DE60237349D1 - Verfahren zur herstellung eines druckkopfs mit einem elektrostatischen stellglied - Google Patents

Verfahren zur herstellung eines druckkopfs mit einem elektrostatischen stellglied

Info

Publication number
DE60237349D1
DE60237349D1 DE60237349T DE60237349T DE60237349D1 DE 60237349 D1 DE60237349 D1 DE 60237349D1 DE 60237349 T DE60237349 T DE 60237349T DE 60237349 T DE60237349 T DE 60237349T DE 60237349 D1 DE60237349 D1 DE 60237349D1
Authority
DE
Germany
Prior art keywords
platenter
electrostatic
producing
print head
print
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60237349T
Other languages
English (en)
Inventor
Toru Tanikawa
Iwao Ushinohama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Application granted granted Critical
Publication of DE60237349D1 publication Critical patent/DE60237349D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/22Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of impact or pressure on a printing material or impression-transfer material
    • B41J2/23Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of impact or pressure on a printing material or impression-transfer material using print wires
    • B41J2/235Print head assemblies
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1628Manufacturing processes etching dry etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1629Manufacturing processes etching wet etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1635Manufacturing processes dividing the wafer into individual chips
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1637Manufacturing processes molding
    • B41J2/1639Manufacturing processes molding sacrificial molding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1645Manufacturing processes thin film formation thin film formation by spincoating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1646Manufacturing processes thin film formation thin film formation by sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2002/043Electrostatic transducer
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49401Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Electrophotography Using Other Than Carlson'S Method (AREA)
DE60237349T 2001-02-16 2002-02-14 Verfahren zur herstellung eines druckkopfs mit einem elektrostatischen stellglied Expired - Lifetime DE60237349D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001039713A JP4221638B2 (ja) 2001-02-16 2001-02-16 プリンタヘッドの製造方法及び静電アクチュエータの製造方法
PCT/JP2002/001230 WO2002064373A1 (fr) 2001-02-16 2002-02-14 Procede de fabrication d'une tete d'impression, et procede de fabrication d'un actionneur electrostatique

Publications (1)

Publication Number Publication Date
DE60237349D1 true DE60237349D1 (de) 2010-09-30

Family

ID=18902440

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60237349T Expired - Lifetime DE60237349D1 (de) 2001-02-16 2002-02-14 Verfahren zur herstellung eines druckkopfs mit einem elektrostatischen stellglied

Country Status (7)

Country Link
US (2) US7185972B2 (de)
EP (1) EP1361065B1 (de)
JP (1) JP4221638B2 (de)
KR (1) KR20030077626A (de)
CN (1) CN1246151C (de)
DE (1) DE60237349D1 (de)
WO (1) WO2002064373A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7416281B2 (en) 2002-08-06 2008-08-26 Ricoh Company, Ltd. Electrostatic actuator formed by a semiconductor manufacturing process
JP2005262686A (ja) * 2004-03-18 2005-09-29 Ricoh Co Ltd アクチュエータ、液滴吐出ヘッド、インクカートリッジ、インクジェット記録装置、マイクロポンプ、光変調デバイス、基板
JP2006082448A (ja) * 2004-09-17 2006-03-30 Ricoh Co Ltd 液滴吐出ヘッドとインクカートリッジと画像記録装置及び液滴吐出ヘッドの製造方法
JP4730162B2 (ja) * 2006-03-24 2011-07-20 株式会社日立製作所 超音波送受信デバイス,超音波探触子およびその製造方法
US7735225B2 (en) * 2007-03-30 2010-06-15 Xerox Corporation Method of manufacturing a cast-in place ink feed structure using encapsulant
US7677706B2 (en) * 2007-08-16 2010-03-16 Hewlett-Packard Development Company, L.P. Electrostatic actuator and fabrication method
CN102455596B (zh) * 2010-10-28 2013-05-08 京东方科技集团股份有限公司 光刻胶、离地剥离的方法和tft阵列基板的制作方法
CN103085479B (zh) * 2013-02-04 2015-12-23 珠海赛纳打印科技股份有限公司 一种墨水喷头及其制造方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3473084B2 (ja) * 1994-02-08 2003-12-02 セイコーエプソン株式会社 インクジェットヘッド
US5983486A (en) * 1995-03-10 1999-11-16 Canon Kabushiki Kaisha Process for producing ink jet head
JP3637633B2 (ja) * 1995-05-10 2005-04-13 ブラザー工業株式会社 インクジェット式印字ヘッド及びその製造方法
US6110754A (en) * 1997-07-15 2000-08-29 Silverbrook Research Pty Ltd Method of manufacture of a thermal elastic rotary impeller ink jet print head
WO1999034979A1 (fr) * 1998-01-09 1999-07-15 Seiko Epson Corporation Tete d'imprimante a jet d'encre, son procede de fabrication et imprimante a jet d'encre
JPH11300650A (ja) 1998-04-21 1999-11-02 Matsuda Asutec Kk 衝撃工具の工具ビット支持構造
JP3867399B2 (ja) 1998-05-06 2007-01-10 コニカミノルタホールディングス株式会社 インクジェット記録装置
JP3659811B2 (ja) * 1998-08-07 2005-06-15 株式会社リコー インクジェットヘッド
US6662448B2 (en) * 1998-10-15 2003-12-16 Xerox Corporation Method of fabricating a micro-electro-mechanical fluid ejector
US6357865B1 (en) * 1998-10-15 2002-03-19 Xerox Corporation Micro-electro-mechanical fluid ejector and method of operating same
US6367915B1 (en) * 2000-11-28 2002-04-09 Xerox Corporation Micromachined fluid ejector systems and methods
JP2002240274A (ja) * 2001-02-16 2002-08-28 Sony Corp プリンタヘッド
JP2003276194A (ja) * 2002-03-22 2003-09-30 Ricoh Co Ltd 静電アクチュエータ、液滴吐出ヘッド及びインクジェット記録装置

Also Published As

Publication number Publication date
US7185972B2 (en) 2007-03-06
CN1498167A (zh) 2004-05-19
WO2002064373A1 (fr) 2002-08-22
US20070002100A1 (en) 2007-01-04
CN1246151C (zh) 2006-03-22
JP4221638B2 (ja) 2009-02-12
US20040115844A1 (en) 2004-06-17
US7222944B2 (en) 2007-05-29
KR20030077626A (ko) 2003-10-01
EP1361065B1 (de) 2010-08-18
EP1361065A4 (de) 2008-09-17
JP2002240302A (ja) 2002-08-28
EP1361065A1 (de) 2003-11-12

Similar Documents

Publication Publication Date Title
DE60331453D1 (de) Kopfs mit elektrostatischer anziehung, verfahren zur herstellung einer düsenplatte
DE60303227D1 (de) Verfahren zur Herstellung eines Tintenstrahlkopfes
DE60224165D1 (de) Verfahren zur herstellung eines thermoplastischen harzes
DE50306383D1 (de) Verfahren zur herstellung einer borstenstruktur an einem träger
DE50303605D1 (de) Verfahren zur herstellung eines pressgehärteten bauteils
DE59809873D1 (de) Verfahren zur herstellung eines lichtemittierenden bauelementes
ATA10622000A (de) Verfahren zur herstellung eines haarstreifens
DE69919742D1 (de) Verfahren zur herstellung eines bauteiles
ATE414058T1 (de) Verfahren zur herstellung eines sulfinyl- acetamids
ATE316434T1 (de) Verfahren zur herstellung eines formteiles
DE60224265D1 (de) Verfahren zur herstellung eines mit flanschen versehenen formteils
DE60218773D1 (de) Verfahren zur Herstellung eines Mehrschichtmaterials
DE60222896D1 (de) Verfahren zur herstellung eines polyurethan-weichschaumstoffs
DE50001155D1 (de) Verfahren zur Herstellung eines Stutzens
DE602004020699D1 (de) Verfahren zur Herstellung eines Lackfilms
DE60212643D1 (de) Verfahren zur herstellung eines reifenkomponentenglieds
DE60045314D1 (de) Verfahren zur herstellung eines polyimidharzes
ATE466016T1 (de) Verfahren for zur herstellung eines 14- hydroxynormorphinon-derivats
DE50304619D1 (de) Verfahren zur herstellung eines bauteils
DE69934452D1 (de) Verfahren zur Herstellung eines Flüssigkeitsausstosskopfes
DE50212805D1 (de) Verfahren zur Herstellung eines Querträgers
DE60020308D1 (de) Verfahren zur herstellung eines tintenstrahldruckkopfes
DE60237349D1 (de) Verfahren zur herstellung eines druckkopfs mit einem elektrostatischen stellglied
DE69810815T2 (de) Verfahren zur herstellung eines ketimins
DE60016026D1 (de) Verfahren zur herstellung eines verformten oberflächenmontierten widerstandes