DE60322342D1 - Halbleitervorrichtung mit brennstoffzelle und verfahren zu ihrer herstellung - Google Patents

Halbleitervorrichtung mit brennstoffzelle und verfahren zu ihrer herstellung

Info

Publication number
DE60322342D1
DE60322342D1 DE60322342T DE60322342T DE60322342D1 DE 60322342 D1 DE60322342 D1 DE 60322342D1 DE 60322342 T DE60322342 T DE 60322342T DE 60322342 T DE60322342 T DE 60322342T DE 60322342 D1 DE60322342 D1 DE 60322342D1
Authority
DE
Germany
Prior art keywords
fuel cell
semiconductor device
separator
production
device equipped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60322342T
Other languages
English (en)
Inventor
Kiyoshi Morimoto
Kiyoyuki Morita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE60322342D1 publication Critical patent/DE60322342D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
    • H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
    • H01L27/0688—Integrated circuits having a three-dimensional layout
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/8605—Porous electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/02—Details
    • H01M8/0202—Collectors; Separators, e.g. bipolar separators; Interconnectors
    • H01M8/0258—Collectors; Separators, e.g. bipolar separators; Interconnectors characterised by the configuration of channels, e.g. by the flow field of the reactant or coolant
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/1007—Fuel cells with solid electrolytes with both reactants being gaseous or vaporised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/24—Grouping of fuel cells, e.g. stacking of fuel cells
    • H01M8/241—Grouping of fuel cells, e.g. stacking of fuel cells with solid or matrix-supported electrolytes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
DE60322342T 2002-01-29 2003-01-23 Halbleitervorrichtung mit brennstoffzelle und verfahren zu ihrer herstellung Expired - Fee Related DE60322342D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002019659 2002-01-29
PCT/JP2003/000618 WO2003065487A1 (fr) 2002-01-29 2003-01-23 Dispositif semi-conducteur dote d'une pile a combustible et procede de fabrication associe

Publications (1)

Publication Number Publication Date
DE60322342D1 true DE60322342D1 (de) 2008-09-04

Family

ID=27654272

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60322342T Expired - Fee Related DE60322342D1 (de) 2002-01-29 2003-01-23 Halbleitervorrichtung mit brennstoffzelle und verfahren zu ihrer herstellung

Country Status (7)

Country Link
US (1) US6933570B2 (de)
EP (1) EP1471588B1 (de)
JP (1) JP3700979B2 (de)
CN (1) CN1328811C (de)
AT (1) ATE402484T1 (de)
DE (1) DE60322342D1 (de)
WO (1) WO2003065487A1 (de)

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US20120264024A1 (en) * 1999-04-29 2012-10-18 Pelton Walter E Methods and apparatuses for electrochemical cell system with movable medium and non-conducting substrate
CN1328811C (zh) * 2002-01-29 2007-07-25 松下电器产业株式会社 具有燃料电池的半导体装置及其制造方法
US20080233436A1 (en) * 2003-07-28 2008-09-25 General Motors Corporation Diffusion media tailored to account for variations in operating humidity and devices incorporating the same
US7235315B2 (en) * 2003-12-16 2007-06-26 Ballard Power Systems Inc. Electrochemical fuel cell stack having a plurality of integrated voltage reversal protection diodes
KR101065375B1 (ko) * 2004-06-23 2011-09-16 삼성에스디아이 주식회사 연료 전지용 바이폴라 플레이트, 이의 제조 방법 및 이를포함하는 연료 전지
US7842435B2 (en) * 2004-11-01 2010-11-30 Gm Global Technology Operations, Inc. Fuel cell water management enhancement method
KR100982721B1 (ko) * 2005-09-29 2010-09-17 마이크로 실리트론 인코포레이티드 연료 전지 단위 셀, 연료 전지 단위 셀 어레이, 연료 전지모듈 및 연료 전지 시스템
KR100673616B1 (ko) * 2005-12-05 2007-01-24 경상대학교산학협력단 웨이퍼 뒷면에 전원공급장치가 내장된 반도체용 실리콘웨이퍼
JP5234878B2 (ja) * 2006-02-22 2013-07-10 独立行政法人産業技術総合研究所 燃料電池
EP1843422B1 (de) * 2006-04-06 2010-11-17 STMicroelectronics Srl Verfahren und beschaltung für regelung des hochfahrens einer mikrobrennstoffzelles
WO2007121336A2 (en) * 2006-04-14 2007-10-25 Applied Materials, Inc. Reliable fuel cell electrode design
KR100645594B1 (ko) 2006-07-12 2006-11-15 한국에너지기술연구원 연료전지 성능 평가용 셀 또는 스택 및 연료전지 성능 평가방법
US20080093633A1 (en) * 2006-10-18 2008-04-24 United Microelectronics Corp. Complementary metal-oxide-semiconductor (cmos) image sensor and fabricating method thereof
JP2008159447A (ja) * 2006-12-25 2008-07-10 Shinko Electric Ind Co Ltd 固体酸化物型燃料電池発電装置
KR20090119187A (ko) * 2008-05-15 2009-11-19 삼성전자주식회사 연료전지를 포함하는 패키지, 그 제조 방법, 및 패키지를포함하는 카드 및 시스템
JP5610562B2 (ja) * 2008-11-05 2014-10-22 神奈川県 燃料電池セルおよびその製造方法
KR101829176B1 (ko) 2009-11-20 2018-02-13 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
TWI688047B (zh) * 2010-08-06 2020-03-11 半導體能源研究所股份有限公司 半導體裝置
KR102371046B1 (ko) * 2016-07-15 2022-03-07 현대자동차주식회사 연료전지용 엔드셀 히터
WO2019232835A1 (zh) 2018-06-07 2019-12-12 上海尚理投资有限公司 硅极板及其制备方法、硅在燃料电池的应用、燃料电池电堆结构、燃料电池和应用

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0650783B2 (ja) * 1982-03-29 1994-06-29 株式会社半導体エネルギ−研究所 光発電装置
JP3339730B2 (ja) 1992-12-24 2002-10-28 忠弘 大見 半導体装置
JP3503197B2 (ja) * 1994-07-04 2004-03-02 株式会社デンソー 半導体装置
JP3401918B2 (ja) 1994-07-04 2003-04-28 株式会社デンソー 半導体装置
KR100253699B1 (ko) * 1996-06-29 2000-05-01 김영환 Soi소자 및 그 제조방법
JP4623451B2 (ja) 1997-07-30 2011-02-02 忠弘 大見 半導体基板及びその作製方法
US6255731B1 (en) 1997-07-30 2001-07-03 Canon Kabushiki Kaisha SOI bonding structure
US6638654B2 (en) * 1999-02-01 2003-10-28 The Regents Of The University Of California MEMS-based thin-film fuel cells
CN1117882C (zh) * 1999-04-19 2003-08-13 住友金属工业株式会社 固体高分子型燃料电池用不锈钢材
CN1349670A (zh) * 1999-05-06 2002-05-15 三帝公司 燃料电池和薄膜
US6312846B1 (en) * 1999-11-24 2001-11-06 Integrated Fuel Cell Technologies, Inc. Fuel cell and power chip technology
JP2004507880A (ja) * 2000-04-17 2004-03-11 ザ　ペン　ステイト　リサーチ　ファンデーション 堆積された薄膜、並びに分離及び犠牲層への適用におけるその使用
DE10021907B4 (de) * 2000-05-05 2005-06-02 Ballard Power Systems Ag Brennstoffzellensystem mit einem Brennstoffzellenstapel mit integrierter Verpolschutzdiode
JP2002075399A (ja) * 2000-08-30 2002-03-15 Hitachi Ltd 固体高分子電解質型燃料電池用セパレータ
EP1258937A1 (de) * 2001-05-17 2002-11-20 STMicroelectronics S.r.l. Mikro-Silizium-Brennstoffzelle, Verfahren zur Herstellung und autonome Halbleitervorrichtung mit Mikro-Brennstoffzelle
CN1328811C (zh) * 2002-01-29 2007-07-25 松下电器产业株式会社 具有燃料电池的半导体装置及其制造方法

Also Published As

Publication number Publication date
JPWO2003065487A1 (ja) 2005-05-26
EP1471588A1 (de) 2004-10-27
US6933570B2 (en) 2005-08-23
CN1625818A (zh) 2005-06-08
US20040099907A1 (en) 2004-05-27
WO2003065487A1 (fr) 2003-08-07
EP1471588A4 (de) 2007-01-03
JP3700979B2 (ja) 2005-09-28
EP1471588B1 (de) 2008-07-23
ATE402484T1 (de) 2008-08-15
CN1328811C (zh) 2007-07-25

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP

8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: KUDLEK & GRUNERT PATENTANWAELTE PARTNERSCHAFT, 803

8339 Ceased/non-payment of the annual fee