DE60214791D1 - Hydrostatisches Lager und damit ausgestattete Trägervorrichtung - Google Patents

Hydrostatisches Lager und damit ausgestattete Trägervorrichtung

Info

Publication number
DE60214791D1
DE60214791D1 DE60214791T DE60214791T DE60214791D1 DE 60214791 D1 DE60214791 D1 DE 60214791D1 DE 60214791 T DE60214791 T DE 60214791T DE 60214791 T DE60214791 T DE 60214791T DE 60214791 D1 DE60214791 D1 DE 60214791D1
Authority
DE
Germany
Prior art keywords
device equipped
carrier device
hydrostatic bearing
equipped therewith
therewith
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60214791T
Other languages
English (en)
Other versions
DE60214791T2 (de
Inventor
Choshoku Sai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE60214791D1 publication Critical patent/DE60214791D1/de
Publication of DE60214791T2 publication Critical patent/DE60214791T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • F16C32/0666—Details of hydrostatic bearings independent of fluid supply or direction of load of bearing pads
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
    • F16C32/0692—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for axial load only
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
    • F16C32/0696—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for both radial and axial load
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/72—Sealings
    • F16C33/74—Sealings of sliding-contact bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2300/00—Application independent of particular apparatuses
    • F16C2300/40—Application independent of particular apparatuses related to environment, i.e. operating conditions
    • F16C2300/62—Application independent of particular apparatuses related to environment, i.e. operating conditions low pressure, e.g. elements operating under vacuum conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Small-Scale Networks (AREA)
DE60214791T 2001-05-25 2002-05-22 Hydrostatisches Lager und damit ausgestattete Trägervorrichtung Expired - Lifetime DE60214791T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001156463 2001-05-25
JP2001156463A JP2002349569A (ja) 2001-05-25 2001-05-25 静圧軸受装置及びそれを用いたステージ装置

Publications (2)

Publication Number Publication Date
DE60214791D1 true DE60214791D1 (de) 2006-11-02
DE60214791T2 DE60214791T2 (de) 2007-02-01

Family

ID=19000467

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60214791T Expired - Lifetime DE60214791T2 (de) 2001-05-25 2002-05-22 Hydrostatisches Lager und damit ausgestattete Trägervorrichtung

Country Status (5)

Country Link
US (1) US7232257B2 (de)
EP (1) EP1260720B1 (de)
JP (1) JP2002349569A (de)
KR (1) KR100495877B1 (de)
DE (1) DE60214791T2 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3968713B2 (ja) * 2003-06-30 2007-08-29 ソニー株式会社 フラットディスプレイ装置及びフラットディスプレイ装置の試験方法
JP2005032818A (ja) * 2003-07-08 2005-02-03 Canon Inc 静圧軸受、位置決め装置、並びに露光装置
JP4455004B2 (ja) 2003-10-16 2010-04-21 キヤノン株式会社 流体軸受装置およびそれを用いたステージ装置
JP2005155658A (ja) * 2003-11-20 2005-06-16 Canon Inc 静圧気体軸受装置およびそれを用いたステージ装置
WO2006023595A2 (en) 2004-08-18 2006-03-02 New Way Machine Components, Inc. Moving vacuum chamber stage with air bearing and differentially pumped grooves
JP5149627B2 (ja) * 2005-12-15 2013-02-20 京セラ株式会社 静圧スライダ
KR100776239B1 (ko) * 2006-01-16 2007-11-16 엘지전자 주식회사 검출센서 정렬장치
WO2007108399A1 (ja) * 2006-03-22 2007-09-27 Kyocera Corporation 静圧スライダ、これを備えた搬送装置および処理装置
US8282281B2 (en) * 2007-02-14 2012-10-09 Integrated Dynamics Engineering Gmbh Air bearing with consideration of high-frequency resonances
JP4445528B2 (ja) * 2007-07-11 2010-04-07 住友重機械工業株式会社 静圧軸受
US8427021B2 (en) * 2009-02-04 2013-04-23 Andrew J. Devitt Hydrostatic bearing made of magnetic material which is also used as a motor magnet
EP2249378B1 (de) 2009-03-23 2015-09-30 Advantest Corporation Bühnenreinigungsverfahren
US9312159B2 (en) 2009-06-09 2016-04-12 Nikon Corporation Transport apparatus and exposure apparatus
JP5827827B2 (ja) * 2010-06-29 2015-12-02 エーエスエムエル ネザーランズ ビー．ブイ． アクチュエータ
TWI516336B (zh) * 2012-10-23 2016-01-11 財團法人工業技術研究院 液靜壓工作裝置
US9527107B2 (en) * 2013-01-11 2016-12-27 International Business Machines Corporation Method and apparatus to apply material to a surface
CN103291741A (zh) * 2013-05-21 2013-09-11 湖北新火炬科技股份有限公司 防高温长寿命的货车轮毂轴承单元
CN103836070B (zh) * 2014-03-18 2016-07-13 华中科技大学 一种主动式气浮支承装置
CN105537970B (zh) * 2014-10-28 2018-07-27 东芝机械株式会社 机床的引导机构以及机床
JP6559937B2 (ja) * 2014-10-28 2019-08-14 東芝機械株式会社 油静圧案内機構および工作機械
WO2021194782A1 (en) * 2020-03-27 2021-09-30 Corning Incorporated Positioning devices for radially positioning substrates with respect to an air bearing device
CN111927886B (zh) * 2020-07-15 2021-11-09 杭州电子科技大学 基于静压气浮轴承的aacmm高精度关节的支承方法
JP7465243B2 (ja) * 2021-06-28 2024-04-10 日本電子株式会社 ステージ装置および電子ビーム描画装置
CN113833765B (zh) * 2021-10-14 2024-02-06 江苏集萃精凯高端装备技术有限公司 一种刚度可调的气浮导轨

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH496905A (de) * 1965-12-23 1970-09-30 Oerlikon Buehrle Holding Ag Einstellbares hydrostatisches Gleitlager
DD211153A1 (de) * 1982-11-03 1984-07-04 Werkzeugmasch Forschzent Hydrostatisch lastkompensierte lagerung, vorzugsweise mehrerer uebereinander angeordneter tischfuehrungen
KR900003793B1 (ko) 1986-08-25 1990-05-31 가부시키가이샤 히타치세이사쿠쇼 액셜피스톤기계의 스러스트 정압베어링 지지장치
US4726689A (en) 1986-10-22 1988-02-23 Eclipse Ion Technology, Inc. Linear gas bearing with integral vacuum seal for use in serial process ion implantation equipment
JP2587227B2 (ja) * 1987-02-06 1997-03-05 キヤノン株式会社 気体軸受装置
DE3831676C1 (de) 1988-09-17 1990-01-04 Ina Linear Technik Ohg, 6650 Homburg, De
EP0361026A1 (de) * 1988-09-17 1990-04-04 Ina Linear Technik Ohg Hydrostatische Lagerung
JP2775454B2 (ja) * 1989-02-14 1998-07-16 キヤノン株式会社 真空用エアーベアリング
DE3909204A1 (de) * 1989-03-21 1990-09-27 Daimler Benz Ag Hydrostatisches stuetzlager
US5238308A (en) * 1992-05-04 1993-08-24 Rockwell International Corporation Adjustable gap hydrostatic element
JP3361677B2 (ja) 1995-12-20 2003-01-07 東芝機械株式会社 静圧軸受装置
JP3715742B2 (ja) * 1997-03-19 2005-11-16 キヤノン株式会社 静圧ステージ
JP3526174B2 (ja) * 1997-04-14 2004-05-10 キヤノン株式会社 半導体露光装置およびデバイス製造方法
JPH11108059A (ja) * 1997-10-07 1999-04-20 Canon Inc 気体軸受装置およびステージ装置
JPH11191585A (ja) * 1997-12-26 1999-07-13 Canon Inc ステージ装置、およびこれを用いた露光装置、ならびにデバイス製造方法
DE19826519C2 (de) * 1998-06-15 2000-05-18 Freundeskreis Des Lehrstuhles Hydrostatische Führung
JP2000283163A (ja) * 1999-01-28 2000-10-13 Toto Ltd 静圧気体軸受構造

Also Published As

Publication number Publication date
EP1260720A2 (de) 2002-11-27
KR100495877B1 (ko) 2005-06-16
JP2002349569A (ja) 2002-12-04
DE60214791T2 (de) 2007-02-01
US7232257B2 (en) 2007-06-19
KR20020090336A (ko) 2002-12-02
EP1260720B1 (de) 2006-09-20
US20020176061A1 (en) 2002-11-28
EP1260720A3 (de) 2003-07-02

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