apparatus using magnetically-driven mems resonant structure
US7967761B2 (en) * 2006-12-01 2011-06-28 Radi Medical Systems Ab Sensor and guide wire assembly
US8704315B2 (en) * 2008-06-26 2014-04-22 Cornell University CMOS integrated micromechanical resonators and methods for fabricating the same
GB2470399B (en) * 2009-05-21 2013-11-27 Ge Infrastructure Sensing Inc A sensor arranged to measure more than one characteristic of a fluid
US8478384B2 (en) 2010-01-19 2013-07-02 Lightlab Imaging, Inc. Intravascular optical coherence tomography system with pressure monitoring interface and accessories
US8696600B2 (en) * 2010-01-29 2014-04-15 St. Jude Medical Systems Ab Medical guide wire assembly
WO2011092202A1 (en) 2010-01-29 2011-08-04 St Jude Medical Systems Ab Medical guide wire assembly
JP5158160B2 (ja) * 2010-09-10 2013-03-06 横河電機株式会社 振動式トランスデューサ
AU2012262258B2 (en) 2011-05-31 2015-11-26 Lightlab Imaging, Inc. Multimodal imaging system, apparatus, and methods
WO2013019840A1 (en) 2011-08-03 2013-02-07 Lightlab Imaging, Inc. Systems, methods and apparatus for determining a fractional flow reserve
US10888232B2 (en) 2011-08-20 2021-01-12 Philips Image Guided Therapy Corporation Devices, systems, and methods for assessing a vessel
US9339348B2 (en) 2011-08-20 2016-05-17 Imperial Colege of Science, Technology and Medicine Devices, systems, and methods for assessing a vessel
KR101253334B1 (ko) * 2011-10-07 2013-04-11 숭실대학교산학협력단 안압 센서 및 그 제조 방법
US10506934B2 (en) 2012-05-25 2019-12-17 Phyzhon Health Inc. Optical fiber pressure sensor
RU2556288C2 (ru) * 2013-03-29 2015-07-10 Валерий Владимирович Коваленко Анализатор общего давления, плотности и парцианального давления паров воды в низком вакууме
US9335203B2 (en) * 2013-08-28 2016-05-10 Robert Bosch Gmbh MEMS component
US10327645B2 (en) 2013-10-04 2019-06-25 Vascular Imaging Corporation Imaging techniques using an imaging guidewire
US10130269B2 (en) 2013-11-14 2018-11-20 Medtronic Vascular, Inc Dual lumen catheter for providing a vascular pressure measurement
US9877660B2 (en) 2013-11-14 2018-01-30 Medtronic Vascular Galway Systems and methods for determining fractional flow reserve without adenosine or other pharmalogical agent
US10537255B2 (en) 2013-11-21 2020-01-21 Phyzhon Health Inc. Optical fiber pressure sensor
US9913585B2 (en) 2014-01-15 2018-03-13 Medtronic Vascular, Inc. Catheter for providing vascular pressure measurements
EP3861928B1 (de) 2014-04-04 2024-03-27 St. Jude Medical Systems AB Diagnostisches system für intravaskulären druck und flussdaten
US10973418B2 (en) 2014-06-16 2021-04-13 Medtronic Vascular, Inc. Microcatheter sensor design for minimizing profile and impact of wire strain on sensor
US10201284B2 (en) 2014-06-16 2019-02-12 Medtronic Vascular Inc. Pressure measuring catheter having reduced error from bending stresses
US11330989B2 (en) 2014-06-16 2022-05-17 Medtronic Vascular, Inc. Microcatheter sensor design for mounting sensor to minimize induced strain
US10258240B1 (en) 2014-11-24 2019-04-16 Vascular Imaging Corporation Optical fiber pressure sensor
US10194812B2 (en) 2014-12-12 2019-02-05 Medtronic Vascular, Inc. System and method of integrating a fractional flow reserve device with a conventional hemodynamic monitoring system
US11272850B2 (en) 2016-08-09 2022-03-15 Medtronic Vascular, Inc. Catheter and method for calculating fractional flow reserve
US11330994B2 (en) 2017-03-08 2022-05-17 Medtronic Vascular, Inc. Reduced profile FFR catheter
US10646122B2 (en) 2017-04-28 2020-05-12 Medtronic Vascular, Inc. FFR catheter with covered distal pressure sensor and method of manufacture
US11235124B2 (en) 2017-08-09 2022-02-01 Medtronic Vascular, Inc. Collapsible catheter and method for calculating fractional flow reserve
US11219741B2 (en) 2017-08-09 2022-01-11 Medtronic Vascular, Inc. Collapsible catheter and method for calculating fractional flow reserve
US10605682B1 (en) 2017-12-29 2020-03-31 The United States Of America As Represented By The Secretary Of The Navy MEMS unpowered pressure sensor
US11185244B2 (en) 2018-08-13 2021-11-30 Medtronic Vascular, Inc. FFR catheter with suspended pressure sensor

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1078217A (en) * 1976-03-31 1980-05-27 Robert C. Whitehead (Jr.) Force transducing cantilever beam and pressure transducer incorporating it
GB8610253D0 (en) 1986-04-26 1986-05-29 Stc Plc Resonator device
GB2197069B (en) 1986-11-03 1990-10-24 Stc Plc Sensor device
US4897360A (en) 1987-12-09 1990-01-30 Wisconsin Alumni Research Foundation Polysilicon thin film process
US5013693A (en) 1989-02-16 1991-05-07 Wisconsin Alumni Research Foundation Formation of microstructures with removal of liquid by freezing and sublimation
US5090254A (en) 1990-04-11 1992-02-25 Wisconsin Alumni Research Foundation Polysilicon resonating beam transducers
US5188983A (en) 1990-04-11 1993-02-23 Wisconsin Alumni Research Foundation Polysilicon resonating beam transducers and method of producing the same
SE506135C2 (sv) 1990-07-11 1997-11-17 Radi Medical Systems Sensor- och ledarkonstruktion
DE4039846A1 (de) 1990-12-13 1992-06-17 Siemens Ag Mikromechanischer resonanter sensor und verfahren zu seiner herstellung
FR2674627B1 (fr) 1991-03-27 1994-04-29 Commissariat Energie Atomique Capteur de pression resonant.
FR2687783B1 (fr) 1992-02-20 1994-05-20 Sextant Avionique Micro-capteur de pression.
GB9321398D0 (en) 1993-10-16 1993-12-08 Lucas Ind Plc Differential pressure transducer
GB9405355D0 (en) 1994-03-18 1994-05-04 Lucas Ind Plc Vibrating element transducer
US5772322A (en) * 1996-05-31 1998-06-30 Honeywell Inc. Resonant microbeam temperature sensor
US5808210A (en) * 1996-12-31 1998-09-15 Honeywell Inc. Thin film resonant microbeam absolute pressure sensor
US5747705A (en) 1996-12-31 1998-05-05 Honeywell Inc. Method for making a thin film resonant microbeam absolute

Also Published As

Publication number Publication date
WO2000039550A1 (en) 2000-07-06
EP1155297B1 (de) 2006-10-18
US6182513B1 (en) 2001-02-06
US20020157473A1 (en) 2002-10-31
DE69933703T2 (de) 2007-08-23
EP1155297A1 (de) 2001-11-21
DE69933703D1 (de) 2006-11-30
US6546804B2 (en) 2003-04-15

Similar Documents

Publication Publication Date Title
ATE343119T1 (de) Resonierender sensor
DE68905967T2 (de) Piezoresistiver Si Einkristall Druckwandler.
DE69814568D1 (de) Bourdon-manometer mit integrierten optischen dehnungsfühlern zur messung von zug- oder druckdehnungen
ATE547999T1 (de) Implantierbare vorrichtung zur auswertung von belastungen an benachbarte paar von wirbeln
DE69625404D1 (de) Mikromechanischer Drucksensor mit erweitertem Messbereich
MXPA02003824A (es) Dispositivo flexible de microdoblez de fibra optica, sensores y metodos de uso.
EP0345142A3 (en) Sensors for detecting electromagnetic parameters utilizing vibrating elements
ATE141008T1 (de) Betatigungseinheiten und mikrosensoren in soi- technik
DE19833712B8 (de) Druckerfassungsvorrichtung mit Metallmembran
CA2247485A1 (en) Assembly for sensing and/or monitoring a predetermined level in a vessel
MX9804453A (es) Uso de una emision acustica en el analisis de formacion de rocas.
BR0008149A (pt) Interface de diafragma aperfeiçoada acoplada a aparelho de facoemulsificação
DE60206027D1 (de) Überwachung einer erdverlegten pipeline mit einem zusätzlichen erd-akustischen parameter
WO1999006788A3 (de) Abstandsmessvorrichtung und verfahren zur bestimmung eines abstands
FR2780780B1 (fr) Capteur d'oscillations comportant une douille de pression et un element palpeur maintenu radialement a l'exterieur sur la douille de pression
DE69015704T2 (de) Hermetischer Druckwandler.
EP0855583A3 (de) Druckmessgerät
ATE185420T1 (de) Piezoelektrische messmethode
NO975447L (no) Dynamisk trykksensor
SE0004147D0 (sv) Förfarande och system för utvärdering av statisk friktion
DE50006065D1 (de) Membrane für Druckmessgeräte
EP1731885A3 (de) Verfahren und Vorrichtung zur akustischen Überwachung eines Prozesses, sowie eines Melkprozesses
ITGE960088A0 (it) Stabilizzazione della pressione oscillante dei combustori e metodo.
EP0266485A3 (de) Elektromagnetische Hupe mit durch resonanzfrequenzmessende Proben elektronisch gesteuerter Erregung seiner akustischen Membrane
SE9801892L (sv) Sensor för beröringsfri detektering via modulering av elektromagnetisk signal genom av mätstorhet styrd mekanisk resonans

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties