DE60312504D1 - Verfahren und vorrichtung zur darstellung dampfförmiger reagenzien für die chemische abscheidung aus der dampfphase - Google Patents

Verfahren und vorrichtung zur darstellung dampfförmiger reagenzien für die chemische abscheidung aus der dampfphase

Info

Publication number
DE60312504D1
DE60312504D1 DE60312504T DE60312504T DE60312504D1 DE 60312504 D1 DE60312504 D1 DE 60312504D1 DE 60312504 T DE60312504 T DE 60312504T DE 60312504 T DE60312504 T DE 60312504T DE 60312504 D1 DE60312504 D1 DE 60312504D1
Authority
DE
Germany
Prior art keywords
chamber
vapor
vaporization chamber
preparation
chemical deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60312504T
Other languages
English (en)
Other versions
DE60312504T2 (de
Inventor
Douglas M Nelson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pilkington North America Inc
Original Assignee
Pilkington North America Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pilkington North America Inc filed Critical Pilkington North America Inc
Publication of DE60312504D1 publication Critical patent/DE60312504D1/de
Application granted granted Critical
Publication of DE60312504T2 publication Critical patent/DE60312504T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4409—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber characterised by sealing means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/22—Evaporating by bringing a thin layer of the liquid into contact with a heated surface
    • B01D1/222—In rotating vessels; vessels with movable parts
    • B01D1/223—In rotating vessels; vessels with movable parts containing a rotor
    • B01D1/225—In rotating vessels; vessels with movable parts containing a rotor with blades or scrapers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/22—Evaporating by bringing a thin layer of the liquid into contact with a heated surface
    • B01D1/222—In rotating vessels; vessels with movable parts
    • B01D1/228—In rotating vessels; vessels with movable parts horizontally placed cylindrical container or drum
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Physical Vapour Deposition (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
DE60312504T 2002-03-29 2003-03-19 Verfahren und vorrichtung zur darstellung dampfförmiger reagenzien für die chemische abscheidung aus der dampfphase Expired - Lifetime DE60312504T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US36911002P 2002-03-29 2002-03-29
US369110P 2002-03-29
PCT/US2003/008414 WO2003085164A1 (en) 2002-03-29 2003-03-19 Method and apparatus for preparing vaporized reactants for chemical vapor deposition

Publications (2)

Publication Number Publication Date
DE60312504D1 true DE60312504D1 (de) 2007-04-26
DE60312504T2 DE60312504T2 (de) 2007-11-22

Family

ID=28791925

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60312504T Expired - Lifetime DE60312504T2 (de) 2002-03-29 2003-03-19 Verfahren und vorrichtung zur darstellung dampfförmiger reagenzien für die chemische abscheidung aus der dampfphase

Country Status (12)

Country Link
US (2) US6827974B2 (de)
EP (1) EP1501964B1 (de)
JP (1) JP4317459B2 (de)
KR (1) KR20040101358A (de)
CN (1) CN100443630C (de)
AT (1) ATE356894T1 (de)
AU (1) AU2003218262A1 (de)
BR (1) BR0308846A (de)
DE (1) DE60312504T2 (de)
MX (1) MXPA04009247A (de)
RU (1) RU2303078C2 (de)
WO (1) WO2003085164A1 (de)

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US7118783B2 (en) * 2002-06-26 2006-10-10 Micron Technology, Inc. Methods and apparatus for vapor processing of micro-device workpieces
US8133554B2 (en) 2004-05-06 2012-03-13 Micron Technology, Inc. Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces
EP1747578A1 (de) * 2004-05-18 2007-01-31 Mecharonics Co., Ltd. Verfahren zur bildung einer organischen leuchtschicht
US7699932B2 (en) 2004-06-02 2010-04-20 Micron Technology, Inc. Reactors, systems and methods for depositing thin films onto microfeature workpieces
US20080260539A1 (en) * 2005-10-07 2008-10-23 Aker Kvaerner Subsea As Apparatus and Method For Controlling Supply of Barrier Gas in a Compressor Module
JP2009536144A (ja) * 2006-05-05 2009-10-08 ピルキングトン・グループ・リミテッド 基板上に酸化亜鉛コーティングを堆積させる方法
WO2007130447A2 (en) * 2006-05-05 2007-11-15 Pilkington Group Limited Method for depositing zinc oxide coatings on flat glass
BRPI0716385A2 (pt) * 2006-08-29 2013-01-01 Pilkington Group Ltd E Arkema Inc método para preparar um artigo de vidro revestido com óxido de zinco dopado, de baixa resistividade, método de deposição de vapor quìmico sob pressão atmosférica para preparar um artigo de vidro revestido com óxido de zinco dopado, método de deposição de vapor quìmico sob pressão atmosférica para preparar um artigo revestido com óxido de zinco dopado, e artigo de vidro
FR2927146B1 (fr) * 2008-02-06 2010-03-26 Air Liquide Systeme de chauffage de stockages des gaz liquefies sous pression
DE102010016926A1 (de) 2009-05-16 2010-12-30 Eichler Gmbh & Co.Kg Verfahren und Beschichtungsanlage zur elektrostatischen Lackierung (Pulverbeschichtung) von elektrisch nicht leitenden Teilen
BR112012020085B1 (pt) 2010-02-10 2020-12-01 Dresser-Rand Company aparelho de coleta para um separador e método de separação
US8663483B2 (en) 2010-07-15 2014-03-04 Dresser-Rand Company Radial vane pack for rotary separators
US8673159B2 (en) 2010-07-15 2014-03-18 Dresser-Rand Company Enhanced in-line rotary separator
US8657935B2 (en) 2010-07-20 2014-02-25 Dresser-Rand Company Combination of expansion and cooling to enhance separation
WO2012012143A2 (en) 2010-07-21 2012-01-26 Dresser-Rand Company Multiple modular in-line rotary separator bundle
JP5936144B2 (ja) 2010-09-09 2016-06-15 ドレッサー ランド カンパニーＤｒｅｓｓｅｒ−Ｒａｎｄ Ｃｏｍｐａｎｙ 洗浄可能に制御された排水管
US20120276291A1 (en) * 2011-04-28 2012-11-01 Bird Chester D Methods and Apparatuses for Reducing Gelation of Glass Precursor Materials During Vaporization
WO2013022669A2 (en) 2011-08-05 2013-02-14 3M Innovative Properties Company Systems and methods for processing vapor
US9156041B1 (en) * 2012-05-07 2015-10-13 The United States Of America As Represented By The Secretary Of The Army Dimethylmethylphosphonate vapor generator
US11517831B2 (en) * 2019-06-25 2022-12-06 George Andrew Rabroker Abatement system for pyrophoric chemicals and method of use
CN110965046B (zh) * 2019-12-31 2024-05-28 威海中玻新材料技术研发有限公司 超薄液膜旋离式汽化装置
TW202242184A (zh) * 2020-12-22 2022-11-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 前驅物膠囊、前驅物容器、氣相沉積總成、及將固態前驅物裝載至前驅物容器中之方法

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US3932068A (en) * 1966-10-04 1976-01-13 March Manufacturing Company Magnetically-coupled pump
FR1570922A (de) * 1967-06-22 1969-06-13
US3795386A (en) * 1971-08-16 1974-03-05 Monsanto Co Shaft seal for low and high pressures
JPS5659112A (en) 1979-10-18 1981-05-22 Matsushita Electric Ind Co Ltd Liquid fuel combustor
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US5324540A (en) * 1992-08-17 1994-06-28 Tokyo Electron Limited System and method for supporting and rotating substrates in a process chamber
KR100190310B1 (ko) * 1992-09-03 1999-06-01 모리시따 요오이찌 진공배기장치
JPH06196419A (ja) 1992-12-24 1994-07-15 Canon Inc 化学気相堆積装置及びそれによる半導体装置の製造方法
TW322602B (de) * 1996-04-05 1997-12-11 Ehara Seisakusho Kk
JPH1018041A (ja) * 1996-07-02 1998-01-20 Ebara Corp 液体原料気化装置
JP3717014B2 (ja) 1996-08-06 2005-11-16 富士写真フイルム株式会社 撹拌装置
JP3645682B2 (ja) * 1997-03-18 2005-05-11 三菱電機株式会社 Ｃｕ成膜用ＣＶＤ装置
JPH10339275A (ja) * 1997-06-05 1998-12-22 Toru Imai 軸受装置
FR2779361B1 (fr) 1998-06-05 2000-07-28 Mixel Agitateur a entrainement magnetique
JP3579278B2 (ja) 1999-01-26 2004-10-20 東京エレクトロン株式会社 縦型熱処理装置及びシール装置
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Also Published As

Publication number Publication date
US6827974B2 (en) 2004-12-07
US20050066894A1 (en) 2005-03-31
CN1656248A (zh) 2005-08-17
JP4317459B2 (ja) 2009-08-19
RU2004131823A (ru) 2005-10-10
BR0308846A (pt) 2005-02-01
CN100443630C (zh) 2008-12-17
DE60312504T2 (de) 2007-11-22
AU2003218262A1 (en) 2003-10-20
EP1501964B1 (de) 2007-03-14
KR20040101358A (ko) 2004-12-02
US20030185979A1 (en) 2003-10-02
RU2303078C2 (ru) 2007-07-20
JP2005521796A (ja) 2005-07-21
WO2003085164A1 (en) 2003-10-16
MXPA04009247A (es) 2005-01-25
US7596305B2 (en) 2009-09-29
ATE356894T1 (de) 2007-04-15
EP1501964A1 (de) 2005-02-02

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