DE60213001T2 - Gerät zum verteilen von flüssigkeiten und grundplatte - Google Patents

Gerät zum verteilen von flüssigkeiten und grundplatte Download PDF

Info

Publication number
DE60213001T2
DE60213001T2 DE60213001T DE60213001T DE60213001T2 DE 60213001 T2 DE60213001 T2 DE 60213001T2 DE 60213001 T DE60213001 T DE 60213001T DE 60213001 T DE60213001 T DE 60213001T DE 60213001 T2 DE60213001 T2 DE 60213001T2
Authority
DE
Germany
Prior art keywords
base plate
flow element
flow
fluid
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60213001T
Other languages
German (de)
English (en)
Other versions
DE60213001D1 (de
Inventor
Ian Austin SYMINGTON
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NXP USA Inc
Original Assignee
Freescale Semiconductor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Freescale Semiconductor Inc filed Critical Freescale Semiconductor Inc
Application granted granted Critical
Publication of DE60213001D1 publication Critical patent/DE60213001D1/de
Publication of DE60213001T2 publication Critical patent/DE60213001T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0402—Cleaning, repairing, or assembling
    • Y10T137/0441—Repairing, securing, replacing, or servicing pipe joint, valve, or tank
    • Y10T137/0452—Detecting or repairing leak
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Pipeline Systems (AREA)
  • Fluid-Pressure Circuits (AREA)
DE60213001T 2001-12-21 2002-12-12 Gerät zum verteilen von flüssigkeiten und grundplatte Expired - Fee Related DE60213001T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US27545 2001-12-21
US10/027,545 US6634385B2 (en) 2001-12-21 2001-12-21 Apparatus for conveying fluids and base plate
PCT/US2002/039700 WO2003056189A1 (en) 2001-12-21 2002-12-12 Apparatus for conveying fluids and base plate

Publications (2)

Publication Number Publication Date
DE60213001D1 DE60213001D1 (de) 2006-08-17
DE60213001T2 true DE60213001T2 (de) 2006-11-23

Family

ID=21838340

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60213001T Expired - Fee Related DE60213001T2 (de) 2001-12-21 2002-12-12 Gerät zum verteilen von flüssigkeiten und grundplatte

Country Status (6)

Country Link
US (1) US6634385B2 (https=)
EP (1) EP1458984B1 (https=)
JP (1) JP4663235B2 (https=)
AU (1) AU2002351364A1 (https=)
DE (1) DE60213001T2 (https=)
WO (1) WO2003056189A1 (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005539375A (ja) * 2002-08-27 2005-12-22 セレリティ・インコーポレイテッド 共通の平面にマニホルド接続を有するモジュール式基板ガスパネル
US7370674B2 (en) * 2004-02-20 2008-05-13 Michael Doyle Modular fluid distribution system
US20070023084A1 (en) * 2005-07-28 2007-02-01 Cimberio Valve Co. Inc. Valve module for a fluid-distribution system
JP2007152211A (ja) * 2005-12-02 2007-06-21 Asahi Organic Chem Ind Co Ltd フラッシング装置
US7575616B2 (en) * 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
US7784496B2 (en) * 2007-06-11 2010-08-31 Lam Research Corporation Triple valve inlet assembly
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
CN102804335B (zh) 2009-06-10 2015-10-21 威斯塔德尔特有限责任公司 极限流速和/或高温流体递送基体
WO2011010367A1 (ja) * 2009-07-21 2011-01-27 トヨタ自動車株式会社 燃料システム及び車両
US12500094B2 (en) 2023-09-01 2025-12-16 Applied Materials, Inc. Modular fluid delivery assembly

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3871209A (en) 1971-03-25 1975-03-18 Malvern M Hasha Method of externally testing connections between tubular members
CH558514A (de) * 1972-11-28 1975-01-31 Sulzer Ag Vorrichtung zum durchfuehren eines rohrbuendels durch eine behaelterwand.
US3895831A (en) * 1973-05-10 1975-07-22 Conax Corp Seal assembly providing dual seal zones
US4817994A (en) * 1987-10-14 1989-04-04 Bronnert Herve X Aseptic pipe joint
JPH02261983A (ja) * 1989-03-31 1990-10-24 Ishikawajima Harima Heavy Ind Co Ltd サイクル式分配弁
DE4134489A1 (de) 1991-03-28 1992-10-01 Weatherford Prod & Equip Einrichtung zum pruefen der gasdichtigkeit von loesbaren hohlkoerperverbindungen
US6293310B1 (en) * 1996-10-30 2001-09-25 Unit Instruments, Inc. Gas panel
JP3997337B2 (ja) * 1996-11-20 2007-10-24 忠弘 大見 流体制御装置
US6302141B1 (en) * 1996-12-03 2001-10-16 Insync Systems, Inc. Building blocks for integrated gas panel
US6068016A (en) * 1997-09-25 2000-05-30 Applied Materials, Inc Modular fluid flow system with integrated pump-purge
WO1999064772A1 (en) * 1998-06-12 1999-12-16 Hollingshead J Gregory Modular chemical delivery blocks
JP3626014B2 (ja) 1998-07-09 2005-03-02 シーケーディ株式会社 プロセスガス供給ユニットにおけるガス漏れ検査装置及びガス漏れ検査方法
US6026843A (en) 1998-11-24 2000-02-22 The Boc Group, Inc. Valve box manifold system and distribution method

Also Published As

Publication number Publication date
US20030116207A1 (en) 2003-06-26
US6634385B2 (en) 2003-10-21
JP4663235B2 (ja) 2011-04-06
EP1458984B1 (en) 2006-07-05
JP2005514561A (ja) 2005-05-19
AU2002351364A1 (en) 2003-07-15
EP1458984A1 (en) 2004-09-22
DE60213001D1 (de) 2006-08-17
WO2003056189A1 (en) 2003-07-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee