DE60314014D1 - Dichtungsring für eine pendelventilanordnung - Google Patents

Dichtungsring für eine pendelventilanordnung

Info

Publication number
DE60314014D1
DE60314014D1 DE60314014T DE60314014T DE60314014D1 DE 60314014 D1 DE60314014 D1 DE 60314014D1 DE 60314014 T DE60314014 T DE 60314014T DE 60314014 T DE60314014 T DE 60314014T DE 60314014 D1 DE60314014 D1 DE 60314014D1
Authority
DE
Germany
Prior art keywords
valve assembly
seal ring
pendulum valve
pendulum
seal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60314014T
Other languages
English (en)
Other versions
DE60314014T2 (de
Inventor
Paul D Lucas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Publication of DE60314014D1 publication Critical patent/DE60314014D1/de
Application granted granted Critical
Publication of DE60314014T2 publication Critical patent/DE60314014T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K25/00—Details relating to contact between valve members and seats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F16K3/06—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F16K3/10—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members with special arrangements for separating the sealing faces or for pressing them together
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
DE60314014T 2003-02-20 2003-12-24 Dichtungsring für eine pendelventilanordnung Expired - Lifetime DE60314014T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US369952 1995-01-09
US10/369,952 US6863256B2 (en) 2003-02-20 2003-02-20 Seal ring for pendulum valve assembly
PCT/US2003/041268 WO2004074720A2 (en) 2003-02-20 2003-12-24 Seal ring for pendulum valve assembly

Publications (2)

Publication Number Publication Date
DE60314014D1 true DE60314014D1 (de) 2007-07-05
DE60314014T2 DE60314014T2 (de) 2008-01-17

Family

ID=32868130

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60314014T Expired - Lifetime DE60314014T2 (de) 2003-02-20 2003-12-24 Dichtungsring für eine pendelventilanordnung

Country Status (6)

Country Link
US (1) US6863256B2 (de)
EP (1) EP1595091B1 (de)
JP (1) JP4421480B2 (de)
KR (1) KR100891032B1 (de)
DE (1) DE60314014T2 (de)
WO (1) WO2004074720A2 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7278444B2 (en) * 2005-02-22 2007-10-09 Mks Instruments, Inc. Valve assembly having improved pump-down performance
CN100455856C (zh) * 2007-04-02 2009-01-28 石家庄阀门一厂股份有限公司 眼镜阀的自动补偿夹紧密封装置
ITTO20080125A1 (it) * 2008-02-19 2008-05-20 Roberto Ravetti Valvola piatta ad ingombro ridotto
US8607370B2 (en) * 2008-10-03 2013-12-17 B/E Aerospace, Inc. Flush valve and vacuum generator for vacuum waste system
TW201124655A (en) * 2009-09-03 2011-07-16 Ulvac Inc Gate valve
JP2013011289A (ja) * 2011-06-28 2013-01-17 Tokyo Electron Ltd ゲートバルブ及びそれを用いた基板処理システム
US8833383B2 (en) 2011-07-20 2014-09-16 Ferrotec (Usa) Corporation Multi-vane throttle valve
KR101528458B1 (ko) * 2013-01-18 2015-06-18 (주) 유앤아이솔루션 슬라이딩 역압 차단 밸브
JP6507516B2 (ja) * 2014-08-06 2019-05-08 株式会社島津製作所 真空バルブ
WO2018066554A1 (ja) * 2016-10-04 2018-04-12 株式会社アルバック 仕切弁
US10197166B2 (en) * 2016-12-12 2019-02-05 Sumitomo Heavy Industries, Ltd. Vacuum gate valve
JP2018112259A (ja) * 2017-01-12 2018-07-19 株式会社島津製作所 スライドバルブ
CN106979351B (zh) * 2017-05-18 2019-04-26 浙江工贸职业技术学院 一种摆动式进料阀
CN106969160B (zh) * 2017-05-22 2019-07-05 张翼 一种摆动阀
KR102151172B1 (ko) * 2018-02-14 2020-09-02 프리시스 주식회사 팬듈럼 게이트 밸브
WO2019212226A1 (ko) * 2018-04-30 2019-11-07 티에스케이 주식회사 스팀트랩
US10676673B2 (en) * 2018-11-13 2020-06-09 Deltavalve, Llc Systems and methods for valve sealing
CN112834277B (zh) * 2019-11-22 2023-08-29 北方工业大学 一种可连续使用的流体取送样密闭接口组件
CN114922994B (zh) * 2022-06-30 2023-09-15 靖江佳佳精密机械科技有限公司 一种气驱动式密封真空阀门

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5577707A (en) * 1995-12-18 1996-11-26 Vat Holding Ag Slide valve
US5873562A (en) * 1996-01-29 1999-02-23 Vat Holding Ag Control apparatus for controlling gas flow in a molecular region
US6250688B1 (en) * 1998-06-01 2001-06-26 Micron Technology, Inc. Ramp-lock lifting device
US6089537A (en) * 1999-06-23 2000-07-18 Mks Instruments, Inc. Pendulum valve assembly
US6161576A (en) * 1999-06-23 2000-12-19 Mks Instruments, Inc. Integrated turbo pump and control valve system
US6409149B1 (en) * 2000-06-28 2002-06-25 Mks Instruments, Inc. Dual pendulum valve assembly with valve seat cover
US6328051B1 (en) * 2000-06-28 2001-12-11 Mks Instruments, Inc. Dual pendulum valve assembly

Also Published As

Publication number Publication date
KR100891032B1 (ko) 2009-03-31
US20040164264A1 (en) 2004-08-26
EP1595091A2 (de) 2005-11-16
US6863256B2 (en) 2005-03-08
DE60314014T2 (de) 2008-01-17
JP2006514237A (ja) 2006-04-27
EP1595091B1 (de) 2007-05-23
WO2004074720A3 (en) 2005-03-10
WO2004074720A2 (en) 2004-09-02
JP4421480B2 (ja) 2010-02-24
KR20050117522A (ko) 2005-12-14
EP1595091A4 (de) 2006-05-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition