DE68907631D1 - Verfahren zum herstellen von monosilan. - Google Patents

Verfahren zum herstellen von monosilan.

Info

Publication number
DE68907631D1
DE68907631D1 DE8989106199T DE68907631T DE68907631D1 DE 68907631 D1 DE68907631 D1 DE 68907631D1 DE 8989106199 T DE8989106199 T DE 8989106199T DE 68907631 T DE68907631 T DE 68907631T DE 68907631 D1 DE68907631 D1 DE 68907631D1
Authority
DE
Germany
Prior art keywords
producing monosilane
monosilane
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8989106199T
Other languages
English (en)
Other versions
DE68907631T2 (de
Inventor
Keisuke Wada
Junzo Haji
Ichiro Yokotake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Kasei Corp
Original Assignee
Mitsubishi Kasei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP9114288A external-priority patent/JP2615803B2/ja
Priority claimed from JP9114188A external-priority patent/JP2615802B2/ja
Priority claimed from JP32447288A external-priority patent/JP2646719B2/ja
Application filed by Mitsubishi Kasei Corp filed Critical Mitsubishi Kasei Corp
Application granted granted Critical
Publication of DE68907631D1 publication Critical patent/DE68907631D1/de
Publication of DE68907631T2 publication Critical patent/DE68907631T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C01B33/043—Monosilane
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02—Silicon compounds
    • C07F7/04—Esters of silicic acids

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Catalysts (AREA)
  • Low-Molecular Organic Synthesis Reactions Using Catalysts (AREA)
DE89106199T 1988-04-13 1989-04-07 Verfahren zum Herstellen von Monosilan. Expired - Fee Related DE68907631T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP9114288A JP2615803B2 (ja) 1988-04-13 1988-04-13 モノシランの製造法
JP9114188A JP2615802B2 (ja) 1988-04-13 1988-04-13 モノシランの製法
JP32447288A JP2646719B2 (ja) 1988-12-22 1988-12-22 アルコキシシランの不均化法

Publications (2)

Publication Number Publication Date
DE68907631D1 true DE68907631D1 (de) 1993-08-26
DE68907631T2 DE68907631T2 (de) 1994-02-24

Family

ID=27306660

Family Applications (1)

Application Number Title Priority Date Filing Date
DE89106199T Expired - Fee Related DE68907631T2 (de) 1988-04-13 1989-04-07 Verfahren zum Herstellen von Monosilan.

Country Status (3)

Country Link
US (1) US4904460A (de)
EP (1) EP0337322B1 (de)
DE (1) DE68907631T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI480228B (zh) * 2008-10-31 2015-04-11 Showa Denko Kk 單矽烷及四烷氧基矽烷的製造方法
RU2479350C2 (ru) * 2011-06-24 2013-04-20 Федеральное государственное унитарное предприятие "Государственный ордена Трудового Красного Знамени научно-исследовательский институт химии и технологии, элементоорганических соединений" (ФГУП ГНИИХТЭОС) СПОСОБ ПОЛУЧЕНИЯ СИЛАНОВ ТИПА RnSiH4-n ДИСПРОПОРЦИОНИРОВАНИЕМ ГИДРИДАЛКОКСИСИЛАНОВ ТИПА RnSiH(OR')3-n (ГДЕ n=0; 1; R=Me; R'=Me, Et) И КАТАЛИЗАТОРЫ ДЛЯ ЕГО ОСУЩЕСТВЛЕНИЯ
WO2014054843A1 (en) 2012-10-02 2014-04-10 Oci Company Ltd. Method for preparing monosilane by using trialkoxysilane

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2530367A (en) * 1947-12-06 1950-11-21 Linde Air Prod Co Disproportionation of alkoxysilanes
BE789534A (fr) * 1971-10-01 1973-01-15 Tokyo Shibaura Electric Co Procede de fabrication de silanes
US4016188A (en) * 1972-05-30 1977-04-05 Dynamit Nobel Aktiengesellschaft Process for the preparation of low silanes and silane esters
JPS5947A (ja) * 1982-06-23 1984-01-05 松下電器産業株式会社 超音波診断装置
JPS59721A (ja) * 1982-06-28 1984-01-05 Panafacom Ltd 情報転送制御方式
US4613491A (en) * 1984-05-17 1986-09-23 Korea Advanced Institute Of Science And Technology Redistribution catalyst and methods for its preparation and use to convert chlorosilicon hydrides to silane
JPH0688770B2 (ja) * 1985-05-22 1994-11-09 三菱化成株式会社 モノシランの製法
JPS62675A (ja) * 1985-06-26 1987-01-06 Nitto Giken Kk 電磁往復動圧縮機
US4725420A (en) * 1985-09-25 1988-02-16 Toa Nenryo Kogyo Kabushiki Kaisha Process for the production of silanes
JP2661976B2 (ja) * 1988-08-09 1997-10-08 古河電気工業株式会社 亜鉛被覆アルミニウムチューブの製造方法

Also Published As

Publication number Publication date
DE68907631T2 (de) 1994-02-24
EP0337322A3 (de) 1991-03-27
EP0337322A2 (de) 1989-10-18
EP0337322B1 (de) 1993-07-21
US4904460A (en) 1990-02-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee