DE68902271T2 - Verfahren und vorrichtung zur erfassung des verdrahtungsmusters. - Google Patents

Verfahren und vorrichtung zur erfassung des verdrahtungsmusters.

Info

Publication number
DE68902271T2
DE68902271T2 DE8989304795T DE68902271T DE68902271T2 DE 68902271 T2 DE68902271 T2 DE 68902271T2 DE 8989304795 T DE8989304795 T DE 8989304795T DE 68902271 T DE68902271 T DE 68902271T DE 68902271 T2 DE68902271 T2 DE 68902271T2
Authority
DE
Germany
Prior art keywords
detecting
wiring pattern
wiring
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8989304795T
Other languages
English (en)
Other versions
DE68902271D1 (de
Inventor
Moritoshi Ando
Hiroshi Oka
Satoshi Iwata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP63124118A external-priority patent/JPH01295105A/ja
Priority claimed from JP63188918A external-priority patent/JPH0238871A/ja
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Publication of DE68902271D1 publication Critical patent/DE68902271D1/de
Application granted granted Critical
Publication of DE68902271T2 publication Critical patent/DE68902271T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
DE8989304795T 1988-05-20 1989-05-11 Verfahren und vorrichtung zur erfassung des verdrahtungsmusters. Expired - Fee Related DE68902271T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP63124118A JPH01295105A (ja) 1988-05-20 1988-05-20 配線パターンの検知方法
JP63188918A JPH0238871A (ja) 1988-07-28 1988-07-28 配線パターンの検査方法

Publications (2)

Publication Number Publication Date
DE68902271D1 DE68902271D1 (de) 1992-09-03
DE68902271T2 true DE68902271T2 (de) 1993-02-11

Family

ID=26460858

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8989304795T Expired - Fee Related DE68902271T2 (de) 1988-05-20 1989-05-11 Verfahren und vorrichtung zur erfassung des verdrahtungsmusters.

Country Status (4)

Country Link
US (1) US5011960A (de)
EP (1) EP0342864B1 (de)
KR (1) KR920004087B1 (de)
DE (1) DE68902271T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5103105A (en) * 1989-11-02 1992-04-07 Matsushita Electric Industrial Co., Ltd. Apparatus for inspecting solder portion of a circuit board
JPH0794972B2 (ja) * 1989-12-13 1995-10-11 松下電器産業株式会社 半田の外観検査方法
DE4025682A1 (de) * 1990-08-14 1992-02-20 Fraunhofer Ges Forschung Vorrichtung zum messen und verfahren beim messen von profilen strangfoermigen guts
JPH0769155B2 (ja) * 1990-11-27 1995-07-26 大日本スクリーン製造株式会社 プリント基板のパターン検査方法
JPH11513119A (ja) * 1996-07-12 1999-11-09 フィリップス エレクトロニクス ネムローゼ フェンノートシャップ Ｐｃｂを検査する方法および装置
US5995232A (en) * 1997-07-14 1999-11-30 U.S. Philips Corporation Method of and device for inspecting a PCB
US6043876A (en) * 1998-10-08 2000-03-28 Lucent Technologies, Inc. Method and apparatus for detecting a solder bridge in a ball grid array
US6870611B2 (en) * 2001-07-26 2005-03-22 Orbotech Ltd. Electrical circuit conductor inspection
US6654115B2 (en) 2001-01-18 2003-11-25 Orbotech Ltd. System and method for multi-dimensional optical inspection
US7495758B2 (en) * 2006-09-06 2009-02-24 Theo Boeing Company Apparatus and methods for two-dimensional and three-dimensional inspection of a workpiece
US7800766B2 (en) * 2007-09-21 2010-09-21 Northrop Grumman Space & Mission Systems Corp. Method and apparatus for detecting and adjusting substrate height
US8812149B2 (en) 2011-02-24 2014-08-19 Mss, Inc. Sequential scanning of multiple wavelengths
CN103033521A (zh) * 2012-12-13 2013-04-10 京东方科技集团股份有限公司 一种布线检测方法及检测系统
TWI506242B (zh) * 2014-12-12 2015-11-01 Ind Tech Res Inst 薄膜曲率量測裝置及其方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2453392A1 (fr) * 1979-04-03 1980-10-31 Thomson Csf Dispositif optique d'analyse du relief de couches minces
US4674869A (en) * 1979-04-30 1987-06-23 Diffracto, Ltd. Method and apparatus for electro-optically determining dimension, location and altitude of objects
US4349277A (en) * 1980-06-11 1982-09-14 General Electric Company Non-contact measurement of surface profile
US4472056A (en) * 1980-07-23 1984-09-18 Hitachi, Ltd. Shape detecting apparatus
US4650333A (en) * 1984-04-12 1987-03-17 International Business Machines Corporation System for measuring and detecting printed circuit wiring defects
US4796997A (en) * 1986-05-27 1989-01-10 Synthetic Vision Systems, Inc. Method and system for high-speed, 3-D imaging of an object at a vision station
EP0248479B1 (de) * 1986-06-04 1991-11-27 Koninklijke Philips Electronics N.V. Optische Messanordnung des Abstands zwischen einer Oberfläche und einer Bezugsebene

Also Published As

Publication number Publication date
DE68902271D1 (de) 1992-09-03
EP0342864A2 (de) 1989-11-23
KR920004087B1 (ko) 1992-05-23
EP0342864A3 (en) 1989-12-27
KR900000585A (ko) 1990-01-30
EP0342864B1 (de) 1992-07-29
US5011960A (en) 1991-04-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee