DE60237349D1 - Verfahren zur herstellung eines druckkopfs mit einem elektrostatischen stellglied - Google Patents
Verfahren zur herstellung eines druckkopfs mit einem elektrostatischen stellgliedInfo
- Publication number
- DE60237349D1 DE60237349D1 DE60237349T DE60237349T DE60237349D1 DE 60237349 D1 DE60237349 D1 DE 60237349D1 DE 60237349 T DE60237349 T DE 60237349T DE 60237349 T DE60237349 T DE 60237349T DE 60237349 D1 DE60237349 D1 DE 60237349D1
- Authority
- DE
- Germany
- Prior art keywords
- platenter
- electrostatic
- producing
- print head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/22—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of impact or pressure on a printing material or impression-transfer material
- B41J2/23—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of impact or pressure on a printing material or impression-transfer material using print wires
- B41J2/235—Print head assemblies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2002/043—Electrostatic transducer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Electrophotography Using Other Than Carlson'S Method (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001039713A JP4221638B2 (ja) | 2001-02-16 | 2001-02-16 | プリンタヘッドの製造方法及び静電アクチュエータの製造方法 |
PCT/JP2002/001230 WO2002064373A1 (fr) | 2001-02-16 | 2002-02-14 | Procede de fabrication d'une tete d'impression, et procede de fabrication d'un actionneur electrostatique |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60237349D1 true DE60237349D1 (de) | 2010-09-30 |
Family
ID=18902440
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60237349T Expired - Lifetime DE60237349D1 (de) | 2001-02-16 | 2002-02-14 | Verfahren zur herstellung eines druckkopfs mit einem elektrostatischen stellglied |
Country Status (7)
Country | Link |
---|---|
US (2) | US7185972B2 (de) |
EP (1) | EP1361065B1 (de) |
JP (1) | JP4221638B2 (de) |
KR (1) | KR20030077626A (de) |
CN (1) | CN1246151C (de) |
DE (1) | DE60237349D1 (de) |
WO (1) | WO2002064373A1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7416281B2 (en) | 2002-08-06 | 2008-08-26 | Ricoh Company, Ltd. | Electrostatic actuator formed by a semiconductor manufacturing process |
JP2005262686A (ja) * | 2004-03-18 | 2005-09-29 | Ricoh Co Ltd | アクチュエータ、液滴吐出ヘッド、インクカートリッジ、インクジェット記録装置、マイクロポンプ、光変調デバイス、基板 |
JP2006082448A (ja) * | 2004-09-17 | 2006-03-30 | Ricoh Co Ltd | 液滴吐出ヘッドとインクカートリッジと画像記録装置及び液滴吐出ヘッドの製造方法 |
JP4730162B2 (ja) * | 2006-03-24 | 2011-07-20 | 株式会社日立製作所 | 超音波送受信デバイス,超音波探触子およびその製造方法 |
US7735225B2 (en) * | 2007-03-30 | 2010-06-15 | Xerox Corporation | Method of manufacturing a cast-in place ink feed structure using encapsulant |
US7677706B2 (en) * | 2007-08-16 | 2010-03-16 | Hewlett-Packard Development Company, L.P. | Electrostatic actuator and fabrication method |
CN102455596B (zh) * | 2010-10-28 | 2013-05-08 | 京东方科技集团股份有限公司 | 光刻胶、离地剥离的方法和tft阵列基板的制作方法 |
CN103085479B (zh) * | 2013-02-04 | 2015-12-23 | 珠海赛纳打印科技股份有限公司 | 一种墨水喷头及其制造方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3473084B2 (ja) * | 1994-02-08 | 2003-12-02 | セイコーエプソン株式会社 | インクジェットヘッド |
US5983486A (en) * | 1995-03-10 | 1999-11-16 | Canon Kabushiki Kaisha | Process for producing ink jet head |
JP3637633B2 (ja) * | 1995-05-10 | 2005-04-13 | ブラザー工業株式会社 | インクジェット式印字ヘッド及びその製造方法 |
US6110754A (en) * | 1997-07-15 | 2000-08-29 | Silverbrook Research Pty Ltd | Method of manufacture of a thermal elastic rotary impeller ink jet print head |
WO1999034979A1 (fr) * | 1998-01-09 | 1999-07-15 | Seiko Epson Corporation | Tete d'imprimante a jet d'encre, son procede de fabrication et imprimante a jet d'encre |
JPH11300650A (ja) | 1998-04-21 | 1999-11-02 | Matsuda Asutec Kk | 衝撃工具の工具ビット支持構造 |
JP3867399B2 (ja) | 1998-05-06 | 2007-01-10 | コニカミノルタホールディングス株式会社 | インクジェット記録装置 |
JP3659811B2 (ja) * | 1998-08-07 | 2005-06-15 | 株式会社リコー | インクジェットヘッド |
US6662448B2 (en) * | 1998-10-15 | 2003-12-16 | Xerox Corporation | Method of fabricating a micro-electro-mechanical fluid ejector |
US6357865B1 (en) * | 1998-10-15 | 2002-03-19 | Xerox Corporation | Micro-electro-mechanical fluid ejector and method of operating same |
US6367915B1 (en) * | 2000-11-28 | 2002-04-09 | Xerox Corporation | Micromachined fluid ejector systems and methods |
JP2002240274A (ja) * | 2001-02-16 | 2002-08-28 | Sony Corp | プリンタヘッド |
JP2003276194A (ja) * | 2002-03-22 | 2003-09-30 | Ricoh Co Ltd | 静電アクチュエータ、液滴吐出ヘッド及びインクジェット記録装置 |
-
2001
- 2001-02-16 JP JP2001039713A patent/JP4221638B2/ja not_active Expired - Fee Related
-
2002
- 2002-02-14 US US10/467,975 patent/US7185972B2/en not_active Expired - Fee Related
- 2002-02-14 DE DE60237349T patent/DE60237349D1/de not_active Expired - Lifetime
- 2002-02-14 KR KR10-2003-7010750A patent/KR20030077626A/ko active Search and Examination
- 2002-02-14 WO PCT/JP2002/001230 patent/WO2002064373A1/ja active Application Filing
- 2002-02-14 CN CNB028067355A patent/CN1246151C/zh not_active Expired - Fee Related
- 2002-02-14 EP EP02712341A patent/EP1361065B1/de not_active Expired - Lifetime
-
2006
- 2006-09-07 US US11/470,769 patent/US7222944B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US7185972B2 (en) | 2007-03-06 |
CN1498167A (zh) | 2004-05-19 |
WO2002064373A1 (fr) | 2002-08-22 |
US20070002100A1 (en) | 2007-01-04 |
CN1246151C (zh) | 2006-03-22 |
JP4221638B2 (ja) | 2009-02-12 |
US20040115844A1 (en) | 2004-06-17 |
US7222944B2 (en) | 2007-05-29 |
KR20030077626A (ko) | 2003-10-01 |
EP1361065B1 (de) | 2010-08-18 |
EP1361065A4 (de) | 2008-09-17 |
JP2002240302A (ja) | 2002-08-28 |
EP1361065A1 (de) | 2003-11-12 |
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