DE60312127D1 - Dichtungsanordnung für ein schieberventil - Google Patents

Dichtungsanordnung für ein schieberventil

Info

Publication number
DE60312127D1
DE60312127D1 DE60312127T DE60312127T DE60312127D1 DE 60312127 D1 DE60312127 D1 DE 60312127D1 DE 60312127 T DE60312127 T DE 60312127T DE 60312127 T DE60312127 T DE 60312127T DE 60312127 D1 DE60312127 D1 DE 60312127D1
Authority
DE
Germany
Prior art keywords
seal assembly
sliding valve
sliding
valve
seal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60312127T
Other languages
English (en)
Other versions
DE60312127T2 (de
Inventor
Norihisa Minowa
Kohtaro Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DuPont Performance Elastomers LLC
Original Assignee
DuPont Dow Elastomers LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DuPont Dow Elastomers LLC filed Critical DuPont Dow Elastomers LLC
Publication of DE60312127D1 publication Critical patent/DE60312127D1/de
Application granted granted Critical
Publication of DE60312127T2 publication Critical patent/DE60312127T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/061—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with positioning means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Gasket Seals (AREA)
  • Sliding Valves (AREA)
DE60312127T 2002-01-31 2003-01-29 Dichtungsanordnung für ein schieberventil Expired - Lifetime DE60312127T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US35340002P 2002-01-31 2002-01-31
US353400P 2002-01-31
US34683303A 2003-01-17 2003-01-17
US346833 2003-01-17
PCT/US2003/002533 WO2003064900A1 (en) 2002-01-31 2003-01-29 Gate valve seal assembly

Publications (2)

Publication Number Publication Date
DE60312127D1 true DE60312127D1 (de) 2007-04-12
DE60312127T2 DE60312127T2 (de) 2007-11-15

Family

ID=27668977

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60312127T Expired - Lifetime DE60312127T2 (de) 2002-01-31 2003-01-29 Dichtungsanordnung für ein schieberventil

Country Status (7)

Country Link
US (2) US6932354B2 (de)
EP (1) EP1470351B1 (de)
JP (1) JP4149931B2 (de)
KR (1) KR100909332B1 (de)
DE (1) DE60312127T2 (de)
TW (1) TWI275724B (de)
WO (1) WO2003064900A1 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7040060B2 (en) * 2003-01-23 2006-05-09 Saratoga Spa & Bath, Inc. Mounting elements, mounting arrangements, and methods for mounting liners to structures in pools and spas
JP4430884B2 (ja) * 2003-04-14 2010-03-10 日本バルカー工業株式会社 蟻溝用シール材
JP2005050728A (ja) * 2003-07-30 2005-02-24 Nichias Corp 燃料電池のセパレータ用ゴムガスケット
CN100378377C (zh) * 2004-02-27 2008-04-02 丰田自动车株式会社 密封件
US8648977B2 (en) 2004-06-02 2014-02-11 Applied Materials, Inc. Methods and apparatus for providing a floating seal having an isolated sealing surface for chamber doors
CN1778986B (zh) * 2004-06-02 2015-08-19 应用材料公司 用于密封腔室的方法和装置
US7282097B2 (en) * 2004-06-14 2007-10-16 Applied Materials, Inc. Slit valve door seal
KR101137725B1 (ko) * 2004-10-26 2012-04-24 주성엔지니어링(주) 반도체 제조 장치용 슬롯 밸브
US7070187B2 (en) * 2004-11-09 2006-07-04 Federal-Mogul World Wide, Inc Gasket assembly
US20070092385A1 (en) * 2005-10-20 2007-04-26 Petrie Pe Greg A Pump and valve actuator system and method
JP4774549B2 (ja) * 2006-06-29 2011-09-14 日本バルカー工業株式会社 真空用ゲート弁およびこれに用いられるシール部材
WO2008046048A2 (en) * 2006-10-12 2008-04-17 Parker-Hannifin Corporation Slit valve door assembly
US8104770B2 (en) * 2007-02-01 2012-01-31 Parker-Hannifin Corporation Semiconductor process chamber
KR100892781B1 (ko) * 2007-02-12 2009-04-15 주식회사 휴먼메디텍 진공챔버용 도어
US20080265523A1 (en) * 2007-04-30 2008-10-30 Freudenberg-Nok General Partnership Asymmetric Gasket
US20080315141A1 (en) * 2007-06-25 2008-12-25 Greene, Tweed Of Delaware, Inc. Slit Valve Door
US8991785B2 (en) * 2007-10-26 2015-03-31 Applied Materials, Inc. Methods and apparatus for sealing a slit valve door
US20090184279A1 (en) * 2008-01-23 2009-07-23 Buckhorn Rubber Products, Inc. Wedge and covered insert assembly
WO2010032722A1 (ja) * 2008-09-18 2010-03-25 日本バルカー工業株式会社 シールプレートおよびシールプレートに用いられるシール部材ならびにこれらの製造方法
US20110031702A1 (en) * 2009-08-07 2011-02-10 Wilson D Bruce Polyimide resin gaskets for diss outlet valves
US9010718B2 (en) * 2009-08-10 2015-04-21 Dean Foote Seal assembly for a pressure plate in a blowout preventer
US8225767B2 (en) 2010-03-15 2012-07-24 Tinney Joseph F Positive displacement rotary system
US8623145B2 (en) * 2010-03-25 2014-01-07 Parker-Hannifin Corporation Substrate processing apparatus with composite seal
ITMI20120694A1 (it) * 2012-04-26 2013-10-27 Mib Italiana Spa Valvola di controllo a petali con guarnizione di tenuta per unita' di collegamento separabili per tubi flessibili.
US20130319557A1 (en) * 2012-06-05 2013-12-05 Hunting Energy Services, Inc. Metal Reinforced Seal Plate for Pilot Actuated Spool Valve
KR101493909B1 (ko) 2014-06-10 2015-02-17 김형규 개폐 밸브
JP6908603B2 (ja) 2015-11-11 2021-07-28 グリーン， ツイード テクノロジーズ， インコーポレイテッド 高温最終用途のためのシールリングおよびシールリングアセンブリ
US11867307B1 (en) * 2022-07-28 2024-01-09 Applied Materials, Inc. Multi-piece slit valve gate

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2665461A (en) * 1949-07-30 1954-01-12 Willys Motors Inc Blow plate seal for core blowing machines
US2870987A (en) * 1955-07-08 1959-01-27 Dolphice H Greenwood Gate valve and sealing means therefor
GB1280712A (en) * 1969-10-25 1972-07-05 Glenfield & Kennedy Ltd Improvements in or relating to sealing devices
US4035565A (en) 1975-03-27 1977-07-12 E. I. Du Pont De Nemours And Company Fluoropolymer containing a small amount of bromine-containing olefin units
US4281092A (en) 1978-11-30 1981-07-28 E. I. Du Pont De Nemours And Company Vulcanizable fluorinated copolymers
JPS5871906A (ja) 1981-10-22 1983-04-28 Daikin Ind Ltd 含フツ素弾性状共重合体の製法
AU555553B2 (en) * 1981-10-27 1986-10-02 Arthur Malcolm Bennett Valve member
US4529784A (en) 1983-07-11 1985-07-16 E. I. Du Pont De Nemours And Company Fluorinated copolymers with improved cure site
US5013009A (en) * 1989-08-04 1991-05-07 Goddard Valve Corporation Top entry valve
US5482297A (en) 1995-01-09 1996-01-09 Greene, Tweed Of Delaware, Inc. Seal element for installation in an annular dove-tail groove
US5579718A (en) * 1995-03-31 1996-12-03 Applied Materials, Inc. Slit valve door
EP0872495B1 (de) 1995-12-28 2001-11-14 Daikin Industries, Limited Fluorhaltige, elastische copolymere, härtbare zusammensetzung und daraus hergestellte dichtungsmasse
US5877264A (en) 1996-11-25 1999-03-02 E. I. Du Pont De Nemours And Company Fast-curing perfluoroelastomer composition
US5936060A (en) 1996-11-25 1999-08-10 E. I. Du Pont De Nemours And Company Perfluoroelastomer composition having improved processability
US6089543A (en) 1997-07-11 2000-07-18 Applied Materials, Inc. Two-piece slit valve door with molded-in-place seal for a vacuum processing system
US6089537A (en) * 1999-06-23 2000-07-18 Mks Instruments, Inc. Pendulum valve assembly
US6409149B1 (en) * 2000-06-28 2002-06-25 Mks Instruments, Inc. Dual pendulum valve assembly with valve seat cover

Also Published As

Publication number Publication date
TWI275724B (en) 2007-03-11
TW200302907A (en) 2003-08-16
KR20040079959A (ko) 2004-09-16
KR100909332B1 (ko) 2009-07-24
US6932354B2 (en) 2005-08-23
US20030164596A1 (en) 2003-09-04
EP1470351B1 (de) 2007-02-28
JP2005516169A (ja) 2005-06-02
DE60312127T2 (de) 2007-11-15
EP1470351A1 (de) 2004-10-27
US20050046123A1 (en) 2005-03-03
WO2003064900A1 (en) 2003-08-07
JP4149931B2 (ja) 2008-09-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition