DE60220372T2 - Herstellung modulierten Lichts mit einem integrierten Modul - Google Patents
Herstellung modulierten Lichts mit einem integrierten Modul Download PDFInfo
- Publication number
- DE60220372T2 DE60220372T2 DE60220372T DE60220372T DE60220372T2 DE 60220372 T2 DE60220372 T2 DE 60220372T2 DE 60220372 T DE60220372 T DE 60220372T DE 60220372 T DE60220372 T DE 60220372T DE 60220372 T2 DE60220372 T2 DE 60220372T2
- Authority
- DE
- Germany
- Prior art keywords
- electro
- substrate
- optical
- light
- modulated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title description 22
- 239000000758 substrate Substances 0.000 claims description 89
- 230000003287 optical effect Effects 0.000 claims description 79
- 238000000034 method Methods 0.000 claims description 25
- 230000005684 electric field Effects 0.000 claims description 6
- 229910013553 LiNO Inorganic materials 0.000 claims description 4
- 239000000463 material Substances 0.000 description 26
- 230000000712 assembly Effects 0.000 description 13
- 238000000429 assembly Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 11
- 238000010894 electron beam technology Methods 0.000 description 11
- 230000005540 biological transmission Effects 0.000 description 6
- 238000004891 communication Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 230000003542 behavioural effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
- H01S5/0265—Intensity modulators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/42—Arrays of surface emitting lasers
- H01S5/423—Arrays of surface emitting lasers having a vertical cavity
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Semiconductor Lasers (AREA)
- Optical Couplings Of Light Guides (AREA)
- Optical Integrated Circuits (AREA)
- Optical Communication System (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/103,925 US6894273B2 (en) | 2002-03-22 | 2002-03-22 | Systems and methods for producing modulated light beams |
| US103925 | 2002-03-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60220372D1 DE60220372D1 (de) | 2007-07-12 |
| DE60220372T2 true DE60220372T2 (de) | 2007-10-04 |
Family
ID=27788381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60220372T Expired - Lifetime DE60220372T2 (de) | 2002-03-22 | 2002-11-05 | Herstellung modulierten Lichts mit einem integrierten Modul |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6894273B2 (enExample) |
| EP (1) | EP1347322B1 (enExample) |
| JP (1) | JP2003302611A (enExample) |
| DE (1) | DE60220372T2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2224899B1 (es) * | 2004-10-20 | 2006-03-16 | Ingenieria De Encofrados Y Servicios, S.L. | Cierre lateral para andamio de fachada. |
| US7526009B2 (en) * | 2005-05-07 | 2009-04-28 | Samsung Electronics Co., Ltd. | End-pumped vertical external cavity surface emitting laser |
| TW200841541A (en) * | 2007-04-04 | 2008-10-16 | Amtran Technology Co Ltd | Package structure of optical-element |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4195226A (en) * | 1975-03-07 | 1980-03-25 | Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. | Luminescent material and preparation and use thereof |
| US4274028A (en) * | 1978-10-05 | 1981-06-16 | W. H. Brady Company | Ultraviolet light generation |
| US5115445A (en) * | 1988-02-02 | 1992-05-19 | Massachusetts Institute Of Technology | Microchip laser array |
| US5621272A (en) * | 1995-05-30 | 1997-04-15 | Texas Instruments Incorporated | Field emission device with over-etched gate dielectric |
| FR2751796B1 (fr) * | 1996-07-26 | 1998-08-28 | Commissariat Energie Atomique | Microlaser soilde, a pompage optique par laser semi-conducteur a cavite verticale |
| US5939773A (en) * | 1996-08-05 | 1999-08-17 | Motorola, Inc. | Semiconductor laser package including a lead frame and plastic resin housing |
| US6370290B1 (en) * | 1997-09-19 | 2002-04-09 | Uniphase Corporation | Integrated wavelength-select transmitter |
| DE19922521A1 (de) * | 1999-05-15 | 2000-11-16 | Bosch Gmbh Robert | Optischer Sender |
| US6424669B1 (en) * | 1999-10-29 | 2002-07-23 | E20 Communications, Inc. | Integrated optically pumped vertical cavity surface emitting laser |
-
2002
- 2002-03-22 US US10/103,925 patent/US6894273B2/en not_active Expired - Lifetime
- 2002-11-05 DE DE60220372T patent/DE60220372T2/de not_active Expired - Lifetime
- 2002-11-05 EP EP02024659A patent/EP1347322B1/en not_active Expired - Lifetime
-
2003
- 2003-03-18 JP JP2003074062A patent/JP2003302611A/ja not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| EP1347322A2 (en) | 2003-09-24 |
| EP1347322B1 (en) | 2007-05-30 |
| US6894273B2 (en) | 2005-05-17 |
| JP2003302611A (ja) | 2003-10-24 |
| DE60220372D1 (de) | 2007-07-12 |
| US20030178553A1 (en) | 2003-09-25 |
| EP1347322A3 (en) | 2004-06-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8328 | Change in the person/name/address of the agent |
Representative=s name: DILG HAEUSLER SCHINDELMANN PATENTANWALTSGESELLSCHA |